12/14/2010	12:03:01 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/14/2010	12:03:01 AM	Recipe started at 12:03 AM
12/14/2010	12:03:01 AM	Helium valve closed
12/14/2010	12:03:01 AM	H2 valve closed
12/14/2010	12:03:01 AM	BCl3 valve closed
12/14/2010	12:03:01 AM	PH3 valve closed
12/14/2010	12:03:01 AM	SiCl4 pre valve closed
12/14/2010	12:03:01 AM	SiCl4 post valve closed
12/14/2010	12:03:01 AM	Main Vac valve closed
12/14/2010	12:03:01 AM	Bubbler valve closed
12/14/2010	12:03:01 AM	Bypass valve opened
12/14/2010	12:03:01 AM	Helium MFC set to  0.000000
12/14/2010	12:03:01 AM	H2 MFC set to  0.000000
12/14/2010	12:03:01 AM	BCl3 MFC set to  0.000000
12/14/2010	12:03:01 AM	PHl3 MFC set to  0.000000
12/14/2010	12:03:01 AM	SiCl4 MFC set to  0.000000
12/14/2010	12:03:01 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	12:03:02 AM	Tube furnace set to 0
12/14/2010	12:03:57 AM	Helium valve closed
12/14/2010	12:03:57 AM	H2 valve closed
12/14/2010	12:03:57 AM	BCl3 valve closed
12/14/2010	12:03:57 AM	PH3 valve closed
12/14/2010	12:03:57 AM	SiCl4 pre valve closed
12/14/2010	12:03:57 AM	SiCl4 post valve closed
12/14/2010	12:03:57 AM	Bubbler valve closed
12/14/2010	12:03:57 AM	Main Vac valve opened
12/14/2010	12:03:57 AM	Bypass valve opened
12/14/2010	12:03:57 AM	Helium MFC set to  0.000000
12/14/2010	12:03:57 AM	H2 MFC set to  0.000000
12/14/2010	12:03:57 AM	BCl3 MFC set to  0.000000
12/14/2010	12:03:57 AM	PHl3 MFC set to  0.000000
12/14/2010	12:03:57 AM	SiCl4 MFC set to  0.000000
12/14/2010	12:03:57 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	12:03:57 AM	Tube furnace set to 0
12/14/2010	12:03:57 AM	Run finished at 12:03 AM
12/14/2010	12:03:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/14/2010	8:58:49 AM	Tube furnace set to 150
12/14/2010	8:58:55 AM	Main Vac valve closed
12/14/2010	8:58:57 AM	Bypass valve closed
12/14/2010	8:59:21 AM	Bypass valve opened
12/14/2010	8:59:23 AM	Main Vac valve opened
12/14/2010	9:04:12 AM	Recipe started at 9:04 AM
12/14/2010	9:04:12 AM	Helium valve closed
12/14/2010	9:04:12 AM	BCl3 valve closed
12/14/2010	9:04:12 AM	PH3 valve closed
12/14/2010	9:04:12 AM	SiCl4 pre valve closed
12/14/2010	9:04:12 AM	SiCl4 post valve closed
12/14/2010	9:04:12 AM	Main Vac valve closed
12/14/2010	9:04:12 AM	Bypass valve closed
12/14/2010	9:04:12 AM	Bubbler valve closed
12/14/2010	9:04:12 AM	H2 valve opened
12/14/2010	9:04:12 AM	Helium MFC set to  0.000000
12/14/2010	9:04:12 AM	H2 MFC set to  500.000000
12/14/2010	9:04:12 AM	BCl3 MFC set to  0.000000
12/14/2010	9:04:12 AM	PHl3 MFC set to  0.000000
12/14/2010	9:04:12 AM	SiCl4 MFC set to  0.000000
12/14/2010	9:04:12 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	9:04:12 AM	Tube furnace set to 200
12/14/2010	9:05:30 AM	Helium valve closed
12/14/2010	9:05:30 AM	BCl3 valve closed
12/14/2010	9:05:30 AM	PH3 valve closed
12/14/2010	9:05:30 AM	SiCl4 pre valve closed
12/14/2010	9:05:30 AM	SiCl4 post valve closed
12/14/2010	9:05:30 AM	Main Vac valve closed
12/14/2010	9:05:30 AM	Bypass valve closed
12/14/2010	9:05:30 AM	H2 valve opened
12/14/2010	9:05:30 AM	Bubbler valve opened
12/14/2010	9:05:30 AM	Helium MFC set to  0.000000
12/14/2010	9:05:30 AM	H2 MFC set to  400.000000
12/14/2010	9:05:30 AM	BCl3 MFC set to  0.000000
12/14/2010	9:05:30 AM	PHl3 MFC set to  0.000000
12/14/2010	9:05:30 AM	SiCl4 MFC set to  0.000000
12/14/2010	9:05:30 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	9:05:30 AM	Tube furnace set to 1001
12/14/2010	9:26:30 AM	Helium valve closed
12/14/2010	9:26:30 AM	BCl3 valve closed
12/14/2010	9:26:30 AM	PH3 valve closed
12/14/2010	9:26:30 AM	Main Vac valve closed
12/14/2010	9:26:30 AM	Bypass valve closed
12/14/2010	9:26:30 AM	H2 valve opened
12/14/2010	9:26:30 AM	SiCl4 pre valve opened
12/14/2010	9:26:30 AM	SiCl4 post valve opened
12/14/2010	9:26:30 AM	Bubbler valve opened
12/14/2010	9:26:30 AM	Helium MFC set to  0.000000
12/14/2010	9:26:30 AM	H2 MFC set to  500.000000
12/14/2010	9:26:30 AM	BCl3 MFC set to  0.000000
12/14/2010	9:26:30 AM	PHl3 MFC set to  0.000000
12/14/2010	9:26:30 AM	SiCl4 MFC set to  50.000000
12/14/2010	9:26:30 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	9:26:30 AM	Tube furnace set to 1000
12/14/2010	9:26:40 AM	Helium valve closed
12/14/2010	9:26:40 AM	PH3 valve closed
12/14/2010	9:26:40 AM	Main Vac valve closed
12/14/2010	9:26:40 AM	Bypass valve closed
12/14/2010	9:26:40 AM	H2 valve opened
12/14/2010	9:26:40 AM	BCl3 valve opened
12/14/2010	9:26:40 AM	SiCl4 pre valve opened
12/14/2010	9:26:40 AM	SiCl4 post valve opened
12/14/2010	9:26:40 AM	Bubbler valve opened
12/14/2010	9:26:41 AM	Helium MFC set to  0.000000
12/14/2010	9:26:41 AM	H2 MFC set to  500.000000
12/14/2010	9:26:41 AM	BCl3 MFC set to  10.000000
12/14/2010	9:26:41 AM	PHl3 MFC set to  0.000000
12/14/2010	9:26:41 AM	SiCl4 MFC set to  50.000000
12/14/2010	9:26:41 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	9:26:41 AM	Tube furnace set to 1000
12/14/2010	9:41:41 AM	H2 valve closed
12/14/2010	9:41:41 AM	BCl3 valve closed
12/14/2010	9:41:41 AM	PH3 valve closed
12/14/2010	9:41:41 AM	SiCl4 pre valve closed
12/14/2010	9:41:41 AM	SiCl4 post valve closed
12/14/2010	9:41:41 AM	Main Vac valve closed
12/14/2010	9:41:41 AM	Bypass valve closed
12/14/2010	9:41:41 AM	Helium valve opened
12/14/2010	9:41:41 AM	Bubbler valve opened
12/14/2010	9:41:41 AM	Helium MFC set to  500.000000
12/14/2010	9:41:41 AM	H2 MFC set to  0.000000
12/14/2010	9:41:41 AM	BCl3 MFC set to  0.000000
12/14/2010	9:41:41 AM	PHl3 MFC set to  0.000000
12/14/2010	9:41:41 AM	SiCl4 MFC set to  0.000000
12/14/2010	9:41:41 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	9:41:41 AM	Tube furnace set to 0
12/14/2010	9:41:46 AM	Helium valve closed
12/14/2010	9:41:46 AM	H2 valve closed
12/14/2010	9:41:46 AM	BCl3 valve closed
12/14/2010	9:41:46 AM	PH3 valve closed
12/14/2010	9:41:46 AM	SiCl4 pre valve closed
12/14/2010	9:41:46 AM	SiCl4 post valve closed
12/14/2010	9:41:46 AM	Main Vac valve closed
12/14/2010	9:41:46 AM	Bypass valve closed
12/14/2010	9:41:46 AM	Bubbler valve closed
12/14/2010	9:41:46 AM	Helium MFC set to  0.000000
12/14/2010	9:41:46 AM	H2 MFC set to  0.000000
12/14/2010	9:41:46 AM	BCl3 MFC set to  0.000000
12/14/2010	9:41:46 AM	PHl3 MFC set to  0.000000
12/14/2010	9:41:46 AM	SiCl4 MFC set to  0.000000
12/14/2010	9:41:46 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	9:41:46 AM	Tube furnace set to 0
12/14/2010	9:41:51 AM	Helium valve closed
12/14/2010	9:41:51 AM	H2 valve closed
12/14/2010	9:41:51 AM	BCl3 valve closed
12/14/2010	9:41:51 AM	PH3 valve closed
12/14/2010	9:41:51 AM	SiCl4 pre valve closed
12/14/2010	9:41:51 AM	SiCl4 post valve closed
12/14/2010	9:41:51 AM	Main Vac valve closed
12/14/2010	9:41:51 AM	Bubbler valve closed
12/14/2010	9:41:51 AM	Bypass valve opened
12/14/2010	9:41:51 AM	Helium MFC set to  0.000000
12/14/2010	9:41:51 AM	H2 MFC set to  0.000000
12/14/2010	9:41:51 AM	BCl3 MFC set to  0.000000
12/14/2010	9:41:51 AM	PHl3 MFC set to  0.000000
12/14/2010	9:41:51 AM	SiCl4 MFC set to  0.000000
12/14/2010	9:41:51 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	9:41:51 AM	Tube furnace set to 0
12/14/2010	9:41:56 AM	Helium valve closed
12/14/2010	9:41:56 AM	H2 valve closed
12/14/2010	9:41:56 AM	BCl3 valve closed
12/14/2010	9:41:56 AM	PH3 valve closed
12/14/2010	9:41:56 AM	SiCl4 pre valve closed
12/14/2010	9:41:56 AM	SiCl4 post valve closed
12/14/2010	9:41:56 AM	Bubbler valve closed
12/14/2010	9:41:56 AM	Main Vac valve opened
12/14/2010	9:41:56 AM	Bypass valve opened
12/14/2010	9:41:57 AM	Helium MFC set to  0.000000
12/14/2010	9:41:57 AM	H2 MFC set to  0.000000
12/14/2010	9:41:57 AM	BCl3 MFC set to  0.000000
12/14/2010	9:41:57 AM	PHl3 MFC set to  0.000000
12/14/2010	9:41:57 AM	SiCl4 MFC set to  0.000000
12/14/2010	9:41:57 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	9:41:57 AM	Tube furnace set to 0
12/14/2010	9:42:05 AM	H2 valve closed
12/14/2010	9:42:05 AM	BCl3 valve closed
12/14/2010	9:42:05 AM	PH3 valve closed
12/14/2010	9:42:05 AM	SiCl4 pre valve closed
12/14/2010	9:42:05 AM	SiCl4 post valve closed
12/14/2010	9:42:05 AM	Main Vac valve closed
12/14/2010	9:42:05 AM	Bypass valve closed
12/14/2010	9:42:05 AM	Bubbler valve closed
12/14/2010	9:42:05 AM	Helium valve opened
12/14/2010	9:42:05 AM	Helium MFC set to  500.000000
12/14/2010	9:42:05 AM	H2 MFC set to  0.000000
12/14/2010	9:42:05 AM	BCl3 MFC set to  0.000000
12/14/2010	9:42:05 AM	PHl3 MFC set to  0.000000
12/14/2010	9:42:05 AM	SiCl4 MFC set to  0.000000
12/14/2010	9:42:05 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	9:42:05 AM	Tube furnace set to 0
12/14/2010	9:43:14 AM	H2 valve closed
12/14/2010	9:43:14 AM	BCl3 valve closed
12/14/2010	9:43:14 AM	PH3 valve closed
12/14/2010	9:43:14 AM	SiCl4 pre valve closed
12/14/2010	9:43:14 AM	SiCl4 post valve closed
12/14/2010	9:43:14 AM	Main Vac valve closed
12/14/2010	9:43:14 AM	Bypass valve closed
12/14/2010	9:43:14 AM	Helium valve opened
12/14/2010	9:43:14 AM	Bubbler valve opened
12/14/2010	9:43:14 AM	Helium MFC set to  500.000000
12/14/2010	9:43:14 AM	H2 MFC set to  0.000000
12/14/2010	9:43:14 AM	BCl3 MFC set to  0.000000
12/14/2010	9:43:14 AM	PHl3 MFC set to  0.000000
12/14/2010	9:43:14 AM	SiCl4 MFC set to  0.000000
12/14/2010	9:43:14 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	9:43:14 AM	Tube furnace set to 0
12/14/2010	9:57:12 AM	Helium valve closed
12/14/2010	9:57:12 AM	H2 valve closed
12/14/2010	9:57:12 AM	BCl3 valve closed
12/14/2010	9:57:12 AM	PH3 valve closed
12/14/2010	9:57:12 AM	SiCl4 pre valve closed
12/14/2010	9:57:12 AM	SiCl4 post valve closed
12/14/2010	9:57:12 AM	Main Vac valve closed
12/14/2010	9:57:12 AM	Bubbler valve closed
12/14/2010	9:57:12 AM	Bypass valve closed
12/14/2010	9:57:12 AM	Helium MFC set to  0.000000
12/14/2010	9:57:12 AM	H2 MFC set to  0.000000
12/14/2010	9:57:12 AM	BCl3 MFC set to  0.000000
12/14/2010	9:57:12 AM	PHl3 MFC set to  0.000000
12/14/2010	9:57:12 AM	SiCl4 MFC set to  0.000000
12/14/2010	9:57:12 AM	Bypass solenoid MFC set to  760.000000
12/14/2010	9:57:12 AM	Tube furnace set to 0
12/14/2010	9:57:12 AM	Baratron reads 745.401633 Torr and NaOH valve is open.  Emergency exit.
12/14/2010	9:57:34 AM	Run aborted at 9:57 AM
12/14/2010	9:57:51 AM	Helium MFC set to  100.000000
12/14/2010	9:57:53 AM	Helium valve closed
12/14/2010	9:57:53 AM	Helium valve opened
12/14/2010	9:58:04 AM	Helium MFC set to  200.000000
12/14/2010	9:58:08 AM	Bubbler valve closed
12/14/2010	9:58:11 AM	Bubbler valve opened
12/14/2010	9:59:11 AM	Helium MFC set to  400.000000
12/14/2010	10:08:03 AM	Helium MFC set to  100.000000
12/14/2010	10:08:10 AM	Helium MFC set to  100.000000
12/14/2010	10:08:11 AM	Bubbler valve closed
12/14/2010	10:08:13 AM	Helium MFC set to  0.000000
12/14/2010	10:08:15 AM	Helium valve closed
12/14/2010	10:11:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/14/2010	10:11:31 AM	Recipe started at 10:11 AM
12/14/2010	10:11:31 AM	Helium valve closed
12/14/2010	10:11:31 AM	H2 valve closed
12/14/2010	10:11:31 AM	BCl3 valve closed
12/14/2010	10:11:31 AM	PH3 valve closed
12/14/2010	10:11:31 AM	SiCl4 pre valve closed
12/14/2010	10:11:31 AM	SiCl4 post valve closed
12/14/2010	10:11:31 AM	Main Vac valve closed
12/14/2010	10:11:31 AM	Bubbler valve closed
12/14/2010	10:11:31 AM	Bypass valve opened
12/14/2010	10:11:31 AM	Helium MFC set to  0.000000
12/14/2010	10:11:31 AM	H2 MFC set to  0.000000
12/14/2010	10:11:31 AM	BCl3 MFC set to  0.000000
12/14/2010	10:11:31 AM	PHl3 MFC set to  0.000000
12/14/2010	10:11:31 AM	SiCl4 MFC set to  0.000000
12/14/2010	10:11:31 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:11:31 AM	Tube furnace set to 0
12/14/2010	10:12:23 AM	Helium valve closed
12/14/2010	10:12:23 AM	H2 valve closed
12/14/2010	10:12:23 AM	BCl3 valve closed
12/14/2010	10:12:23 AM	PH3 valve closed
12/14/2010	10:12:23 AM	SiCl4 pre valve closed
12/14/2010	10:12:23 AM	SiCl4 post valve closed
12/14/2010	10:12:23 AM	Bubbler valve closed
12/14/2010	10:12:23 AM	Main Vac valve opened
12/14/2010	10:12:23 AM	Bypass valve opened
12/14/2010	10:12:23 AM	Helium MFC set to  0.000000
12/14/2010	10:12:23 AM	H2 MFC set to  0.000000
12/14/2010	10:12:23 AM	BCl3 MFC set to  0.000000
12/14/2010	10:12:23 AM	PHl3 MFC set to  0.000000
12/14/2010	10:12:23 AM	SiCl4 MFC set to  0.000000
12/14/2010	10:12:23 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:12:23 AM	Tube furnace set to 0
12/14/2010	10:13:23 AM	H2 valve closed
12/14/2010	10:13:23 AM	BCl3 valve closed
12/14/2010	10:13:23 AM	PH3 valve closed
12/14/2010	10:13:23 AM	SiCl4 pre valve closed
12/14/2010	10:13:23 AM	SiCl4 post valve closed
12/14/2010	10:13:23 AM	Bubbler valve closed
12/14/2010	10:13:23 AM	Helium valve opened
12/14/2010	10:13:23 AM	Main Vac valve opened
12/14/2010	10:13:23 AM	Bypass valve opened
12/14/2010	10:13:23 AM	Helium MFC set to  100.000000
12/14/2010	10:13:23 AM	H2 MFC set to  0.000000
12/14/2010	10:13:23 AM	BCl3 MFC set to  0.000000
12/14/2010	10:13:23 AM	PHl3 MFC set to  0.000000
12/14/2010	10:13:23 AM	SiCl4 MFC set to  0.000000
12/14/2010	10:13:23 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:13:23 AM	Tube furnace set to 0
12/14/2010	10:14:23 AM	Helium valve closed
12/14/2010	10:14:23 AM	H2 valve closed
12/14/2010	10:14:23 AM	BCl3 valve closed
12/14/2010	10:14:23 AM	PH3 valve closed
12/14/2010	10:14:23 AM	SiCl4 pre valve closed
12/14/2010	10:14:23 AM	SiCl4 post valve closed
12/14/2010	10:14:23 AM	Bubbler valve closed
12/14/2010	10:14:23 AM	Main Vac valve opened
12/14/2010	10:14:24 AM	Bypass valve opened
12/14/2010	10:14:24 AM	Helium MFC set to  0.000000
12/14/2010	10:14:24 AM	H2 MFC set to  0.000000
12/14/2010	10:14:24 AM	BCl3 MFC set to  0.000000
12/14/2010	10:14:24 AM	PHl3 MFC set to  0.000000
12/14/2010	10:14:24 AM	SiCl4 MFC set to  0.000000
12/14/2010	10:14:24 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:14:24 AM	Tube furnace set to 0
12/14/2010	10:15:24 AM	H2 valve closed
12/14/2010	10:15:24 AM	BCl3 valve closed
12/14/2010	10:15:24 AM	PH3 valve closed
12/14/2010	10:15:24 AM	SiCl4 pre valve closed
12/14/2010	10:15:24 AM	SiCl4 post valve closed
12/14/2010	10:15:24 AM	Bubbler valve closed
12/14/2010	10:15:24 AM	Helium valve opened
12/14/2010	10:15:24 AM	Main Vac valve opened
12/14/2010	10:15:24 AM	Bypass valve opened
12/14/2010	10:15:24 AM	Helium MFC set to  100.000000
12/14/2010	10:15:24 AM	H2 MFC set to  0.000000
12/14/2010	10:15:24 AM	BCl3 MFC set to  0.000000
12/14/2010	10:15:24 AM	PHl3 MFC set to  0.000000
12/14/2010	10:15:24 AM	SiCl4 MFC set to  0.000000
12/14/2010	10:15:24 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:15:24 AM	Tube furnace set to 0
12/14/2010	10:16:24 AM	Helium valve closed
12/14/2010	10:16:24 AM	H2 valve closed
12/14/2010	10:16:24 AM	BCl3 valve closed
12/14/2010	10:16:24 AM	PH3 valve closed
12/14/2010	10:16:24 AM	SiCl4 pre valve closed
12/14/2010	10:16:24 AM	SiCl4 post valve closed
12/14/2010	10:16:24 AM	Bubbler valve closed
12/14/2010	10:16:24 AM	Main Vac valve opened
12/14/2010	10:16:24 AM	Bypass valve opened
12/14/2010	10:16:24 AM	Helium MFC set to  0.000000
12/14/2010	10:16:24 AM	H2 MFC set to  0.000000
12/14/2010	10:16:24 AM	BCl3 MFC set to  0.000000
12/14/2010	10:16:24 AM	PHl3 MFC set to  0.000000
12/14/2010	10:16:24 AM	SiCl4 MFC set to  0.000000
12/14/2010	10:16:24 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:16:24 AM	Tube furnace set to 0
12/14/2010	10:17:24 AM	H2 valve closed
12/14/2010	10:17:24 AM	BCl3 valve closed
12/14/2010	10:17:24 AM	PH3 valve closed
12/14/2010	10:17:24 AM	SiCl4 pre valve closed
12/14/2010	10:17:24 AM	SiCl4 post valve closed
12/14/2010	10:17:24 AM	Bubbler valve closed
12/14/2010	10:17:24 AM	Helium valve opened
12/14/2010	10:17:24 AM	Main Vac valve opened
12/14/2010	10:17:24 AM	Bypass valve opened
12/14/2010	10:17:24 AM	Helium MFC set to  100.000000
12/14/2010	10:17:24 AM	H2 MFC set to  0.000000
12/14/2010	10:17:24 AM	BCl3 MFC set to  0.000000
12/14/2010	10:17:24 AM	PHl3 MFC set to  0.000000
12/14/2010	10:17:24 AM	SiCl4 MFC set to  0.000000
12/14/2010	10:17:24 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:17:24 AM	Tube furnace set to 0
12/14/2010	10:17:31 AM	Helium valve closed
12/14/2010	10:17:31 AM	H2 valve closed
12/14/2010	10:17:31 AM	BCl3 valve closed
12/14/2010	10:17:31 AM	PH3 valve closed
12/14/2010	10:17:31 AM	SiCl4 pre valve closed
12/14/2010	10:17:31 AM	SiCl4 post valve closed
12/14/2010	10:17:31 AM	Bubbler valve closed
12/14/2010	10:17:31 AM	Main Vac valve opened
12/14/2010	10:17:31 AM	Bypass valve opened
12/14/2010	10:17:31 AM	Helium MFC set to  0.000000
12/14/2010	10:17:31 AM	H2 MFC set to  0.000000
12/14/2010	10:17:31 AM	BCl3 MFC set to  0.000000
12/14/2010	10:17:31 AM	PHl3 MFC set to  0.000000
12/14/2010	10:17:31 AM	SiCl4 MFC set to  0.000000
12/14/2010	10:17:31 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:17:31 AM	Tube furnace set to 0
12/14/2010	10:18:31 AM	H2 valve closed
12/14/2010	10:18:31 AM	BCl3 valve closed
12/14/2010	10:18:31 AM	PH3 valve closed
12/14/2010	10:18:31 AM	SiCl4 pre valve closed
12/14/2010	10:18:31 AM	SiCl4 post valve closed
12/14/2010	10:18:31 AM	Bubbler valve closed
12/14/2010	10:18:31 AM	Helium valve opened
12/14/2010	10:18:31 AM	Main Vac valve opened
12/14/2010	10:18:31 AM	Bypass valve opened
12/14/2010	10:18:31 AM	Helium MFC set to  100.000000
12/14/2010	10:18:31 AM	H2 MFC set to  0.000000
12/14/2010	10:18:31 AM	BCl3 MFC set to  0.000000
12/14/2010	10:18:31 AM	PHl3 MFC set to  0.000000
12/14/2010	10:18:31 AM	SiCl4 MFC set to  0.000000
12/14/2010	10:18:31 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:18:31 AM	Tube furnace set to 0
12/14/2010	10:19:31 AM	Helium valve closed
12/14/2010	10:19:31 AM	H2 valve closed
12/14/2010	10:19:31 AM	BCl3 valve closed
12/14/2010	10:19:31 AM	PH3 valve closed
12/14/2010	10:19:31 AM	SiCl4 pre valve closed
12/14/2010	10:19:31 AM	SiCl4 post valve closed
12/14/2010	10:19:31 AM	Bubbler valve closed
12/14/2010	10:19:31 AM	Main Vac valve opened
12/14/2010	10:19:31 AM	Bypass valve opened
12/14/2010	10:19:31 AM	Helium MFC set to  0.000000
12/14/2010	10:19:31 AM	H2 MFC set to  0.000000
12/14/2010	10:19:31 AM	BCl3 MFC set to  0.000000
12/14/2010	10:19:31 AM	PHl3 MFC set to  0.000000
12/14/2010	10:19:31 AM	SiCl4 MFC set to  0.000000
12/14/2010	10:19:31 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:19:32 AM	Tube furnace set to 0
12/14/2010	10:20:32 AM	H2 valve closed
12/14/2010	10:20:32 AM	BCl3 valve closed
12/14/2010	10:20:32 AM	PH3 valve closed
12/14/2010	10:20:32 AM	SiCl4 pre valve closed
12/14/2010	10:20:32 AM	SiCl4 post valve closed
12/14/2010	10:20:32 AM	Bubbler valve closed
12/14/2010	10:20:32 AM	Helium valve opened
12/14/2010	10:20:32 AM	Main Vac valve opened
12/14/2010	10:20:32 AM	Bypass valve opened
12/14/2010	10:20:32 AM	Helium MFC set to  100.000000
12/14/2010	10:20:32 AM	H2 MFC set to  0.000000
12/14/2010	10:20:32 AM	BCl3 MFC set to  0.000000
12/14/2010	10:20:32 AM	PHl3 MFC set to  0.000000
12/14/2010	10:20:32 AM	SiCl4 MFC set to  0.000000
12/14/2010	10:20:32 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:20:32 AM	Tube furnace set to 0
12/14/2010	10:21:32 AM	Helium valve closed
12/14/2010	10:21:32 AM	H2 valve closed
12/14/2010	10:21:32 AM	BCl3 valve closed
12/14/2010	10:21:32 AM	PH3 valve closed
12/14/2010	10:21:32 AM	SiCl4 pre valve closed
12/14/2010	10:21:32 AM	SiCl4 post valve closed
12/14/2010	10:21:32 AM	Bubbler valve closed
12/14/2010	10:21:32 AM	Main Vac valve opened
12/14/2010	10:21:32 AM	Bypass valve opened
12/14/2010	10:21:32 AM	Helium MFC set to  0.000000
12/14/2010	10:21:32 AM	H2 MFC set to  0.000000
12/14/2010	10:21:32 AM	BCl3 MFC set to  0.000000
12/14/2010	10:21:32 AM	PHl3 MFC set to  0.000000
12/14/2010	10:21:32 AM	SiCl4 MFC set to  0.000000
12/14/2010	10:21:32 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:21:32 AM	Tube furnace set to 0
12/14/2010	10:22:30 AM	H2 valve closed
12/14/2010	10:22:30 AM	BCl3 valve closed
12/14/2010	10:22:30 AM	PH3 valve closed
12/14/2010	10:22:30 AM	SiCl4 pre valve closed
12/14/2010	10:22:30 AM	SiCl4 post valve closed
12/14/2010	10:22:30 AM	Bubbler valve closed
12/14/2010	10:22:30 AM	Helium valve opened
12/14/2010	10:22:30 AM	Main Vac valve opened
12/14/2010	10:22:30 AM	Bypass valve opened
12/14/2010	10:22:30 AM	Helium MFC set to  100.000000
12/14/2010	10:22:30 AM	H2 MFC set to  0.000000
12/14/2010	10:22:30 AM	BCl3 MFC set to  0.000000
12/14/2010	10:22:30 AM	PHl3 MFC set to  0.000000
12/14/2010	10:22:30 AM	SiCl4 MFC set to  0.000000
12/14/2010	10:22:30 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:22:30 AM	Tube furnace set to 0
12/14/2010	10:22:35 AM	Helium valve closed
12/14/2010	10:22:35 AM	H2 valve closed
12/14/2010	10:22:35 AM	BCl3 valve closed
12/14/2010	10:22:35 AM	PH3 valve closed
12/14/2010	10:22:35 AM	SiCl4 pre valve closed
12/14/2010	10:22:35 AM	SiCl4 post valve closed
12/14/2010	10:22:35 AM	Bubbler valve closed
12/14/2010	10:22:35 AM	Main Vac valve opened
12/14/2010	10:22:35 AM	Bypass valve opened
12/14/2010	10:22:35 AM	Helium MFC set to  0.000000
12/14/2010	10:22:35 AM	H2 MFC set to  0.000000
12/14/2010	10:22:35 AM	BCl3 MFC set to  0.000000
12/14/2010	10:22:35 AM	PHl3 MFC set to  0.000000
12/14/2010	10:22:35 AM	SiCl4 MFC set to  0.000000
12/14/2010	10:22:35 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:22:35 AM	Tube furnace set to 0
12/14/2010	10:23:35 AM	H2 valve closed
12/14/2010	10:23:35 AM	BCl3 valve closed
12/14/2010	10:23:35 AM	PH3 valve closed
12/14/2010	10:23:35 AM	SiCl4 pre valve closed
12/14/2010	10:23:35 AM	SiCl4 post valve closed
12/14/2010	10:23:35 AM	Bubbler valve closed
12/14/2010	10:23:35 AM	Helium valve opened
12/14/2010	10:23:35 AM	Main Vac valve opened
12/14/2010	10:23:35 AM	Bypass valve opened
12/14/2010	10:23:35 AM	Helium MFC set to  100.000000
12/14/2010	10:23:35 AM	H2 MFC set to  0.000000
12/14/2010	10:23:35 AM	BCl3 MFC set to  0.000000
12/14/2010	10:23:35 AM	PHl3 MFC set to  0.000000
12/14/2010	10:23:35 AM	SiCl4 MFC set to  0.000000
12/14/2010	10:23:35 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:23:35 AM	Tube furnace set to 0
12/14/2010	10:24:35 AM	Helium valve closed
12/14/2010	10:24:35 AM	H2 valve closed
12/14/2010	10:24:35 AM	BCl3 valve closed
12/14/2010	10:24:35 AM	PH3 valve closed
12/14/2010	10:24:35 AM	SiCl4 pre valve closed
12/14/2010	10:24:35 AM	SiCl4 post valve closed
12/14/2010	10:24:35 AM	Bubbler valve closed
12/14/2010	10:24:35 AM	Main Vac valve opened
12/14/2010	10:24:35 AM	Bypass valve opened
12/14/2010	10:24:35 AM	Helium MFC set to  0.000000
12/14/2010	10:24:35 AM	H2 MFC set to  0.000000
12/14/2010	10:24:35 AM	BCl3 MFC set to  0.000000
12/14/2010	10:24:35 AM	PHl3 MFC set to  0.000000
12/14/2010	10:24:35 AM	SiCl4 MFC set to  0.000000
12/14/2010	10:24:35 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:24:35 AM	Tube furnace set to 0
12/14/2010	10:25:12 AM	H2 valve closed
12/14/2010	10:25:12 AM	BCl3 valve closed
12/14/2010	10:25:12 AM	PH3 valve closed
12/14/2010	10:25:12 AM	SiCl4 pre valve closed
12/14/2010	10:25:12 AM	SiCl4 post valve closed
12/14/2010	10:25:12 AM	Bubbler valve closed
12/14/2010	10:25:12 AM	Helium valve opened
12/14/2010	10:25:12 AM	Main Vac valve opened
12/14/2010	10:25:12 AM	Bypass valve opened
12/14/2010	10:25:12 AM	Helium MFC set to  100.000000
12/14/2010	10:25:12 AM	H2 MFC set to  0.000000
12/14/2010	10:25:12 AM	BCl3 MFC set to  0.000000
12/14/2010	10:25:12 AM	PHl3 MFC set to  0.000000
12/14/2010	10:25:12 AM	SiCl4 MFC set to  0.000000
12/14/2010	10:25:12 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:25:12 AM	Tube furnace set to 0
12/14/2010	10:25:13 AM	Helium valve closed
12/14/2010	10:25:13 AM	H2 valve closed
12/14/2010	10:25:13 AM	BCl3 valve closed
12/14/2010	10:25:13 AM	PH3 valve closed
12/14/2010	10:25:13 AM	SiCl4 pre valve closed
12/14/2010	10:25:13 AM	SiCl4 post valve closed
12/14/2010	10:25:13 AM	Bubbler valve closed
12/14/2010	10:25:13 AM	Main Vac valve opened
12/14/2010	10:25:13 AM	Bypass valve opened
12/14/2010	10:25:13 AM	Helium MFC set to  0.000000
12/14/2010	10:25:13 AM	H2 MFC set to  0.000000
12/14/2010	10:25:13 AM	BCl3 MFC set to  0.000000
12/14/2010	10:25:13 AM	PHl3 MFC set to  0.000000
12/14/2010	10:25:13 AM	SiCl4 MFC set to  0.000000
12/14/2010	10:25:13 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:25:13 AM	Tube furnace set to 0
12/14/2010	10:26:13 AM	H2 valve closed
12/14/2010	10:26:13 AM	BCl3 valve closed
12/14/2010	10:26:13 AM	PH3 valve closed
12/14/2010	10:26:13 AM	SiCl4 pre valve closed
12/14/2010	10:26:13 AM	SiCl4 post valve closed
12/14/2010	10:26:13 AM	Bubbler valve closed
12/14/2010	10:26:13 AM	Helium valve opened
12/14/2010	10:26:13 AM	Main Vac valve opened
12/14/2010	10:26:13 AM	Bypass valve opened
12/14/2010	10:26:13 AM	Helium MFC set to  100.000000
12/14/2010	10:26:13 AM	H2 MFC set to  0.000000
12/14/2010	10:26:13 AM	BCl3 MFC set to  0.000000
12/14/2010	10:26:13 AM	PHl3 MFC set to  0.000000
12/14/2010	10:26:13 AM	SiCl4 MFC set to  0.000000
12/14/2010	10:26:13 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:26:14 AM	Tube furnace set to 0
12/14/2010	10:27:01 AM	Helium valve closed
12/14/2010	10:27:01 AM	H2 valve closed
12/14/2010	10:27:01 AM	BCl3 valve closed
12/14/2010	10:27:01 AM	PH3 valve closed
12/14/2010	10:27:01 AM	SiCl4 pre valve closed
12/14/2010	10:27:01 AM	SiCl4 post valve closed
12/14/2010	10:27:01 AM	Bubbler valve closed
12/14/2010	10:27:01 AM	Main Vac valve opened
12/14/2010	10:27:01 AM	Bypass valve opened
12/14/2010	10:27:01 AM	Helium MFC set to  0.000000
12/14/2010	10:27:01 AM	H2 MFC set to  0.000000
12/14/2010	10:27:01 AM	BCl3 MFC set to  0.000000
12/14/2010	10:27:01 AM	PHl3 MFC set to  0.000000
12/14/2010	10:27:01 AM	SiCl4 MFC set to  0.000000
12/14/2010	10:27:01 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:27:01 AM	Tube furnace set to 0
12/14/2010	10:27:04 AM	H2 valve closed
12/14/2010	10:27:04 AM	BCl3 valve closed
12/14/2010	10:27:04 AM	PH3 valve closed
12/14/2010	10:27:04 AM	SiCl4 pre valve closed
12/14/2010	10:27:04 AM	SiCl4 post valve closed
12/14/2010	10:27:04 AM	Bubbler valve closed
12/14/2010	10:27:04 AM	Helium valve opened
12/14/2010	10:27:04 AM	Main Vac valve opened
12/14/2010	10:27:04 AM	Bypass valve opened
12/14/2010	10:27:04 AM	Helium MFC set to  100.000000
12/14/2010	10:27:04 AM	H2 MFC set to  0.000000
12/14/2010	10:27:04 AM	BCl3 MFC set to  0.000000
12/14/2010	10:27:04 AM	PHl3 MFC set to  0.000000
12/14/2010	10:27:04 AM	SiCl4 MFC set to  0.000000
12/14/2010	10:27:04 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:27:04 AM	Tube furnace set to 0
12/14/2010	10:28:04 AM	Helium valve closed
12/14/2010	10:28:04 AM	H2 valve closed
12/14/2010	10:28:04 AM	BCl3 valve closed
12/14/2010	10:28:04 AM	PH3 valve closed
12/14/2010	10:28:04 AM	SiCl4 pre valve closed
12/14/2010	10:28:04 AM	SiCl4 post valve closed
12/14/2010	10:28:04 AM	Bubbler valve closed
12/14/2010	10:28:04 AM	Main Vac valve opened
12/14/2010	10:28:04 AM	Bypass valve opened
12/14/2010	10:28:04 AM	Helium MFC set to  0.000000
12/14/2010	10:28:04 AM	H2 MFC set to  0.000000
12/14/2010	10:28:04 AM	BCl3 MFC set to  0.000000
12/14/2010	10:28:04 AM	PHl3 MFC set to  0.000000
12/14/2010	10:28:04 AM	SiCl4 MFC set to  0.000000
12/14/2010	10:28:04 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:28:04 AM	Tube furnace set to 0
12/14/2010	10:28:05 AM	Run finished at 10:28 AM
12/14/2010	10:28:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/14/2010	10:30:49 AM	Main Vac valve closed
12/14/2010	10:30:51 AM	Bypass valve closed
12/14/2010	10:31:06 AM	Bypass valve opened
12/14/2010	10:31:07 AM	Main Vac valve opened
12/14/2010	10:31:13 AM	Helium MFC set to  100.000000
12/14/2010	10:31:13 AM	Helium valve opened
12/14/2010	10:32:00 AM	Helium MFC set to  0.000000
12/14/2010	10:32:01 AM	Helium valve closed
12/14/2010	10:32:52 AM	Recipe started at 10:32 AM
12/14/2010	10:32:52 AM	Helium valve closed
12/14/2010	10:32:52 AM	BCl3 valve closed
12/14/2010	10:32:52 AM	PH3 valve closed
12/14/2010	10:32:52 AM	SiCl4 pre valve closed
12/14/2010	10:32:52 AM	SiCl4 post valve closed
12/14/2010	10:32:52 AM	Main Vac valve closed
12/14/2010	10:32:52 AM	Bypass valve closed
12/14/2010	10:32:52 AM	Bubbler valve closed
12/14/2010	10:32:52 AM	H2 valve opened
12/14/2010	10:32:52 AM	Helium MFC set to  0.000000
12/14/2010	10:32:52 AM	H2 MFC set to  500.000000
12/14/2010	10:32:52 AM	BCl3 MFC set to  0.000000
12/14/2010	10:32:52 AM	PHl3 MFC set to  0.000000
12/14/2010	10:32:52 AM	SiCl4 MFC set to  0.000000
12/14/2010	10:32:52 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:32:52 AM	Tube furnace set to 200
12/14/2010	10:34:09 AM	Helium valve closed
12/14/2010	10:34:09 AM	BCl3 valve closed
12/14/2010	10:34:09 AM	PH3 valve closed
12/14/2010	10:34:09 AM	SiCl4 pre valve closed
12/14/2010	10:34:09 AM	SiCl4 post valve closed
12/14/2010	10:34:09 AM	Main Vac valve closed
12/14/2010	10:34:09 AM	Bypass valve closed
12/14/2010	10:34:09 AM	H2 valve opened
12/14/2010	10:34:09 AM	Bubbler valve opened
12/14/2010	10:34:09 AM	Helium MFC set to  0.000000
12/14/2010	10:34:09 AM	H2 MFC set to  400.000000
12/14/2010	10:34:09 AM	BCl3 MFC set to  0.000000
12/14/2010	10:34:09 AM	PHl3 MFC set to  0.000000
12/14/2010	10:34:09 AM	SiCl4 MFC set to  0.000000
12/14/2010	10:34:09 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:34:09 AM	Tube furnace set to 1001
12/14/2010	10:55:09 AM	Helium valve closed
12/14/2010	10:55:09 AM	BCl3 valve closed
12/14/2010	10:55:09 AM	PH3 valve closed
12/14/2010	10:55:09 AM	Main Vac valve closed
12/14/2010	10:55:09 AM	Bypass valve closed
12/14/2010	10:55:09 AM	H2 valve opened
12/14/2010	10:55:09 AM	SiCl4 pre valve opened
12/14/2010	10:55:09 AM	SiCl4 post valve opened
12/14/2010	10:55:09 AM	Bubbler valve opened
12/14/2010	10:55:09 AM	Helium MFC set to  0.000000
12/14/2010	10:55:09 AM	H2 MFC set to  500.000000
12/14/2010	10:55:09 AM	BCl3 MFC set to  0.000000
12/14/2010	10:55:09 AM	PHl3 MFC set to  0.000000
12/14/2010	10:55:09 AM	SiCl4 MFC set to  50.000000
12/14/2010	10:55:09 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:55:10 AM	Tube furnace set to 1000
12/14/2010	10:55:20 AM	Helium valve closed
12/14/2010	10:55:20 AM	PH3 valve closed
12/14/2010	10:55:20 AM	Main Vac valve closed
12/14/2010	10:55:20 AM	Bypass valve closed
12/14/2010	10:55:20 AM	H2 valve opened
12/14/2010	10:55:20 AM	BCl3 valve opened
12/14/2010	10:55:20 AM	SiCl4 pre valve opened
12/14/2010	10:55:20 AM	SiCl4 post valve opened
12/14/2010	10:55:20 AM	Bubbler valve opened
12/14/2010	10:55:20 AM	Helium MFC set to  0.000000
12/14/2010	10:55:20 AM	H2 MFC set to  400.000000
12/14/2010	10:55:20 AM	BCl3 MFC set to  8.000000
12/14/2010	10:55:20 AM	PHl3 MFC set to  0.000000
12/14/2010	10:55:20 AM	SiCl4 MFC set to  40.000000
12/14/2010	10:55:20 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:55:20 AM	Tube furnace set to 1000
12/14/2010	11:10:20 AM	H2 valve closed
12/14/2010	11:10:20 AM	BCl3 valve closed
12/14/2010	11:10:20 AM	PH3 valve closed
12/14/2010	11:10:20 AM	SiCl4 pre valve closed
12/14/2010	11:10:20 AM	SiCl4 post valve closed
12/14/2010	11:10:20 AM	Main Vac valve closed
12/14/2010	11:10:20 AM	Bypass valve closed
12/14/2010	11:10:20 AM	Helium valve opened
12/14/2010	11:10:20 AM	Bubbler valve opened
12/14/2010	11:10:20 AM	Helium MFC set to  500.000000
12/14/2010	11:10:20 AM	H2 MFC set to  0.000000
12/14/2010	11:10:20 AM	BCl3 MFC set to  0.000000
12/14/2010	11:10:20 AM	PHl3 MFC set to  0.000000
12/14/2010	11:10:20 AM	SiCl4 MFC set to  0.000000
12/14/2010	11:10:20 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	11:10:20 AM	Tube furnace set to 0
12/14/2010	11:10:25 AM	Helium valve closed
12/14/2010	11:10:25 AM	H2 valve closed
12/14/2010	11:10:25 AM	BCl3 valve closed
12/14/2010	11:10:25 AM	PH3 valve closed
12/14/2010	11:10:25 AM	SiCl4 pre valve closed
12/14/2010	11:10:25 AM	SiCl4 post valve closed
12/14/2010	11:10:25 AM	Main Vac valve closed
12/14/2010	11:10:25 AM	Bypass valve closed
12/14/2010	11:10:25 AM	Bubbler valve closed
12/14/2010	11:10:25 AM	Helium MFC set to  0.000000
12/14/2010	11:10:25 AM	H2 MFC set to  0.000000
12/14/2010	11:10:25 AM	BCl3 MFC set to  0.000000
12/14/2010	11:10:25 AM	PHl3 MFC set to  0.000000
12/14/2010	11:10:25 AM	SiCl4 MFC set to  0.000000
12/14/2010	11:10:25 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	11:10:25 AM	Tube furnace set to 0
12/14/2010	11:10:30 AM	Helium valve closed
12/14/2010	11:10:30 AM	H2 valve closed
12/14/2010	11:10:30 AM	BCl3 valve closed
12/14/2010	11:10:30 AM	PH3 valve closed
12/14/2010	11:10:30 AM	SiCl4 pre valve closed
12/14/2010	11:10:30 AM	SiCl4 post valve closed
12/14/2010	11:10:30 AM	Main Vac valve closed
12/14/2010	11:10:30 AM	Bubbler valve closed
12/14/2010	11:10:30 AM	Bypass valve opened
12/14/2010	11:10:30 AM	Helium MFC set to  0.000000
12/14/2010	11:10:30 AM	H2 MFC set to  0.000000
12/14/2010	11:10:30 AM	BCl3 MFC set to  0.000000
12/14/2010	11:10:30 AM	PHl3 MFC set to  0.000000
12/14/2010	11:10:30 AM	SiCl4 MFC set to  0.000000
12/14/2010	11:10:30 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	11:10:30 AM	Tube furnace set to 0
12/14/2010	11:10:36 AM	Helium valve closed
12/14/2010	11:10:36 AM	H2 valve closed
12/14/2010	11:10:36 AM	BCl3 valve closed
12/14/2010	11:10:36 AM	PH3 valve closed
12/14/2010	11:10:36 AM	SiCl4 pre valve closed
12/14/2010	11:10:36 AM	SiCl4 post valve closed
12/14/2010	11:10:36 AM	Bubbler valve closed
12/14/2010	11:10:36 AM	Main Vac valve opened
12/14/2010	11:10:36 AM	Bypass valve opened
12/14/2010	11:10:36 AM	Helium MFC set to  0.000000
12/14/2010	11:10:36 AM	H2 MFC set to  0.000000
12/14/2010	11:10:36 AM	BCl3 MFC set to  0.000000
12/14/2010	11:10:36 AM	PHl3 MFC set to  0.000000
12/14/2010	11:10:36 AM	SiCl4 MFC set to  0.000000
12/14/2010	11:10:36 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	11:10:36 AM	Tube furnace set to 0
12/14/2010	11:10:44 AM	H2 valve closed
12/14/2010	11:10:44 AM	BCl3 valve closed
12/14/2010	11:10:44 AM	PH3 valve closed
12/14/2010	11:10:44 AM	SiCl4 pre valve closed
12/14/2010	11:10:44 AM	SiCl4 post valve closed
12/14/2010	11:10:44 AM	Main Vac valve closed
12/14/2010	11:10:44 AM	Bypass valve closed
12/14/2010	11:10:44 AM	Bubbler valve closed
12/14/2010	11:10:44 AM	Helium valve opened
12/14/2010	11:10:44 AM	Helium MFC set to  500.000000
12/14/2010	11:10:44 AM	H2 MFC set to  0.000000
12/14/2010	11:10:44 AM	BCl3 MFC set to  0.000000
12/14/2010	11:10:44 AM	PHl3 MFC set to  0.000000
12/14/2010	11:10:44 AM	SiCl4 MFC set to  0.000000
12/14/2010	11:10:44 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	11:10:44 AM	Tube furnace set to 0
12/14/2010	11:11:53 AM	H2 valve closed
12/14/2010	11:11:53 AM	BCl3 valve closed
12/14/2010	11:11:53 AM	PH3 valve closed
12/14/2010	11:11:53 AM	SiCl4 pre valve closed
12/14/2010	11:11:53 AM	SiCl4 post valve closed
12/14/2010	11:11:53 AM	Main Vac valve closed
12/14/2010	11:11:53 AM	Bypass valve closed
12/14/2010	11:11:53 AM	Helium valve opened
12/14/2010	11:11:53 AM	Bubbler valve opened
12/14/2010	11:11:53 AM	Helium MFC set to  500.000000
12/14/2010	11:11:53 AM	H2 MFC set to  0.000000
12/14/2010	11:11:53 AM	BCl3 MFC set to  0.000000
12/14/2010	11:11:53 AM	PHl3 MFC set to  0.000000
12/14/2010	11:11:53 AM	SiCl4 MFC set to  0.000000
12/14/2010	11:11:53 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	11:11:53 AM	Tube furnace set to 0
12/14/2010	11:31:53 AM	Helium valve closed
12/14/2010	11:31:53 AM	H2 valve closed
12/14/2010	11:31:53 AM	BCl3 valve closed
12/14/2010	11:31:53 AM	PH3 valve closed
12/14/2010	11:31:53 AM	SiCl4 pre valve closed
12/14/2010	11:31:53 AM	SiCl4 post valve closed
12/14/2010	11:31:53 AM	Main Vac valve closed
12/14/2010	11:31:53 AM	Bypass valve closed
12/14/2010	11:31:53 AM	Bubbler valve closed
12/14/2010	11:31:53 AM	Helium MFC set to  0.000000
12/14/2010	11:31:53 AM	H2 MFC set to  0.000000
12/14/2010	11:31:53 AM	BCl3 MFC set to  0.000000
12/14/2010	11:31:53 AM	PHl3 MFC set to  0.000000
12/14/2010	11:31:53 AM	SiCl4 MFC set to  0.000000
12/14/2010	11:31:53 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	11:31:53 AM	Tube furnace set to 0
12/14/2010	11:31:54 AM	Run finished at 11:31 AM
12/14/2010	11:41:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/14/2010	11:41:56 AM	Recipe started at 11:41 AM
12/14/2010	11:41:56 AM	Helium valve closed
12/14/2010	11:41:56 AM	H2 valve closed
12/14/2010	11:41:56 AM	BCl3 valve closed
12/14/2010	11:41:56 AM	PH3 valve closed
12/14/2010	11:41:56 AM	SiCl4 pre valve closed
12/14/2010	11:41:56 AM	SiCl4 post valve closed
12/14/2010	11:41:56 AM	Main Vac valve closed
12/14/2010	11:41:56 AM	Bubbler valve closed
12/14/2010	11:41:56 AM	Bypass valve opened
12/14/2010	11:41:56 AM	Helium MFC set to  0.000000
12/14/2010	11:41:56 AM	H2 MFC set to  0.000000
12/14/2010	11:41:56 AM	BCl3 MFC set to  0.000000
12/14/2010	11:41:56 AM	PHl3 MFC set to  0.000000
12/14/2010	11:41:56 AM	SiCl4 MFC set to  0.000000
12/14/2010	11:41:56 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	11:41:56 AM	Tube furnace set to 0
12/14/2010	11:42:49 AM	Helium valve closed
12/14/2010	11:42:49 AM	H2 valve closed
12/14/2010	11:42:49 AM	BCl3 valve closed
12/14/2010	11:42:49 AM	PH3 valve closed
12/14/2010	11:42:49 AM	SiCl4 pre valve closed
12/14/2010	11:42:49 AM	SiCl4 post valve closed
12/14/2010	11:42:49 AM	Bubbler valve closed
12/14/2010	11:42:49 AM	Main Vac valve opened
12/14/2010	11:42:49 AM	Bypass valve opened
12/14/2010	11:42:49 AM	Helium MFC set to  0.000000
12/14/2010	11:42:49 AM	H2 MFC set to  0.000000
12/14/2010	11:42:49 AM	BCl3 MFC set to  0.000000
12/14/2010	11:42:49 AM	PHl3 MFC set to  0.000000
12/14/2010	11:42:49 AM	SiCl4 MFC set to  0.000000
12/14/2010	11:42:49 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	11:42:49 AM	Tube furnace set to 0
12/14/2010	11:43:49 AM	H2 valve closed
12/14/2010	11:43:49 AM	BCl3 valve closed
12/14/2010	11:43:49 AM	PH3 valve closed
12/14/2010	11:43:49 AM	SiCl4 pre valve closed
12/14/2010	11:43:49 AM	SiCl4 post valve closed
12/14/2010	11:43:49 AM	Bubbler valve closed
12/14/2010	11:43:49 AM	Helium valve opened
12/14/2010	11:43:49 AM	Main Vac valve opened
12/14/2010	11:43:49 AM	Bypass valve opened
12/14/2010	11:43:49 AM	Helium MFC set to  100.000000
12/14/2010	11:43:49 AM	H2 MFC set to  0.000000
12/14/2010	11:43:49 AM	BCl3 MFC set to  0.000000
12/14/2010	11:43:49 AM	PHl3 MFC set to  0.000000
12/14/2010	11:43:49 AM	SiCl4 MFC set to  0.000000
12/14/2010	11:43:49 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	11:43:49 AM	Tube furnace set to 0
12/14/2010	11:44:49 AM	Helium valve closed
12/14/2010	11:44:49 AM	H2 valve closed
12/14/2010	11:44:49 AM	BCl3 valve closed
12/14/2010	11:44:49 AM	PH3 valve closed
12/14/2010	11:44:49 AM	SiCl4 pre valve closed
12/14/2010	11:44:49 AM	SiCl4 post valve closed
12/14/2010	11:44:49 AM	Bubbler valve closed
12/14/2010	11:44:49 AM	Main Vac valve opened
12/14/2010	11:44:49 AM	Bypass valve opened
12/14/2010	11:44:49 AM	Helium MFC set to  0.000000
12/14/2010	11:44:49 AM	H2 MFC set to  0.000000
12/14/2010	11:44:49 AM	BCl3 MFC set to  0.000000
12/14/2010	11:44:49 AM	PHl3 MFC set to  0.000000
12/14/2010	11:44:49 AM	SiCl4 MFC set to  0.000000
12/14/2010	11:44:49 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	11:44:49 AM	Tube furnace set to 0
12/14/2010	11:45:49 AM	H2 valve closed
12/14/2010	11:45:49 AM	BCl3 valve closed
12/14/2010	11:45:49 AM	PH3 valve closed
12/14/2010	11:45:49 AM	SiCl4 pre valve closed
12/14/2010	11:45:49 AM	SiCl4 post valve closed
12/14/2010	11:45:49 AM	Bubbler valve closed
12/14/2010	11:45:49 AM	Helium valve opened
12/14/2010	11:45:49 AM	Main Vac valve opened
12/14/2010	11:45:49 AM	Bypass valve opened
12/14/2010	11:45:49 AM	Helium MFC set to  100.000000
12/14/2010	11:45:49 AM	H2 MFC set to  0.000000
12/14/2010	11:45:49 AM	BCl3 MFC set to  0.000000
12/14/2010	11:45:49 AM	PHl3 MFC set to  0.000000
12/14/2010	11:45:49 AM	SiCl4 MFC set to  0.000000
12/14/2010	11:45:49 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	11:45:50 AM	Tube furnace set to 0
12/14/2010	11:46:50 AM	Helium valve closed
12/14/2010	11:46:50 AM	H2 valve closed
12/14/2010	11:46:50 AM	BCl3 valve closed
12/14/2010	11:46:50 AM	PH3 valve closed
12/14/2010	11:46:50 AM	SiCl4 pre valve closed
12/14/2010	11:46:50 AM	SiCl4 post valve closed
12/14/2010	11:46:50 AM	Bubbler valve closed
12/14/2010	11:46:50 AM	Main Vac valve opened
12/14/2010	11:46:50 AM	Bypass valve opened
12/14/2010	11:46:50 AM	Helium MFC set to  0.000000
12/14/2010	11:46:50 AM	H2 MFC set to  0.000000
12/14/2010	11:46:50 AM	BCl3 MFC set to  0.000000
12/14/2010	11:46:50 AM	PHl3 MFC set to  0.000000
12/14/2010	11:46:50 AM	SiCl4 MFC set to  0.000000
12/14/2010	11:46:50 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	11:46:50 AM	Tube furnace set to 0
12/14/2010	11:47:50 AM	H2 valve closed
12/14/2010	11:47:50 AM	BCl3 valve closed
12/14/2010	11:47:50 AM	PH3 valve closed
12/14/2010	11:47:50 AM	SiCl4 pre valve closed
12/14/2010	11:47:50 AM	SiCl4 post valve closed
12/14/2010	11:47:50 AM	Bubbler valve closed
12/14/2010	11:47:50 AM	Helium valve opened
12/14/2010	11:47:50 AM	Main Vac valve opened
12/14/2010	11:47:50 AM	Bypass valve opened
12/14/2010	11:47:50 AM	Helium MFC set to  100.000000
12/14/2010	11:47:50 AM	H2 MFC set to  0.000000
12/14/2010	11:47:50 AM	BCl3 MFC set to  0.000000
12/14/2010	11:47:50 AM	PHl3 MFC set to  0.000000
12/14/2010	11:47:50 AM	SiCl4 MFC set to  0.000000
12/14/2010	11:47:50 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	11:47:50 AM	Tube furnace set to 0
12/14/2010	11:48:50 AM	Helium valve closed
12/14/2010	11:48:50 AM	H2 valve closed
12/14/2010	11:48:50 AM	BCl3 valve closed
12/14/2010	11:48:50 AM	PH3 valve closed
12/14/2010	11:48:50 AM	SiCl4 pre valve closed
12/14/2010	11:48:50 AM	SiCl4 post valve closed
12/14/2010	11:48:50 AM	Bubbler valve closed
12/14/2010	11:48:50 AM	Main Vac valve opened
12/14/2010	11:48:50 AM	Bypass valve opened
12/14/2010	11:48:50 AM	Helium MFC set to  0.000000
12/14/2010	11:48:50 AM	H2 MFC set to  0.000000
12/14/2010	11:48:50 AM	BCl3 MFC set to  0.000000
12/14/2010	11:48:50 AM	PHl3 MFC set to  0.000000
12/14/2010	11:48:50 AM	SiCl4 MFC set to  0.000000
12/14/2010	11:48:50 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	11:48:50 AM	Tube furnace set to 0
12/14/2010	11:49:50 AM	H2 valve closed
12/14/2010	11:49:50 AM	BCl3 valve closed
12/14/2010	11:49:50 AM	PH3 valve closed
12/14/2010	11:49:50 AM	SiCl4 pre valve closed
12/14/2010	11:49:50 AM	SiCl4 post valve closed
12/14/2010	11:49:50 AM	Bubbler valve closed
12/14/2010	11:49:50 AM	Helium valve opened
12/14/2010	11:49:50 AM	Main Vac valve opened
12/14/2010	11:49:50 AM	Bypass valve opened
12/14/2010	11:49:50 AM	Helium MFC set to  100.000000
12/14/2010	11:49:50 AM	H2 MFC set to  0.000000
12/14/2010	11:49:50 AM	BCl3 MFC set to  0.000000
12/14/2010	11:49:50 AM	PHl3 MFC set to  0.000000
12/14/2010	11:49:50 AM	SiCl4 MFC set to  0.000000
12/14/2010	11:49:50 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	11:49:50 AM	Tube furnace set to 0
12/14/2010	11:50:50 AM	Helium valve closed
12/14/2010	11:50:50 AM	H2 valve closed
12/14/2010	11:50:50 AM	BCl3 valve closed
12/14/2010	11:50:50 AM	PH3 valve closed
12/14/2010	11:50:50 AM	SiCl4 pre valve closed
12/14/2010	11:50:50 AM	SiCl4 post valve closed
12/14/2010	11:50:50 AM	Bubbler valve closed
12/14/2010	11:50:50 AM	Main Vac valve opened
12/14/2010	11:50:50 AM	Bypass valve opened
12/14/2010	11:50:50 AM	Helium MFC set to  0.000000
12/14/2010	11:50:50 AM	H2 MFC set to  0.000000
12/14/2010	11:50:50 AM	BCl3 MFC set to  0.000000
12/14/2010	11:50:50 AM	PHl3 MFC set to  0.000000
12/14/2010	11:50:50 AM	SiCl4 MFC set to  0.000000
12/14/2010	11:50:50 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	11:50:51 AM	Tube furnace set to 0
12/14/2010	11:51:51 AM	H2 valve closed
12/14/2010	11:51:51 AM	BCl3 valve closed
12/14/2010	11:51:51 AM	PH3 valve closed
12/14/2010	11:51:51 AM	SiCl4 pre valve closed
12/14/2010	11:51:51 AM	SiCl4 post valve closed
12/14/2010	11:51:51 AM	Bubbler valve closed
12/14/2010	11:51:51 AM	Helium valve opened
12/14/2010	11:51:51 AM	Main Vac valve opened
12/14/2010	11:51:51 AM	Bypass valve opened
12/14/2010	11:51:51 AM	Helium MFC set to  100.000000
12/14/2010	11:51:51 AM	H2 MFC set to  0.000000
12/14/2010	11:51:51 AM	BCl3 MFC set to  0.000000
12/14/2010	11:51:51 AM	PHl3 MFC set to  0.000000
12/14/2010	11:51:51 AM	SiCl4 MFC set to  0.000000
12/14/2010	11:51:51 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	11:51:51 AM	Tube furnace set to 0
12/14/2010	11:52:51 AM	Helium valve closed
12/14/2010	11:52:51 AM	H2 valve closed
12/14/2010	11:52:51 AM	BCl3 valve closed
12/14/2010	11:52:51 AM	PH3 valve closed
12/14/2010	11:52:51 AM	SiCl4 pre valve closed
12/14/2010	11:52:51 AM	SiCl4 post valve closed
12/14/2010	11:52:51 AM	Bubbler valve closed
12/14/2010	11:52:51 AM	Main Vac valve opened
12/14/2010	11:52:51 AM	Bypass valve opened
12/14/2010	11:52:51 AM	Helium MFC set to  0.000000
12/14/2010	11:52:51 AM	H2 MFC set to  0.000000
12/14/2010	11:52:51 AM	BCl3 MFC set to  0.000000
12/14/2010	11:52:51 AM	PHl3 MFC set to  0.000000
12/14/2010	11:52:51 AM	SiCl4 MFC set to  0.000000
12/14/2010	11:52:51 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	11:52:51 AM	Tube furnace set to 0
12/14/2010	11:53:51 AM	H2 valve closed
12/14/2010	11:53:51 AM	BCl3 valve closed
12/14/2010	11:53:51 AM	PH3 valve closed
12/14/2010	11:53:51 AM	SiCl4 pre valve closed
12/14/2010	11:53:51 AM	SiCl4 post valve closed
12/14/2010	11:53:51 AM	Bubbler valve closed
12/14/2010	11:53:51 AM	Helium valve opened
12/14/2010	11:53:51 AM	Main Vac valve opened
12/14/2010	11:53:51 AM	Bypass valve opened
12/14/2010	11:53:51 AM	Helium MFC set to  100.000000
12/14/2010	11:53:51 AM	H2 MFC set to  0.000000
12/14/2010	11:53:51 AM	BCl3 MFC set to  0.000000
12/14/2010	11:53:51 AM	PHl3 MFC set to  0.000000
12/14/2010	11:53:51 AM	SiCl4 MFC set to  0.000000
12/14/2010	11:53:51 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	11:53:51 AM	Tube furnace set to 0
12/14/2010	11:54:51 AM	Helium valve closed
12/14/2010	11:54:51 AM	H2 valve closed
12/14/2010	11:54:51 AM	BCl3 valve closed
12/14/2010	11:54:51 AM	PH3 valve closed
12/14/2010	11:54:51 AM	SiCl4 pre valve closed
12/14/2010	11:54:51 AM	SiCl4 post valve closed
12/14/2010	11:54:51 AM	Bubbler valve closed
12/14/2010	11:54:51 AM	Main Vac valve opened
12/14/2010	11:54:51 AM	Bypass valve opened
12/14/2010	11:54:51 AM	Helium MFC set to  0.000000
12/14/2010	11:54:51 AM	H2 MFC set to  0.000000
12/14/2010	11:54:51 AM	BCl3 MFC set to  0.000000
12/14/2010	11:54:51 AM	PHl3 MFC set to  0.000000
12/14/2010	11:54:51 AM	SiCl4 MFC set to  0.000000
12/14/2010	11:54:51 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	11:54:51 AM	Tube furnace set to 0
12/14/2010	11:55:51 AM	H2 valve closed
12/14/2010	11:55:51 AM	BCl3 valve closed
12/14/2010	11:55:51 AM	PH3 valve closed
12/14/2010	11:55:51 AM	SiCl4 pre valve closed
12/14/2010	11:55:51 AM	SiCl4 post valve closed
12/14/2010	11:55:51 AM	Bubbler valve closed
12/14/2010	11:55:51 AM	Helium valve opened
12/14/2010	11:55:51 AM	Main Vac valve opened
12/14/2010	11:55:51 AM	Bypass valve opened
12/14/2010	11:55:51 AM	Helium MFC set to  100.000000
12/14/2010	11:55:51 AM	H2 MFC set to  0.000000
12/14/2010	11:55:51 AM	BCl3 MFC set to  0.000000
12/14/2010	11:55:51 AM	PHl3 MFC set to  0.000000
12/14/2010	11:55:51 AM	SiCl4 MFC set to  0.000000
12/14/2010	11:55:51 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	11:55:52 AM	Tube furnace set to 0
12/14/2010	11:56:52 AM	Helium valve closed
12/14/2010	11:56:52 AM	H2 valve closed
12/14/2010	11:56:52 AM	BCl3 valve closed
12/14/2010	11:56:52 AM	PH3 valve closed
12/14/2010	11:56:52 AM	SiCl4 pre valve closed
12/14/2010	11:56:52 AM	SiCl4 post valve closed
12/14/2010	11:56:52 AM	Bubbler valve closed
12/14/2010	11:56:52 AM	Main Vac valve opened
12/14/2010	11:56:52 AM	Bypass valve opened
12/14/2010	11:56:52 AM	Helium MFC set to  0.000000
12/14/2010	11:56:52 AM	H2 MFC set to  0.000000
12/14/2010	11:56:52 AM	BCl3 MFC set to  0.000000
12/14/2010	11:56:52 AM	PHl3 MFC set to  0.000000
12/14/2010	11:56:52 AM	SiCl4 MFC set to  0.000000
12/14/2010	11:56:52 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	11:56:52 AM	Tube furnace set to 0
12/14/2010	11:57:52 AM	H2 valve closed
12/14/2010	11:57:52 AM	BCl3 valve closed
12/14/2010	11:57:52 AM	PH3 valve closed
12/14/2010	11:57:52 AM	SiCl4 pre valve closed
12/14/2010	11:57:52 AM	SiCl4 post valve closed
12/14/2010	11:57:52 AM	Bubbler valve closed
12/14/2010	11:57:52 AM	Helium valve opened
12/14/2010	11:57:52 AM	Main Vac valve opened
12/14/2010	11:57:52 AM	Bypass valve opened
12/14/2010	11:57:52 AM	Helium MFC set to  100.000000
12/14/2010	11:57:52 AM	H2 MFC set to  0.000000
12/14/2010	11:57:52 AM	BCl3 MFC set to  0.000000
12/14/2010	11:57:52 AM	PHl3 MFC set to  0.000000
12/14/2010	11:57:52 AM	SiCl4 MFC set to  0.000000
12/14/2010	11:57:52 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	11:57:52 AM	Tube furnace set to 0
12/14/2010	11:58:52 AM	Helium valve closed
12/14/2010	11:58:52 AM	H2 valve closed
12/14/2010	11:58:52 AM	BCl3 valve closed
12/14/2010	11:58:52 AM	PH3 valve closed
12/14/2010	11:58:52 AM	SiCl4 pre valve closed
12/14/2010	11:58:52 AM	SiCl4 post valve closed
12/14/2010	11:58:52 AM	Bubbler valve closed
12/14/2010	11:58:52 AM	Main Vac valve opened
12/14/2010	11:58:52 AM	Bypass valve opened
12/14/2010	11:58:52 AM	Helium MFC set to  0.000000
12/14/2010	11:58:52 AM	H2 MFC set to  0.000000
12/14/2010	11:58:52 AM	BCl3 MFC set to  0.000000
12/14/2010	11:58:52 AM	PHl3 MFC set to  0.000000
12/14/2010	11:58:52 AM	SiCl4 MFC set to  0.000000
12/14/2010	11:58:52 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	11:58:52 AM	Tube furnace set to 0
12/14/2010	11:59:52 AM	H2 valve closed
12/14/2010	11:59:52 AM	BCl3 valve closed
12/14/2010	11:59:52 AM	PH3 valve closed
12/14/2010	11:59:52 AM	SiCl4 pre valve closed
12/14/2010	11:59:52 AM	SiCl4 post valve closed
12/14/2010	11:59:52 AM	Bubbler valve closed
12/14/2010	11:59:52 AM	Helium valve opened
12/14/2010	11:59:52 AM	Main Vac valve opened
12/14/2010	11:59:52 AM	Bypass valve opened
12/14/2010	11:59:52 AM	Helium MFC set to  100.000000
12/14/2010	11:59:52 AM	H2 MFC set to  0.000000
12/14/2010	11:59:52 AM	BCl3 MFC set to  0.000000
12/14/2010	11:59:52 AM	PHl3 MFC set to  0.000000
12/14/2010	11:59:52 AM	SiCl4 MFC set to  0.000000
12/14/2010	11:59:52 AM	Bypass solenoid MFC set to  0.000000
12/14/2010	11:59:52 AM	Tube furnace set to 0
12/14/2010	12:00:52 PM	Helium valve closed
12/14/2010	12:00:52 PM	H2 valve closed
12/14/2010	12:00:52 PM	BCl3 valve closed
12/14/2010	12:00:52 PM	PH3 valve closed
12/14/2010	12:00:52 PM	SiCl4 pre valve closed
12/14/2010	12:00:52 PM	SiCl4 post valve closed
12/14/2010	12:00:52 PM	Bubbler valve closed
12/14/2010	12:00:52 PM	Main Vac valve opened
12/14/2010	12:00:52 PM	Bypass valve opened
12/14/2010	12:00:52 PM	Helium MFC set to  0.000000
12/14/2010	12:00:52 PM	H2 MFC set to  0.000000
12/14/2010	12:00:52 PM	BCl3 MFC set to  0.000000
12/14/2010	12:00:52 PM	PHl3 MFC set to  0.000000
12/14/2010	12:00:52 PM	SiCl4 MFC set to  0.000000
12/14/2010	12:00:52 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	12:00:53 PM	Tube furnace set to 0
12/14/2010	12:01:53 PM	H2 valve closed
12/14/2010	12:01:53 PM	BCl3 valve closed
12/14/2010	12:01:53 PM	PH3 valve closed
12/14/2010	12:01:53 PM	SiCl4 pre valve closed
12/14/2010	12:01:53 PM	SiCl4 post valve closed
12/14/2010	12:01:53 PM	Bubbler valve closed
12/14/2010	12:01:53 PM	Helium valve opened
12/14/2010	12:01:53 PM	Main Vac valve opened
12/14/2010	12:01:53 PM	Bypass valve opened
12/14/2010	12:01:53 PM	Helium MFC set to  100.000000
12/14/2010	12:01:53 PM	H2 MFC set to  0.000000
12/14/2010	12:01:53 PM	BCl3 MFC set to  0.000000
12/14/2010	12:01:53 PM	PHl3 MFC set to  0.000000
12/14/2010	12:01:53 PM	SiCl4 MFC set to  0.000000
12/14/2010	12:01:53 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	12:01:53 PM	Tube furnace set to 0
12/14/2010	12:02:53 PM	Helium valve closed
12/14/2010	12:02:53 PM	H2 valve closed
12/14/2010	12:02:53 PM	BCl3 valve closed
12/14/2010	12:02:53 PM	PH3 valve closed
12/14/2010	12:02:53 PM	SiCl4 pre valve closed
12/14/2010	12:02:53 PM	SiCl4 post valve closed
12/14/2010	12:02:53 PM	Bubbler valve closed
12/14/2010	12:02:53 PM	Main Vac valve opened
12/14/2010	12:02:53 PM	Bypass valve opened
12/14/2010	12:02:53 PM	Helium MFC set to  0.000000
12/14/2010	12:02:53 PM	H2 MFC set to  0.000000
12/14/2010	12:02:53 PM	BCl3 MFC set to  0.000000
12/14/2010	12:02:53 PM	PHl3 MFC set to  0.000000
12/14/2010	12:02:53 PM	SiCl4 MFC set to  0.000000
12/14/2010	12:02:53 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	12:02:53 PM	Tube furnace set to 0
12/14/2010	12:02:54 PM	Run finished at 12:02 PM
12/14/2010	12:02:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/14/2010	12:05:41 PM	Main Vac valve closed
12/14/2010	12:05:43 PM	Bypass valve closed
12/14/2010	12:05:50 PM	Bypass valve opened
12/14/2010	12:05:51 PM	Main Vac valve opened
12/14/2010	12:07:26 PM	Recipe started at 12:07 PM
12/14/2010	12:07:26 PM	Helium valve closed
12/14/2010	12:07:26 PM	BCl3 valve closed
12/14/2010	12:07:26 PM	PH3 valve closed
12/14/2010	12:07:26 PM	SiCl4 pre valve closed
12/14/2010	12:07:26 PM	SiCl4 post valve closed
12/14/2010	12:07:26 PM	Main Vac valve closed
12/14/2010	12:07:26 PM	Bypass valve closed
12/14/2010	12:07:26 PM	Bubbler valve closed
12/14/2010	12:07:26 PM	H2 valve opened
12/14/2010	12:07:26 PM	Helium MFC set to  0.000000
12/14/2010	12:07:26 PM	H2 MFC set to  500.000000
12/14/2010	12:07:26 PM	BCl3 MFC set to  0.000000
12/14/2010	12:07:26 PM	PHl3 MFC set to  0.000000
12/14/2010	12:07:26 PM	SiCl4 MFC set to  0.000000
12/14/2010	12:07:26 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	12:07:26 PM	Tube furnace set to 200
12/14/2010	12:08:44 PM	Helium valve closed
12/14/2010	12:08:44 PM	BCl3 valve closed
12/14/2010	12:08:44 PM	PH3 valve closed
12/14/2010	12:08:44 PM	SiCl4 pre valve closed
12/14/2010	12:08:44 PM	SiCl4 post valve closed
12/14/2010	12:08:44 PM	Main Vac valve closed
12/14/2010	12:08:44 PM	Bypass valve closed
12/14/2010	12:08:44 PM	H2 valve opened
12/14/2010	12:08:44 PM	Bubbler valve opened
12/14/2010	12:08:44 PM	Helium MFC set to  0.000000
12/14/2010	12:08:44 PM	H2 MFC set to  400.000000
12/14/2010	12:08:44 PM	BCl3 MFC set to  0.000000
12/14/2010	12:08:44 PM	PHl3 MFC set to  0.000000
12/14/2010	12:08:44 PM	SiCl4 MFC set to  0.000000
12/14/2010	12:08:44 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	12:08:44 PM	Tube furnace set to 1001
12/14/2010	12:29:44 PM	Helium valve closed
12/14/2010	12:29:44 PM	BCl3 valve closed
12/14/2010	12:29:44 PM	PH3 valve closed
12/14/2010	12:29:44 PM	Main Vac valve closed
12/14/2010	12:29:44 PM	Bypass valve closed
12/14/2010	12:29:44 PM	H2 valve opened
12/14/2010	12:29:44 PM	SiCl4 pre valve opened
12/14/2010	12:29:44 PM	SiCl4 post valve opened
12/14/2010	12:29:44 PM	Bubbler valve opened
12/14/2010	12:29:44 PM	Helium MFC set to  0.000000
12/14/2010	12:29:44 PM	H2 MFC set to  500.000000
12/14/2010	12:29:44 PM	BCl3 MFC set to  0.000000
12/14/2010	12:29:44 PM	PHl3 MFC set to  0.000000
12/14/2010	12:29:44 PM	SiCl4 MFC set to  50.000000
12/14/2010	12:29:44 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	12:29:44 PM	Tube furnace set to 1000
12/14/2010	12:29:54 PM	Helium valve closed
12/14/2010	12:29:54 PM	PH3 valve closed
12/14/2010	12:29:54 PM	Main Vac valve closed
12/14/2010	12:29:54 PM	Bypass valve closed
12/14/2010	12:29:54 PM	H2 valve opened
12/14/2010	12:29:54 PM	BCl3 valve opened
12/14/2010	12:29:54 PM	SiCl4 pre valve opened
12/14/2010	12:29:54 PM	SiCl4 post valve opened
12/14/2010	12:29:54 PM	Bubbler valve opened
12/14/2010	12:29:54 PM	Helium MFC set to  0.000000
12/14/2010	12:29:54 PM	H2 MFC set to  400.000000
12/14/2010	12:29:54 PM	BCl3 MFC set to  8.000000
12/14/2010	12:29:54 PM	PHl3 MFC set to  0.000000
12/14/2010	12:29:54 PM	SiCl4 MFC set to  40.000000
12/14/2010	12:29:54 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	12:29:54 PM	Tube furnace set to 1000
12/14/2010	12:44:54 PM	H2 valve closed
12/14/2010	12:44:54 PM	BCl3 valve closed
12/14/2010	12:44:54 PM	PH3 valve closed
12/14/2010	12:44:54 PM	SiCl4 pre valve closed
12/14/2010	12:44:54 PM	SiCl4 post valve closed
12/14/2010	12:44:54 PM	Main Vac valve closed
12/14/2010	12:44:54 PM	Bypass valve closed
12/14/2010	12:44:54 PM	Helium valve opened
12/14/2010	12:44:54 PM	Bubbler valve opened
12/14/2010	12:44:54 PM	Helium MFC set to  500.000000
12/14/2010	12:44:54 PM	H2 MFC set to  0.000000
12/14/2010	12:44:54 PM	BCl3 MFC set to  0.000000
12/14/2010	12:44:54 PM	PHl3 MFC set to  0.000000
12/14/2010	12:44:54 PM	SiCl4 MFC set to  0.000000
12/14/2010	12:44:54 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	12:44:54 PM	Tube furnace set to 0
12/14/2010	1:04:54 PM	Helium valve closed
12/14/2010	1:04:54 PM	H2 valve closed
12/14/2010	1:04:54 PM	BCl3 valve closed
12/14/2010	1:04:54 PM	PH3 valve closed
12/14/2010	1:04:54 PM	SiCl4 pre valve closed
12/14/2010	1:04:54 PM	SiCl4 post valve closed
12/14/2010	1:04:54 PM	Main Vac valve closed
12/14/2010	1:04:54 PM	Bypass valve closed
12/14/2010	1:04:54 PM	Bubbler valve closed
12/14/2010	1:04:54 PM	Helium MFC set to  0.000000
12/14/2010	1:04:54 PM	H2 MFC set to  0.000000
12/14/2010	1:04:54 PM	BCl3 MFC set to  0.000000
12/14/2010	1:04:54 PM	PHl3 MFC set to  0.000000
12/14/2010	1:04:54 PM	SiCl4 MFC set to  0.000000
12/14/2010	1:04:54 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	1:04:54 PM	Tube furnace set to 0
12/14/2010	1:04:55 PM	Run finished at 1:04 PM
12/14/2010	1:12:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/14/2010	1:13:01 PM	Recipe started at 1:12 PM
12/14/2010	1:13:01 PM	Helium valve closed
12/14/2010	1:13:01 PM	H2 valve closed
12/14/2010	1:13:01 PM	BCl3 valve closed
12/14/2010	1:13:01 PM	PH3 valve closed
12/14/2010	1:13:01 PM	SiCl4 pre valve closed
12/14/2010	1:13:01 PM	SiCl4 post valve closed
12/14/2010	1:13:01 PM	Main Vac valve closed
12/14/2010	1:13:01 PM	Bubbler valve closed
12/14/2010	1:13:01 PM	Bypass valve opened
12/14/2010	1:13:01 PM	Helium MFC set to  0.000000
12/14/2010	1:13:01 PM	H2 MFC set to  0.000000
12/14/2010	1:13:01 PM	BCl3 MFC set to  0.000000
12/14/2010	1:13:01 PM	PHl3 MFC set to  0.000000
12/14/2010	1:13:01 PM	SiCl4 MFC set to  0.000000
12/14/2010	1:13:01 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	1:13:01 PM	Tube furnace set to 0
12/14/2010	1:13:57 PM	Helium valve closed
12/14/2010	1:13:57 PM	H2 valve closed
12/14/2010	1:13:57 PM	BCl3 valve closed
12/14/2010	1:13:57 PM	PH3 valve closed
12/14/2010	1:13:57 PM	SiCl4 pre valve closed
12/14/2010	1:13:57 PM	SiCl4 post valve closed
12/14/2010	1:13:57 PM	Bubbler valve closed
12/14/2010	1:13:57 PM	Main Vac valve opened
12/14/2010	1:13:57 PM	Bypass valve opened
12/14/2010	1:13:57 PM	Helium MFC set to  0.000000
12/14/2010	1:13:57 PM	H2 MFC set to  0.000000
12/14/2010	1:13:57 PM	BCl3 MFC set to  0.000000
12/14/2010	1:13:57 PM	PHl3 MFC set to  0.000000
12/14/2010	1:13:57 PM	SiCl4 MFC set to  0.000000
12/14/2010	1:13:57 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	1:13:57 PM	Tube furnace set to 0
12/14/2010	1:14:57 PM	H2 valve closed
12/14/2010	1:14:57 PM	BCl3 valve closed
12/14/2010	1:14:57 PM	PH3 valve closed
12/14/2010	1:14:57 PM	SiCl4 pre valve closed
12/14/2010	1:14:57 PM	SiCl4 post valve closed
12/14/2010	1:14:57 PM	Bubbler valve closed
12/14/2010	1:14:57 PM	Helium valve opened
12/14/2010	1:14:57 PM	Main Vac valve opened
12/14/2010	1:14:57 PM	Bypass valve opened
12/14/2010	1:14:57 PM	Helium MFC set to  100.000000
12/14/2010	1:14:57 PM	H2 MFC set to  0.000000
12/14/2010	1:14:57 PM	BCl3 MFC set to  0.000000
12/14/2010	1:14:57 PM	PHl3 MFC set to  0.000000
12/14/2010	1:14:57 PM	SiCl4 MFC set to  0.000000
12/14/2010	1:14:57 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	1:14:57 PM	Tube furnace set to 0
12/14/2010	1:15:57 PM	Helium valve closed
12/14/2010	1:15:57 PM	H2 valve closed
12/14/2010	1:15:57 PM	BCl3 valve closed
12/14/2010	1:15:57 PM	PH3 valve closed
12/14/2010	1:15:57 PM	SiCl4 pre valve closed
12/14/2010	1:15:57 PM	SiCl4 post valve closed
12/14/2010	1:15:57 PM	Bubbler valve closed
12/14/2010	1:15:57 PM	Main Vac valve opened
12/14/2010	1:15:57 PM	Bypass valve opened
12/14/2010	1:15:57 PM	Helium MFC set to  0.000000
12/14/2010	1:15:57 PM	H2 MFC set to  0.000000
12/14/2010	1:15:57 PM	BCl3 MFC set to  0.000000
12/14/2010	1:15:57 PM	PHl3 MFC set to  0.000000
12/14/2010	1:15:57 PM	SiCl4 MFC set to  0.000000
12/14/2010	1:15:57 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	1:15:57 PM	Tube furnace set to 0
12/14/2010	1:16:57 PM	H2 valve closed
12/14/2010	1:16:57 PM	BCl3 valve closed
12/14/2010	1:16:57 PM	PH3 valve closed
12/14/2010	1:16:57 PM	SiCl4 pre valve closed
12/14/2010	1:16:57 PM	SiCl4 post valve closed
12/14/2010	1:16:57 PM	Bubbler valve closed
12/14/2010	1:16:57 PM	Helium valve opened
12/14/2010	1:16:57 PM	Main Vac valve opened
12/14/2010	1:16:57 PM	Bypass valve opened
12/14/2010	1:16:57 PM	Helium MFC set to  100.000000
12/14/2010	1:16:57 PM	H2 MFC set to  0.000000
12/14/2010	1:16:57 PM	BCl3 MFC set to  0.000000
12/14/2010	1:16:57 PM	PHl3 MFC set to  0.000000
12/14/2010	1:16:57 PM	SiCl4 MFC set to  0.000000
12/14/2010	1:16:57 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	1:16:57 PM	Tube furnace set to 0
12/14/2010	1:17:57 PM	Helium valve closed
12/14/2010	1:17:57 PM	H2 valve closed
12/14/2010	1:17:57 PM	BCl3 valve closed
12/14/2010	1:17:57 PM	PH3 valve closed
12/14/2010	1:17:57 PM	SiCl4 pre valve closed
12/14/2010	1:17:57 PM	SiCl4 post valve closed
12/14/2010	1:17:57 PM	Bubbler valve closed
12/14/2010	1:17:57 PM	Main Vac valve opened
12/14/2010	1:17:57 PM	Bypass valve opened
12/14/2010	1:17:57 PM	Helium MFC set to  0.000000
12/14/2010	1:17:57 PM	H2 MFC set to  0.000000
12/14/2010	1:17:57 PM	BCl3 MFC set to  0.000000
12/14/2010	1:17:57 PM	PHl3 MFC set to  0.000000
12/14/2010	1:17:57 PM	SiCl4 MFC set to  0.000000
12/14/2010	1:17:57 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	1:17:58 PM	Tube furnace set to 0
12/14/2010	1:18:58 PM	H2 valve closed
12/14/2010	1:18:58 PM	BCl3 valve closed
12/14/2010	1:18:58 PM	PH3 valve closed
12/14/2010	1:18:58 PM	SiCl4 pre valve closed
12/14/2010	1:18:58 PM	SiCl4 post valve closed
12/14/2010	1:18:58 PM	Bubbler valve closed
12/14/2010	1:18:58 PM	Helium valve opened
12/14/2010	1:18:58 PM	Main Vac valve opened
12/14/2010	1:18:58 PM	Bypass valve opened
12/14/2010	1:18:58 PM	Helium MFC set to  100.000000
12/14/2010	1:18:58 PM	H2 MFC set to  0.000000
12/14/2010	1:18:58 PM	BCl3 MFC set to  0.000000
12/14/2010	1:18:58 PM	PHl3 MFC set to  0.000000
12/14/2010	1:18:58 PM	SiCl4 MFC set to  0.000000
12/14/2010	1:18:58 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	1:18:58 PM	Tube furnace set to 0
12/14/2010	1:19:58 PM	Helium valve closed
12/14/2010	1:19:58 PM	H2 valve closed
12/14/2010	1:19:58 PM	BCl3 valve closed
12/14/2010	1:19:58 PM	PH3 valve closed
12/14/2010	1:19:58 PM	SiCl4 pre valve closed
12/14/2010	1:19:58 PM	SiCl4 post valve closed
12/14/2010	1:19:58 PM	Bubbler valve closed
12/14/2010	1:19:58 PM	Main Vac valve opened
12/14/2010	1:19:58 PM	Bypass valve opened
12/14/2010	1:19:58 PM	Helium MFC set to  0.000000
12/14/2010	1:19:58 PM	H2 MFC set to  0.000000
12/14/2010	1:19:58 PM	BCl3 MFC set to  0.000000
12/14/2010	1:19:58 PM	PHl3 MFC set to  0.000000
12/14/2010	1:19:58 PM	SiCl4 MFC set to  0.000000
12/14/2010	1:19:58 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	1:19:58 PM	Tube furnace set to 0
12/14/2010	1:20:58 PM	H2 valve closed
12/14/2010	1:20:58 PM	BCl3 valve closed
12/14/2010	1:20:58 PM	PH3 valve closed
12/14/2010	1:20:58 PM	SiCl4 pre valve closed
12/14/2010	1:20:58 PM	SiCl4 post valve closed
12/14/2010	1:20:58 PM	Bubbler valve closed
12/14/2010	1:20:58 PM	Helium valve opened
12/14/2010	1:20:58 PM	Main Vac valve opened
12/14/2010	1:20:58 PM	Bypass valve opened
12/14/2010	1:20:58 PM	Helium MFC set to  100.000000
12/14/2010	1:20:58 PM	H2 MFC set to  0.000000
12/14/2010	1:20:58 PM	BCl3 MFC set to  0.000000
12/14/2010	1:20:58 PM	PHl3 MFC set to  0.000000
12/14/2010	1:20:58 PM	SiCl4 MFC set to  0.000000
12/14/2010	1:20:58 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	1:20:58 PM	Tube furnace set to 0
12/14/2010	1:21:58 PM	Helium valve closed
12/14/2010	1:21:58 PM	H2 valve closed
12/14/2010	1:21:58 PM	BCl3 valve closed
12/14/2010	1:21:58 PM	PH3 valve closed
12/14/2010	1:21:58 PM	SiCl4 pre valve closed
12/14/2010	1:21:58 PM	SiCl4 post valve closed
12/14/2010	1:21:58 PM	Bubbler valve closed
12/14/2010	1:21:58 PM	Main Vac valve opened
12/14/2010	1:21:58 PM	Bypass valve opened
12/14/2010	1:21:58 PM	Helium MFC set to  0.000000
12/14/2010	1:21:58 PM	H2 MFC set to  0.000000
12/14/2010	1:21:58 PM	BCl3 MFC set to  0.000000
12/14/2010	1:21:58 PM	PHl3 MFC set to  0.000000
12/14/2010	1:21:58 PM	SiCl4 MFC set to  0.000000
12/14/2010	1:21:58 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	1:21:58 PM	Tube furnace set to 0
12/14/2010	1:22:58 PM	H2 valve closed
12/14/2010	1:22:58 PM	BCl3 valve closed
12/14/2010	1:22:58 PM	PH3 valve closed
12/14/2010	1:22:58 PM	SiCl4 pre valve closed
12/14/2010	1:22:58 PM	SiCl4 post valve closed
12/14/2010	1:22:58 PM	Bubbler valve closed
12/14/2010	1:22:58 PM	Helium valve opened
12/14/2010	1:22:58 PM	Main Vac valve opened
12/14/2010	1:22:58 PM	Bypass valve opened
12/14/2010	1:22:58 PM	Helium MFC set to  100.000000
12/14/2010	1:22:58 PM	H2 MFC set to  0.000000
12/14/2010	1:22:58 PM	BCl3 MFC set to  0.000000
12/14/2010	1:22:58 PM	PHl3 MFC set to  0.000000
12/14/2010	1:22:58 PM	SiCl4 MFC set to  0.000000
12/14/2010	1:22:58 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	1:22:59 PM	Tube furnace set to 0
12/14/2010	1:23:59 PM	Helium valve closed
12/14/2010	1:23:59 PM	H2 valve closed
12/14/2010	1:23:59 PM	BCl3 valve closed
12/14/2010	1:23:59 PM	PH3 valve closed
12/14/2010	1:23:59 PM	SiCl4 pre valve closed
12/14/2010	1:23:59 PM	SiCl4 post valve closed
12/14/2010	1:23:59 PM	Bubbler valve closed
12/14/2010	1:23:59 PM	Main Vac valve opened
12/14/2010	1:23:59 PM	Bypass valve opened
12/14/2010	1:23:59 PM	Helium MFC set to  0.000000
12/14/2010	1:23:59 PM	H2 MFC set to  0.000000
12/14/2010	1:23:59 PM	BCl3 MFC set to  0.000000
12/14/2010	1:23:59 PM	PHl3 MFC set to  0.000000
12/14/2010	1:23:59 PM	SiCl4 MFC set to  0.000000
12/14/2010	1:23:59 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	1:23:59 PM	Tube furnace set to 0
12/14/2010	1:24:59 PM	H2 valve closed
12/14/2010	1:24:59 PM	BCl3 valve closed
12/14/2010	1:24:59 PM	PH3 valve closed
12/14/2010	1:24:59 PM	SiCl4 pre valve closed
12/14/2010	1:24:59 PM	SiCl4 post valve closed
12/14/2010	1:24:59 PM	Bubbler valve closed
12/14/2010	1:24:59 PM	Helium valve opened
12/14/2010	1:24:59 PM	Main Vac valve opened
12/14/2010	1:24:59 PM	Bypass valve opened
12/14/2010	1:24:59 PM	Helium MFC set to  100.000000
12/14/2010	1:24:59 PM	H2 MFC set to  0.000000
12/14/2010	1:24:59 PM	BCl3 MFC set to  0.000000
12/14/2010	1:24:59 PM	PHl3 MFC set to  0.000000
12/14/2010	1:24:59 PM	SiCl4 MFC set to  0.000000
12/14/2010	1:24:59 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	1:24:59 PM	Tube furnace set to 0
12/14/2010	1:25:16 PM	Helium valve closed
12/14/2010	1:25:16 PM	H2 valve closed
12/14/2010	1:25:16 PM	BCl3 valve closed
12/14/2010	1:25:16 PM	PH3 valve closed
12/14/2010	1:25:16 PM	SiCl4 pre valve closed
12/14/2010	1:25:16 PM	SiCl4 post valve closed
12/14/2010	1:25:16 PM	Bubbler valve closed
12/14/2010	1:25:16 PM	Main Vac valve opened
12/14/2010	1:25:16 PM	Bypass valve opened
12/14/2010	1:25:16 PM	Helium MFC set to  0.000000
12/14/2010	1:25:16 PM	H2 MFC set to  0.000000
12/14/2010	1:25:16 PM	BCl3 MFC set to  0.000000
12/14/2010	1:25:16 PM	PHl3 MFC set to  0.000000
12/14/2010	1:25:16 PM	SiCl4 MFC set to  0.000000
12/14/2010	1:25:16 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	1:25:16 PM	Tube furnace set to 0
12/14/2010	1:26:16 PM	H2 valve closed
12/14/2010	1:26:16 PM	BCl3 valve closed
12/14/2010	1:26:16 PM	PH3 valve closed
12/14/2010	1:26:16 PM	SiCl4 pre valve closed
12/14/2010	1:26:16 PM	SiCl4 post valve closed
12/14/2010	1:26:16 PM	Bubbler valve closed
12/14/2010	1:26:16 PM	Helium valve opened
12/14/2010	1:26:16 PM	Main Vac valve opened
12/14/2010	1:26:16 PM	Bypass valve opened
12/14/2010	1:26:16 PM	Helium MFC set to  100.000000
12/14/2010	1:26:16 PM	H2 MFC set to  0.000000
12/14/2010	1:26:16 PM	BCl3 MFC set to  0.000000
12/14/2010	1:26:16 PM	PHl3 MFC set to  0.000000
12/14/2010	1:26:16 PM	SiCl4 MFC set to  0.000000
12/14/2010	1:26:16 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	1:26:16 PM	Tube furnace set to 0
12/14/2010	1:26:19 PM	Helium valve closed
12/14/2010	1:26:19 PM	H2 valve closed
12/14/2010	1:26:19 PM	BCl3 valve closed
12/14/2010	1:26:19 PM	PH3 valve closed
12/14/2010	1:26:19 PM	SiCl4 pre valve closed
12/14/2010	1:26:19 PM	SiCl4 post valve closed
12/14/2010	1:26:19 PM	Bubbler valve closed
12/14/2010	1:26:19 PM	Main Vac valve opened
12/14/2010	1:26:19 PM	Bypass valve opened
12/14/2010	1:26:19 PM	Helium MFC set to  0.000000
12/14/2010	1:26:19 PM	H2 MFC set to  0.000000
12/14/2010	1:26:19 PM	BCl3 MFC set to  0.000000
12/14/2010	1:26:19 PM	PHl3 MFC set to  0.000000
12/14/2010	1:26:19 PM	SiCl4 MFC set to  0.000000
12/14/2010	1:26:19 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	1:26:19 PM	Tube furnace set to 0
12/14/2010	1:26:20 PM	H2 valve closed
12/14/2010	1:26:20 PM	BCl3 valve closed
12/14/2010	1:26:20 PM	PH3 valve closed
12/14/2010	1:26:20 PM	SiCl4 pre valve closed
12/14/2010	1:26:20 PM	SiCl4 post valve closed
12/14/2010	1:26:20 PM	Bubbler valve closed
12/14/2010	1:26:20 PM	Helium valve opened
12/14/2010	1:26:20 PM	Main Vac valve opened
12/14/2010	1:26:20 PM	Bypass valve opened
12/14/2010	1:26:20 PM	Helium MFC set to  100.000000
12/14/2010	1:26:20 PM	H2 MFC set to  0.000000
12/14/2010	1:26:20 PM	BCl3 MFC set to  0.000000
12/14/2010	1:26:20 PM	PHl3 MFC set to  0.000000
12/14/2010	1:26:20 PM	SiCl4 MFC set to  0.000000
12/14/2010	1:26:20 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	1:26:20 PM	Tube furnace set to 0
12/14/2010	1:26:25 PM	Helium valve closed
12/14/2010	1:26:25 PM	H2 valve closed
12/14/2010	1:26:25 PM	BCl3 valve closed
12/14/2010	1:26:25 PM	PH3 valve closed
12/14/2010	1:26:25 PM	SiCl4 pre valve closed
12/14/2010	1:26:25 PM	SiCl4 post valve closed
12/14/2010	1:26:25 PM	Bubbler valve closed
12/14/2010	1:26:25 PM	Main Vac valve opened
12/14/2010	1:26:25 PM	Bypass valve opened
12/14/2010	1:26:25 PM	Helium MFC set to  0.000000
12/14/2010	1:26:25 PM	H2 MFC set to  0.000000
12/14/2010	1:26:25 PM	BCl3 MFC set to  0.000000
12/14/2010	1:26:25 PM	PHl3 MFC set to  0.000000
12/14/2010	1:26:25 PM	SiCl4 MFC set to  0.000000
12/14/2010	1:26:25 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	1:26:25 PM	Tube furnace set to 0
12/14/2010	1:27:25 PM	H2 valve closed
12/14/2010	1:27:25 PM	BCl3 valve closed
12/14/2010	1:27:25 PM	PH3 valve closed
12/14/2010	1:27:25 PM	SiCl4 pre valve closed
12/14/2010	1:27:25 PM	SiCl4 post valve closed
12/14/2010	1:27:25 PM	Bubbler valve closed
12/14/2010	1:27:25 PM	Helium valve opened
12/14/2010	1:27:25 PM	Main Vac valve opened
12/14/2010	1:27:25 PM	Bypass valve opened
12/14/2010	1:27:25 PM	Helium MFC set to  100.000000
12/14/2010	1:27:25 PM	H2 MFC set to  0.000000
12/14/2010	1:27:25 PM	BCl3 MFC set to  0.000000
12/14/2010	1:27:25 PM	PHl3 MFC set to  0.000000
12/14/2010	1:27:25 PM	SiCl4 MFC set to  0.000000
12/14/2010	1:27:25 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	1:27:25 PM	Tube furnace set to 0
12/14/2010	1:28:25 PM	Helium valve closed
12/14/2010	1:28:25 PM	H2 valve closed
12/14/2010	1:28:25 PM	BCl3 valve closed
12/14/2010	1:28:25 PM	PH3 valve closed
12/14/2010	1:28:25 PM	SiCl4 pre valve closed
12/14/2010	1:28:25 PM	SiCl4 post valve closed
12/14/2010	1:28:25 PM	Bubbler valve closed
12/14/2010	1:28:25 PM	Main Vac valve opened
12/14/2010	1:28:25 PM	Bypass valve opened
12/14/2010	1:28:25 PM	Helium MFC set to  0.000000
12/14/2010	1:28:25 PM	H2 MFC set to  0.000000
12/14/2010	1:28:25 PM	BCl3 MFC set to  0.000000
12/14/2010	1:28:25 PM	PHl3 MFC set to  0.000000
12/14/2010	1:28:25 PM	SiCl4 MFC set to  0.000000
12/14/2010	1:28:25 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	1:28:25 PM	Tube furnace set to 0
12/14/2010	1:29:19 PM	H2 valve closed
12/14/2010	1:29:19 PM	BCl3 valve closed
12/14/2010	1:29:19 PM	PH3 valve closed
12/14/2010	1:29:19 PM	SiCl4 pre valve closed
12/14/2010	1:29:19 PM	SiCl4 post valve closed
12/14/2010	1:29:19 PM	Bubbler valve closed
12/14/2010	1:29:19 PM	Helium valve opened
12/14/2010	1:29:19 PM	Main Vac valve opened
12/14/2010	1:29:19 PM	Bypass valve opened
12/14/2010	1:29:19 PM	Helium MFC set to  100.000000
12/14/2010	1:29:19 PM	H2 MFC set to  0.000000
12/14/2010	1:29:19 PM	BCl3 MFC set to  0.000000
12/14/2010	1:29:19 PM	PHl3 MFC set to  0.000000
12/14/2010	1:29:19 PM	SiCl4 MFC set to  0.000000
12/14/2010	1:29:19 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	1:29:19 PM	Tube furnace set to 0
12/14/2010	1:29:21 PM	Helium valve closed
12/14/2010	1:29:21 PM	H2 valve closed
12/14/2010	1:29:21 PM	BCl3 valve closed
12/14/2010	1:29:21 PM	PH3 valve closed
12/14/2010	1:29:21 PM	SiCl4 pre valve closed
12/14/2010	1:29:21 PM	SiCl4 post valve closed
12/14/2010	1:29:21 PM	Bubbler valve closed
12/14/2010	1:29:21 PM	Main Vac valve opened
12/14/2010	1:29:21 PM	Bypass valve opened
12/14/2010	1:29:21 PM	Helium MFC set to  0.000000
12/14/2010	1:29:21 PM	H2 MFC set to  0.000000
12/14/2010	1:29:21 PM	BCl3 MFC set to  0.000000
12/14/2010	1:29:21 PM	PHl3 MFC set to  0.000000
12/14/2010	1:29:21 PM	SiCl4 MFC set to  0.000000
12/14/2010	1:29:21 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	1:29:21 PM	Tube furnace set to 0
12/14/2010	1:29:22 PM	Run finished at 1:29 PM
12/14/2010	1:29:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/14/2010	1:30:03 PM	Main Vac valve closed
12/14/2010	1:30:05 PM	Bypass valve closed
12/14/2010	1:30:14 PM	Bypass valve opened
12/14/2010	1:30:15 PM	Main Vac valve opened
12/14/2010	1:30:24 PM	Helium MFC set to  100.000000
12/14/2010	1:30:25 PM	Helium valve opened
12/14/2010	1:31:23 PM	Helium MFC set to  0.000000
12/14/2010	1:31:25 PM	Helium valve closed
12/14/2010	1:32:33 PM	Helium MFC set to  50.000000
12/14/2010	1:32:33 PM	Helium valve opened
12/14/2010	1:32:45 PM	Helium MFC set to  0.000000
12/14/2010	1:32:45 PM	Helium valve closed
12/14/2010	1:33:04 PM	Tube furnace set to 200
12/14/2010	1:34:20 PM	Helium MFC set to  100.000000
12/14/2010	1:34:21 PM	Helium valve opened
12/14/2010	1:34:43 PM	Helium MFC set to  0.000000
12/14/2010	1:34:44 PM	Helium valve closed
12/14/2010	1:35:32 PM	Recipe started at 1:35 PM
12/14/2010	1:35:32 PM	Helium valve closed
12/14/2010	1:35:32 PM	BCl3 valve closed
12/14/2010	1:35:32 PM	PH3 valve closed
12/14/2010	1:35:32 PM	SiCl4 pre valve closed
12/14/2010	1:35:32 PM	SiCl4 post valve closed
12/14/2010	1:35:32 PM	Main Vac valve closed
12/14/2010	1:35:32 PM	Bypass valve closed
12/14/2010	1:35:32 PM	Bubbler valve closed
12/14/2010	1:35:32 PM	H2 valve opened
12/14/2010	1:35:32 PM	Helium MFC set to  0.000000
12/14/2010	1:35:32 PM	H2 MFC set to  500.000000
12/14/2010	1:35:32 PM	BCl3 MFC set to  0.000000
12/14/2010	1:35:32 PM	PHl3 MFC set to  0.000000
12/14/2010	1:35:32 PM	SiCl4 MFC set to  0.000000
12/14/2010	1:35:32 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	1:35:32 PM	Tube furnace set to 200
12/14/2010	1:36:50 PM	Helium valve closed
12/14/2010	1:36:50 PM	BCl3 valve closed
12/14/2010	1:36:50 PM	PH3 valve closed
12/14/2010	1:36:50 PM	SiCl4 pre valve closed
12/14/2010	1:36:50 PM	SiCl4 post valve closed
12/14/2010	1:36:50 PM	Main Vac valve closed
12/14/2010	1:36:50 PM	Bypass valve closed
12/14/2010	1:36:50 PM	H2 valve opened
12/14/2010	1:36:50 PM	Bubbler valve opened
12/14/2010	1:36:50 PM	Helium MFC set to  0.000000
12/14/2010	1:36:50 PM	H2 MFC set to  400.000000
12/14/2010	1:36:50 PM	BCl3 MFC set to  0.000000
12/14/2010	1:36:50 PM	PHl3 MFC set to  0.000000
12/14/2010	1:36:50 PM	SiCl4 MFC set to  0.000000
12/14/2010	1:36:50 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	1:36:51 PM	Tube furnace set to 1001
12/14/2010	1:57:51 PM	Helium valve closed
12/14/2010	1:57:51 PM	BCl3 valve closed
12/14/2010	1:57:51 PM	PH3 valve closed
12/14/2010	1:57:51 PM	Main Vac valve closed
12/14/2010	1:57:51 PM	Bypass valve closed
12/14/2010	1:57:51 PM	H2 valve opened
12/14/2010	1:57:51 PM	SiCl4 pre valve opened
12/14/2010	1:57:51 PM	SiCl4 post valve opened
12/14/2010	1:57:51 PM	Bubbler valve opened
12/14/2010	1:57:51 PM	Helium MFC set to  0.000000
12/14/2010	1:57:51 PM	H2 MFC set to  500.000000
12/14/2010	1:57:51 PM	BCl3 MFC set to  0.000000
12/14/2010	1:57:51 PM	PHl3 MFC set to  0.000000
12/14/2010	1:57:51 PM	SiCl4 MFC set to  50.000000
12/14/2010	1:57:51 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	1:57:51 PM	Tube furnace set to 1000
12/14/2010	1:58:01 PM	Helium valve closed
12/14/2010	1:58:01 PM	PH3 valve closed
12/14/2010	1:58:01 PM	Main Vac valve closed
12/14/2010	1:58:01 PM	Bypass valve closed
12/14/2010	1:58:01 PM	H2 valve opened
12/14/2010	1:58:01 PM	BCl3 valve opened
12/14/2010	1:58:01 PM	SiCl4 pre valve opened
12/14/2010	1:58:01 PM	SiCl4 post valve opened
12/14/2010	1:58:01 PM	Bubbler valve opened
12/14/2010	1:58:01 PM	Helium MFC set to  0.000000
12/14/2010	1:58:01 PM	H2 MFC set to  400.000000
12/14/2010	1:58:01 PM	BCl3 MFC set to  8.000000
12/14/2010	1:58:01 PM	PHl3 MFC set to  0.000000
12/14/2010	1:58:01 PM	SiCl4 MFC set to  40.000000
12/14/2010	1:58:01 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	1:58:01 PM	Tube furnace set to 1000
12/14/2010	2:18:01 PM	H2 valve closed
12/14/2010	2:18:01 PM	BCl3 valve closed
12/14/2010	2:18:01 PM	PH3 valve closed
12/14/2010	2:18:01 PM	SiCl4 pre valve closed
12/14/2010	2:18:01 PM	SiCl4 post valve closed
12/14/2010	2:18:01 PM	Main Vac valve closed
12/14/2010	2:18:01 PM	Bypass valve closed
12/14/2010	2:18:01 PM	Helium valve opened
12/14/2010	2:18:01 PM	Bubbler valve opened
12/14/2010	2:18:01 PM	Helium MFC set to  500.000000
12/14/2010	2:18:01 PM	H2 MFC set to  0.000000
12/14/2010	2:18:01 PM	BCl3 MFC set to  0.000000
12/14/2010	2:18:01 PM	PHl3 MFC set to  0.000000
12/14/2010	2:18:01 PM	SiCl4 MFC set to  0.000000
12/14/2010	2:18:01 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	2:18:01 PM	Tube furnace set to 0
12/14/2010	2:38:01 PM	Helium valve closed
12/14/2010	2:38:01 PM	H2 valve closed
12/14/2010	2:38:01 PM	BCl3 valve closed
12/14/2010	2:38:01 PM	PH3 valve closed
12/14/2010	2:38:01 PM	SiCl4 pre valve closed
12/14/2010	2:38:01 PM	SiCl4 post valve closed
12/14/2010	2:38:01 PM	Main Vac valve closed
12/14/2010	2:38:01 PM	Bypass valve closed
12/14/2010	2:38:01 PM	Bubbler valve closed
12/14/2010	2:38:01 PM	Helium MFC set to  0.000000
12/14/2010	2:38:01 PM	H2 MFC set to  0.000000
12/14/2010	2:38:01 PM	BCl3 MFC set to  0.000000
12/14/2010	2:38:01 PM	PHl3 MFC set to  0.000000
12/14/2010	2:38:01 PM	SiCl4 MFC set to  0.000000
12/14/2010	2:38:01 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	2:38:01 PM	Tube furnace set to 0
12/14/2010	2:38:02 PM	Run finished at 2:38 PM
12/14/2010	2:50:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/14/2010	2:50:55 PM	Recipe started at 2:50 PM
12/14/2010	2:50:55 PM	Helium valve closed
12/14/2010	2:50:55 PM	H2 valve closed
12/14/2010	2:50:55 PM	BCl3 valve closed
12/14/2010	2:50:55 PM	PH3 valve closed
12/14/2010	2:50:55 PM	SiCl4 pre valve closed
12/14/2010	2:50:55 PM	SiCl4 post valve closed
12/14/2010	2:50:55 PM	Main Vac valve closed
12/14/2010	2:50:55 PM	Bubbler valve closed
12/14/2010	2:50:55 PM	Bypass valve opened
12/14/2010	2:50:55 PM	Helium MFC set to  0.000000
12/14/2010	2:50:55 PM	H2 MFC set to  0.000000
12/14/2010	2:50:55 PM	BCl3 MFC set to  0.000000
12/14/2010	2:50:55 PM	PHl3 MFC set to  0.000000
12/14/2010	2:50:55 PM	SiCl4 MFC set to  0.000000
12/14/2010	2:50:55 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	2:50:56 PM	Tube furnace set to 0
12/14/2010	2:51:53 PM	Helium valve closed
12/14/2010	2:51:53 PM	H2 valve closed
12/14/2010	2:51:53 PM	BCl3 valve closed
12/14/2010	2:51:53 PM	PH3 valve closed
12/14/2010	2:51:53 PM	SiCl4 pre valve closed
12/14/2010	2:51:53 PM	SiCl4 post valve closed
12/14/2010	2:51:53 PM	Bubbler valve closed
12/14/2010	2:51:53 PM	Main Vac valve opened
12/14/2010	2:51:53 PM	Bypass valve opened
12/14/2010	2:51:53 PM	Helium MFC set to  0.000000
12/14/2010	2:51:53 PM	H2 MFC set to  0.000000
12/14/2010	2:51:53 PM	BCl3 MFC set to  0.000000
12/14/2010	2:51:53 PM	PHl3 MFC set to  0.000000
12/14/2010	2:51:53 PM	SiCl4 MFC set to  0.000000
12/14/2010	2:51:53 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	2:51:53 PM	Tube furnace set to 0
12/14/2010	2:52:53 PM	H2 valve closed
12/14/2010	2:52:53 PM	BCl3 valve closed
12/14/2010	2:52:54 PM	PH3 valve closed
12/14/2010	2:52:54 PM	SiCl4 pre valve closed
12/14/2010	2:52:54 PM	SiCl4 post valve closed
12/14/2010	2:52:54 PM	Bubbler valve closed
12/14/2010	2:52:54 PM	Helium valve opened
12/14/2010	2:52:54 PM	Main Vac valve opened
12/14/2010	2:52:54 PM	Bypass valve opened
12/14/2010	2:52:54 PM	Helium MFC set to  100.000000
12/14/2010	2:52:54 PM	H2 MFC set to  0.000000
12/14/2010	2:52:54 PM	BCl3 MFC set to  0.000000
12/14/2010	2:52:54 PM	PHl3 MFC set to  0.000000
12/14/2010	2:52:54 PM	SiCl4 MFC set to  0.000000
12/14/2010	2:52:54 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	2:52:54 PM	Tube furnace set to 0
12/14/2010	2:53:54 PM	Helium valve closed
12/14/2010	2:53:54 PM	H2 valve closed
12/14/2010	2:53:54 PM	BCl3 valve closed
12/14/2010	2:53:54 PM	PH3 valve closed
12/14/2010	2:53:54 PM	SiCl4 pre valve closed
12/14/2010	2:53:54 PM	SiCl4 post valve closed
12/14/2010	2:53:54 PM	Bubbler valve closed
12/14/2010	2:53:54 PM	Main Vac valve opened
12/14/2010	2:53:54 PM	Bypass valve opened
12/14/2010	2:53:54 PM	Helium MFC set to  0.000000
12/14/2010	2:53:54 PM	H2 MFC set to  0.000000
12/14/2010	2:53:54 PM	BCl3 MFC set to  0.000000
12/14/2010	2:53:54 PM	PHl3 MFC set to  0.000000
12/14/2010	2:53:54 PM	SiCl4 MFC set to  0.000000
12/14/2010	2:53:54 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	2:53:54 PM	Tube furnace set to 0
12/14/2010	2:54:54 PM	H2 valve closed
12/14/2010	2:54:54 PM	BCl3 valve closed
12/14/2010	2:54:54 PM	PH3 valve closed
12/14/2010	2:54:54 PM	SiCl4 pre valve closed
12/14/2010	2:54:54 PM	SiCl4 post valve closed
12/14/2010	2:54:54 PM	Bubbler valve closed
12/14/2010	2:54:54 PM	Helium valve opened
12/14/2010	2:54:54 PM	Main Vac valve opened
12/14/2010	2:54:54 PM	Bypass valve opened
12/14/2010	2:54:54 PM	Helium MFC set to  100.000000
12/14/2010	2:54:54 PM	H2 MFC set to  0.000000
12/14/2010	2:54:54 PM	BCl3 MFC set to  0.000000
12/14/2010	2:54:54 PM	PHl3 MFC set to  0.000000
12/14/2010	2:54:54 PM	SiCl4 MFC set to  0.000000
12/14/2010	2:54:54 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	2:54:54 PM	Tube furnace set to 0
12/14/2010	2:55:54 PM	Helium valve closed
12/14/2010	2:55:54 PM	H2 valve closed
12/14/2010	2:55:54 PM	BCl3 valve closed
12/14/2010	2:55:54 PM	PH3 valve closed
12/14/2010	2:55:54 PM	SiCl4 pre valve closed
12/14/2010	2:55:54 PM	SiCl4 post valve closed
12/14/2010	2:55:54 PM	Bubbler valve closed
12/14/2010	2:55:54 PM	Main Vac valve opened
12/14/2010	2:55:54 PM	Bypass valve opened
12/14/2010	2:55:54 PM	Helium MFC set to  0.000000
12/14/2010	2:55:54 PM	H2 MFC set to  0.000000
12/14/2010	2:55:54 PM	BCl3 MFC set to  0.000000
12/14/2010	2:55:54 PM	PHl3 MFC set to  0.000000
12/14/2010	2:55:54 PM	SiCl4 MFC set to  0.000000
12/14/2010	2:55:54 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	2:55:54 PM	Tube furnace set to 0
12/14/2010	2:56:54 PM	H2 valve closed
12/14/2010	2:56:54 PM	BCl3 valve closed
12/14/2010	2:56:54 PM	PH3 valve closed
12/14/2010	2:56:54 PM	SiCl4 pre valve closed
12/14/2010	2:56:54 PM	SiCl4 post valve closed
12/14/2010	2:56:54 PM	Bubbler valve closed
12/14/2010	2:56:54 PM	Helium valve opened
12/14/2010	2:56:54 PM	Main Vac valve opened
12/14/2010	2:56:54 PM	Bypass valve opened
12/14/2010	2:56:54 PM	Helium MFC set to  100.000000
12/14/2010	2:56:54 PM	H2 MFC set to  0.000000
12/14/2010	2:56:54 PM	BCl3 MFC set to  0.000000
12/14/2010	2:56:54 PM	PHl3 MFC set to  0.000000
12/14/2010	2:56:54 PM	SiCl4 MFC set to  0.000000
12/14/2010	2:56:54 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	2:56:54 PM	Tube furnace set to 0
12/14/2010	2:57:54 PM	Helium valve closed
12/14/2010	2:57:54 PM	H2 valve closed
12/14/2010	2:57:54 PM	BCl3 valve closed
12/14/2010	2:57:54 PM	PH3 valve closed
12/14/2010	2:57:54 PM	SiCl4 pre valve closed
12/14/2010	2:57:55 PM	SiCl4 post valve closed
12/14/2010	2:57:55 PM	Bubbler valve closed
12/14/2010	2:57:55 PM	Main Vac valve opened
12/14/2010	2:57:55 PM	Bypass valve opened
12/14/2010	2:57:55 PM	Helium MFC set to  0.000000
12/14/2010	2:57:55 PM	H2 MFC set to  0.000000
12/14/2010	2:57:55 PM	BCl3 MFC set to  0.000000
12/14/2010	2:57:55 PM	PHl3 MFC set to  0.000000
12/14/2010	2:57:55 PM	SiCl4 MFC set to  0.000000
12/14/2010	2:57:55 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	2:57:55 PM	Tube furnace set to 0
12/14/2010	2:58:55 PM	H2 valve closed
12/14/2010	2:58:55 PM	BCl3 valve closed
12/14/2010	2:58:55 PM	PH3 valve closed
12/14/2010	2:58:55 PM	SiCl4 pre valve closed
12/14/2010	2:58:55 PM	SiCl4 post valve closed
12/14/2010	2:58:55 PM	Bubbler valve closed
12/14/2010	2:58:55 PM	Helium valve opened
12/14/2010	2:58:55 PM	Main Vac valve opened
12/14/2010	2:58:55 PM	Bypass valve opened
12/14/2010	2:58:55 PM	Helium MFC set to  100.000000
12/14/2010	2:58:55 PM	H2 MFC set to  0.000000
12/14/2010	2:58:55 PM	BCl3 MFC set to  0.000000
12/14/2010	2:58:55 PM	PHl3 MFC set to  0.000000
12/14/2010	2:58:55 PM	SiCl4 MFC set to  0.000000
12/14/2010	2:58:55 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	2:58:55 PM	Tube furnace set to 0
12/14/2010	2:59:55 PM	Helium valve closed
12/14/2010	2:59:55 PM	H2 valve closed
12/14/2010	2:59:55 PM	BCl3 valve closed
12/14/2010	2:59:55 PM	PH3 valve closed
12/14/2010	2:59:55 PM	SiCl4 pre valve closed
12/14/2010	2:59:55 PM	SiCl4 post valve closed
12/14/2010	2:59:55 PM	Bubbler valve closed
12/14/2010	2:59:55 PM	Main Vac valve opened
12/14/2010	2:59:55 PM	Bypass valve opened
12/14/2010	2:59:55 PM	Helium MFC set to  0.000000
12/14/2010	2:59:55 PM	H2 MFC set to  0.000000
12/14/2010	2:59:55 PM	BCl3 MFC set to  0.000000
12/14/2010	2:59:55 PM	PHl3 MFC set to  0.000000
12/14/2010	2:59:55 PM	SiCl4 MFC set to  0.000000
12/14/2010	2:59:55 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	2:59:55 PM	Tube furnace set to 0
12/14/2010	3:00:55 PM	H2 valve closed
12/14/2010	3:00:55 PM	BCl3 valve closed
12/14/2010	3:00:55 PM	PH3 valve closed
12/14/2010	3:00:55 PM	SiCl4 pre valve closed
12/14/2010	3:00:55 PM	SiCl4 post valve closed
12/14/2010	3:00:55 PM	Bubbler valve closed
12/14/2010	3:00:55 PM	Helium valve opened
12/14/2010	3:00:55 PM	Main Vac valve opened
12/14/2010	3:00:55 PM	Bypass valve opened
12/14/2010	3:00:55 PM	Helium MFC set to  100.000000
12/14/2010	3:00:55 PM	H2 MFC set to  0.000000
12/14/2010	3:00:55 PM	BCl3 MFC set to  0.000000
12/14/2010	3:00:55 PM	PHl3 MFC set to  0.000000
12/14/2010	3:00:55 PM	SiCl4 MFC set to  0.000000
12/14/2010	3:00:55 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	3:00:55 PM	Tube furnace set to 0
12/14/2010	3:01:55 PM	Helium valve closed
12/14/2010	3:01:55 PM	H2 valve closed
12/14/2010	3:01:55 PM	BCl3 valve closed
12/14/2010	3:01:55 PM	PH3 valve closed
12/14/2010	3:01:55 PM	SiCl4 pre valve closed
12/14/2010	3:01:55 PM	SiCl4 post valve closed
12/14/2010	3:01:55 PM	Bubbler valve closed
12/14/2010	3:01:55 PM	Main Vac valve opened
12/14/2010	3:01:55 PM	Bypass valve opened
12/14/2010	3:01:55 PM	Helium MFC set to  0.000000
12/14/2010	3:01:55 PM	H2 MFC set to  0.000000
12/14/2010	3:01:55 PM	BCl3 MFC set to  0.000000
12/14/2010	3:01:55 PM	PHl3 MFC set to  0.000000
12/14/2010	3:01:55 PM	SiCl4 MFC set to  0.000000
12/14/2010	3:01:55 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	3:01:55 PM	Tube furnace set to 0
12/14/2010	3:02:31 PM	H2 valve closed
12/14/2010	3:02:31 PM	BCl3 valve closed
12/14/2010	3:02:31 PM	PH3 valve closed
12/14/2010	3:02:31 PM	SiCl4 pre valve closed
12/14/2010	3:02:31 PM	SiCl4 post valve closed
12/14/2010	3:02:31 PM	Bubbler valve closed
12/14/2010	3:02:31 PM	Helium valve opened
12/14/2010	3:02:31 PM	Main Vac valve opened
12/14/2010	3:02:31 PM	Bypass valve opened
12/14/2010	3:02:31 PM	Helium MFC set to  100.000000
12/14/2010	3:02:31 PM	H2 MFC set to  0.000000
12/14/2010	3:02:31 PM	BCl3 MFC set to  0.000000
12/14/2010	3:02:31 PM	PHl3 MFC set to  0.000000
12/14/2010	3:02:31 PM	SiCl4 MFC set to  0.000000
12/14/2010	3:02:31 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	3:02:32 PM	Tube furnace set to 0
12/14/2010	3:02:36 PM	Helium valve closed
12/14/2010	3:02:36 PM	H2 valve closed
12/14/2010	3:02:36 PM	BCl3 valve closed
12/14/2010	3:02:36 PM	PH3 valve closed
12/14/2010	3:02:36 PM	SiCl4 pre valve closed
12/14/2010	3:02:36 PM	SiCl4 post valve closed
12/14/2010	3:02:36 PM	Bubbler valve closed
12/14/2010	3:02:36 PM	Main Vac valve opened
12/14/2010	3:02:36 PM	Bypass valve opened
12/14/2010	3:02:36 PM	Helium MFC set to  0.000000
12/14/2010	3:02:36 PM	H2 MFC set to  0.000000
12/14/2010	3:02:36 PM	BCl3 MFC set to  0.000000
12/14/2010	3:02:36 PM	PHl3 MFC set to  0.000000
12/14/2010	3:02:36 PM	SiCl4 MFC set to  0.000000
12/14/2010	3:02:36 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	3:02:37 PM	Tube furnace set to 0
12/14/2010	3:03:37 PM	H2 valve closed
12/14/2010	3:03:37 PM	BCl3 valve closed
12/14/2010	3:03:37 PM	PH3 valve closed
12/14/2010	3:03:37 PM	SiCl4 pre valve closed
12/14/2010	3:03:37 PM	SiCl4 post valve closed
12/14/2010	3:03:37 PM	Bubbler valve closed
12/14/2010	3:03:37 PM	Helium valve opened
12/14/2010	3:03:37 PM	Main Vac valve opened
12/14/2010	3:03:37 PM	Bypass valve opened
12/14/2010	3:03:37 PM	Helium MFC set to  100.000000
12/14/2010	3:03:37 PM	H2 MFC set to  0.000000
12/14/2010	3:03:37 PM	BCl3 MFC set to  0.000000
12/14/2010	3:03:37 PM	PHl3 MFC set to  0.000000
12/14/2010	3:03:37 PM	SiCl4 MFC set to  0.000000
12/14/2010	3:03:37 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	3:03:37 PM	Tube furnace set to 0
12/14/2010	3:03:37 PM	Helium valve closed
12/14/2010	3:03:37 PM	H2 valve closed
12/14/2010	3:03:37 PM	BCl3 valve closed
12/14/2010	3:03:37 PM	PH3 valve closed
12/14/2010	3:03:37 PM	SiCl4 pre valve closed
12/14/2010	3:03:37 PM	SiCl4 post valve closed
12/14/2010	3:03:37 PM	Bubbler valve closed
12/14/2010	3:03:37 PM	Main Vac valve opened
12/14/2010	3:03:37 PM	Bypass valve opened
12/14/2010	3:03:37 PM	Helium MFC set to  0.000000
12/14/2010	3:03:37 PM	H2 MFC set to  0.000000
12/14/2010	3:03:37 PM	BCl3 MFC set to  0.000000
12/14/2010	3:03:37 PM	PHl3 MFC set to  0.000000
12/14/2010	3:03:37 PM	SiCl4 MFC set to  0.000000
12/14/2010	3:03:37 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	3:03:37 PM	Tube furnace set to 0
12/14/2010	3:03:40 PM	H2 valve closed
12/14/2010	3:03:40 PM	BCl3 valve closed
12/14/2010	3:03:40 PM	PH3 valve closed
12/14/2010	3:03:40 PM	SiCl4 pre valve closed
12/14/2010	3:03:40 PM	SiCl4 post valve closed
12/14/2010	3:03:40 PM	Bubbler valve closed
12/14/2010	3:03:40 PM	Helium valve opened
12/14/2010	3:03:40 PM	Main Vac valve opened
12/14/2010	3:03:40 PM	Bypass valve opened
12/14/2010	3:03:40 PM	Helium MFC set to  100.000000
12/14/2010	3:03:40 PM	H2 MFC set to  0.000000
12/14/2010	3:03:40 PM	BCl3 MFC set to  0.000000
12/14/2010	3:03:40 PM	PHl3 MFC set to  0.000000
12/14/2010	3:03:40 PM	SiCl4 MFC set to  0.000000
12/14/2010	3:03:40 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	3:03:40 PM	Tube furnace set to 0
12/14/2010	3:04:40 PM	Helium valve closed
12/14/2010	3:04:40 PM	H2 valve closed
12/14/2010	3:04:40 PM	BCl3 valve closed
12/14/2010	3:04:40 PM	PH3 valve closed
12/14/2010	3:04:40 PM	SiCl4 pre valve closed
12/14/2010	3:04:40 PM	SiCl4 post valve closed
12/14/2010	3:04:40 PM	Bubbler valve closed
12/14/2010	3:04:40 PM	Main Vac valve opened
12/14/2010	3:04:40 PM	Bypass valve opened
12/14/2010	3:04:40 PM	Helium MFC set to  0.000000
12/14/2010	3:04:40 PM	H2 MFC set to  0.000000
12/14/2010	3:04:40 PM	BCl3 MFC set to  0.000000
12/14/2010	3:04:40 PM	PHl3 MFC set to  0.000000
12/14/2010	3:04:40 PM	SiCl4 MFC set to  0.000000
12/14/2010	3:04:40 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	3:04:40 PM	Tube furnace set to 0
12/14/2010	3:05:40 PM	H2 valve closed
12/14/2010	3:05:40 PM	BCl3 valve closed
12/14/2010	3:05:40 PM	PH3 valve closed
12/14/2010	3:05:40 PM	SiCl4 pre valve closed
12/14/2010	3:05:40 PM	SiCl4 post valve closed
12/14/2010	3:05:40 PM	Bubbler valve closed
12/14/2010	3:05:40 PM	Helium valve opened
12/14/2010	3:05:40 PM	Main Vac valve opened
12/14/2010	3:05:40 PM	Bypass valve opened
12/14/2010	3:05:40 PM	Helium MFC set to  100.000000
12/14/2010	3:05:40 PM	H2 MFC set to  0.000000
12/14/2010	3:05:40 PM	BCl3 MFC set to  0.000000
12/14/2010	3:05:40 PM	PHl3 MFC set to  0.000000
12/14/2010	3:05:40 PM	SiCl4 MFC set to  0.000000
12/14/2010	3:05:40 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	3:05:40 PM	Tube furnace set to 0
12/14/2010	3:06:40 PM	Helium valve closed
12/14/2010	3:06:40 PM	H2 valve closed
12/14/2010	3:06:40 PM	BCl3 valve closed
12/14/2010	3:06:40 PM	PH3 valve closed
12/14/2010	3:06:40 PM	SiCl4 pre valve closed
12/14/2010	3:06:40 PM	SiCl4 post valve closed
12/14/2010	3:06:40 PM	Bubbler valve closed
12/14/2010	3:06:40 PM	Main Vac valve opened
12/14/2010	3:06:40 PM	Bypass valve opened
12/14/2010	3:06:40 PM	Helium MFC set to  0.000000
12/14/2010	3:06:40 PM	H2 MFC set to  0.000000
12/14/2010	3:06:40 PM	BCl3 MFC set to  0.000000
12/14/2010	3:06:40 PM	PHl3 MFC set to  0.000000
12/14/2010	3:06:40 PM	SiCl4 MFC set to  0.000000
12/14/2010	3:06:40 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	3:06:41 PM	Tube furnace set to 0
12/14/2010	3:07:41 PM	H2 valve closed
12/14/2010	3:07:41 PM	BCl3 valve closed
12/14/2010	3:07:41 PM	PH3 valve closed
12/14/2010	3:07:41 PM	SiCl4 pre valve closed
12/14/2010	3:07:41 PM	SiCl4 post valve closed
12/14/2010	3:07:41 PM	Bubbler valve closed
12/14/2010	3:07:41 PM	Helium valve opened
12/14/2010	3:07:41 PM	Main Vac valve opened
12/14/2010	3:07:41 PM	Bypass valve opened
12/14/2010	3:07:41 PM	Helium MFC set to  100.000000
12/14/2010	3:07:41 PM	H2 MFC set to  0.000000
12/14/2010	3:07:41 PM	BCl3 MFC set to  0.000000
12/14/2010	3:07:41 PM	PHl3 MFC set to  0.000000
12/14/2010	3:07:41 PM	SiCl4 MFC set to  0.000000
12/14/2010	3:07:41 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	3:07:41 PM	Tube furnace set to 0
12/14/2010	3:08:41 PM	Helium valve closed
12/14/2010	3:08:41 PM	H2 valve closed
12/14/2010	3:08:41 PM	BCl3 valve closed
12/14/2010	3:08:41 PM	PH3 valve closed
12/14/2010	3:08:41 PM	SiCl4 pre valve closed
12/14/2010	3:08:41 PM	SiCl4 post valve closed
12/14/2010	3:08:41 PM	Bubbler valve closed
12/14/2010	3:08:41 PM	Main Vac valve opened
12/14/2010	3:08:41 PM	Bypass valve opened
12/14/2010	3:08:41 PM	Helium MFC set to  0.000000
12/14/2010	3:08:41 PM	H2 MFC set to  0.000000
12/14/2010	3:08:41 PM	BCl3 MFC set to  0.000000
12/14/2010	3:08:41 PM	PHl3 MFC set to  0.000000
12/14/2010	3:08:41 PM	SiCl4 MFC set to  0.000000
12/14/2010	3:08:41 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	3:08:41 PM	Tube furnace set to 0
12/14/2010	3:08:42 PM	Run finished at 3:08 PM
12/14/2010	3:08:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/14/2010	3:13:59 PM	Main Vac valve closed
12/14/2010	3:14:01 PM	Bypass valve closed
12/14/2010	3:14:16 PM	Bypass valve opened
12/14/2010	3:14:17 PM	Main Vac valve opened
12/14/2010	3:14:29 PM	Helium MFC set to  100.000000
12/14/2010	3:14:30 PM	Helium valve opened
12/14/2010	3:15:40 PM	Helium MFC set to  0.000000
12/14/2010	3:15:42 PM	Helium valve closed
12/14/2010	3:19:01 PM	Recipe started at 3:18 PM
12/14/2010	3:19:01 PM	Helium valve closed
12/14/2010	3:19:01 PM	BCl3 valve closed
12/14/2010	3:19:01 PM	PH3 valve closed
12/14/2010	3:19:01 PM	SiCl4 pre valve closed
12/14/2010	3:19:01 PM	SiCl4 post valve closed
12/14/2010	3:19:01 PM	Main Vac valve closed
12/14/2010	3:19:01 PM	Bypass valve closed
12/14/2010	3:19:01 PM	Bubbler valve closed
12/14/2010	3:19:01 PM	H2 valve opened
12/14/2010	3:19:01 PM	Helium MFC set to  0.000000
12/14/2010	3:19:01 PM	H2 MFC set to  500.000000
12/14/2010	3:19:01 PM	BCl3 MFC set to  0.000000
12/14/2010	3:19:01 PM	PHl3 MFC set to  0.000000
12/14/2010	3:19:01 PM	SiCl4 MFC set to  0.000000
12/14/2010	3:19:01 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	3:19:01 PM	Tube furnace set to 200
12/14/2010	3:20:19 PM	Helium valve closed
12/14/2010	3:20:19 PM	BCl3 valve closed
12/14/2010	3:20:19 PM	PH3 valve closed
12/14/2010	3:20:19 PM	SiCl4 pre valve closed
12/14/2010	3:20:19 PM	SiCl4 post valve closed
12/14/2010	3:20:19 PM	Main Vac valve closed
12/14/2010	3:20:19 PM	Bypass valve closed
12/14/2010	3:20:19 PM	H2 valve opened
12/14/2010	3:20:19 PM	Bubbler valve opened
12/14/2010	3:20:19 PM	Helium MFC set to  0.000000
12/14/2010	3:20:19 PM	H2 MFC set to  400.000000
12/14/2010	3:20:19 PM	BCl3 MFC set to  0.000000
12/14/2010	3:20:19 PM	PHl3 MFC set to  0.000000
12/14/2010	3:20:19 PM	SiCl4 MFC set to  0.000000
12/14/2010	3:20:19 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	3:20:19 PM	Tube furnace set to 1001
12/14/2010	3:41:19 PM	Helium valve closed
12/14/2010	3:41:19 PM	BCl3 valve closed
12/14/2010	3:41:19 PM	PH3 valve closed
12/14/2010	3:41:19 PM	Main Vac valve closed
12/14/2010	3:41:19 PM	Bypass valve closed
12/14/2010	3:41:19 PM	H2 valve opened
12/14/2010	3:41:19 PM	SiCl4 pre valve opened
12/14/2010	3:41:19 PM	SiCl4 post valve opened
12/14/2010	3:41:19 PM	Bubbler valve opened
12/14/2010	3:41:19 PM	Helium MFC set to  0.000000
12/14/2010	3:41:19 PM	H2 MFC set to  500.000000
12/14/2010	3:41:19 PM	BCl3 MFC set to  0.000000
12/14/2010	3:41:19 PM	PHl3 MFC set to  0.000000
12/14/2010	3:41:19 PM	SiCl4 MFC set to  50.000000
12/14/2010	3:41:19 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	3:41:19 PM	Tube furnace set to 1000
12/14/2010	3:41:29 PM	Helium valve closed
12/14/2010	3:41:29 PM	PH3 valve closed
12/14/2010	3:41:29 PM	Main Vac valve closed
12/14/2010	3:41:29 PM	Bypass valve closed
12/14/2010	3:41:29 PM	H2 valve opened
12/14/2010	3:41:29 PM	BCl3 valve opened
12/14/2010	3:41:29 PM	SiCl4 pre valve opened
12/14/2010	3:41:29 PM	SiCl4 post valve opened
12/14/2010	3:41:29 PM	Bubbler valve opened
12/14/2010	3:41:29 PM	Helium MFC set to  0.000000
12/14/2010	3:41:29 PM	H2 MFC set to  500.000000
12/14/2010	3:41:29 PM	BCl3 MFC set to  5.000000
12/14/2010	3:41:29 PM	PHl3 MFC set to  0.000000
12/14/2010	3:41:29 PM	SiCl4 MFC set to  50.000000
12/14/2010	3:41:29 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	3:41:29 PM	Tube furnace set to 1000
12/14/2010	4:01:29 PM	H2 valve closed
12/14/2010	4:01:29 PM	BCl3 valve closed
12/14/2010	4:01:29 PM	PH3 valve closed
12/14/2010	4:01:29 PM	SiCl4 pre valve closed
12/14/2010	4:01:29 PM	SiCl4 post valve closed
12/14/2010	4:01:29 PM	Main Vac valve closed
12/14/2010	4:01:29 PM	Bypass valve closed
12/14/2010	4:01:29 PM	Helium valve opened
12/14/2010	4:01:29 PM	Bubbler valve opened
12/14/2010	4:01:29 PM	Helium MFC set to  500.000000
12/14/2010	4:01:29 PM	H2 MFC set to  0.000000
12/14/2010	4:01:29 PM	BCl3 MFC set to  0.000000
12/14/2010	4:01:29 PM	PHl3 MFC set to  0.000000
12/14/2010	4:01:29 PM	SiCl4 MFC set to  0.000000
12/14/2010	4:01:29 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	4:01:30 PM	Tube furnace set to 0
12/14/2010	4:01:35 PM	Helium valve closed
12/14/2010	4:01:35 PM	H2 valve closed
12/14/2010	4:01:35 PM	BCl3 valve closed
12/14/2010	4:01:35 PM	PH3 valve closed
12/14/2010	4:01:35 PM	SiCl4 pre valve closed
12/14/2010	4:01:35 PM	SiCl4 post valve closed
12/14/2010	4:01:35 PM	Main Vac valve closed
12/14/2010	4:01:35 PM	Bypass valve closed
12/14/2010	4:01:35 PM	Bubbler valve closed
12/14/2010	4:01:35 PM	Helium MFC set to  0.000000
12/14/2010	4:01:35 PM	H2 MFC set to  0.000000
12/14/2010	4:01:35 PM	BCl3 MFC set to  0.000000
12/14/2010	4:01:35 PM	PHl3 MFC set to  0.000000
12/14/2010	4:01:35 PM	SiCl4 MFC set to  0.000000
12/14/2010	4:01:35 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	4:01:35 PM	Tube furnace set to 0
12/14/2010	4:01:40 PM	Helium valve closed
12/14/2010	4:01:40 PM	H2 valve closed
12/14/2010	4:01:40 PM	BCl3 valve closed
12/14/2010	4:01:40 PM	PH3 valve closed
12/14/2010	4:01:40 PM	SiCl4 pre valve closed
12/14/2010	4:01:40 PM	SiCl4 post valve closed
12/14/2010	4:01:40 PM	Main Vac valve closed
12/14/2010	4:01:40 PM	Bubbler valve closed
12/14/2010	4:01:40 PM	Bypass valve opened
12/14/2010	4:01:40 PM	Helium MFC set to  0.000000
12/14/2010	4:01:40 PM	H2 MFC set to  0.000000
12/14/2010	4:01:40 PM	BCl3 MFC set to  0.000000
12/14/2010	4:01:40 PM	PHl3 MFC set to  0.000000
12/14/2010	4:01:40 PM	SiCl4 MFC set to  0.000000
12/14/2010	4:01:40 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	4:01:40 PM	Tube furnace set to 0
12/14/2010	4:01:45 PM	H2 valve closed
12/14/2010	4:01:45 PM	BCl3 valve closed
12/14/2010	4:01:45 PM	PH3 valve closed
12/14/2010	4:01:45 PM	SiCl4 pre valve closed
12/14/2010	4:01:45 PM	SiCl4 post valve closed
12/14/2010	4:01:45 PM	Main Vac valve closed
12/14/2010	4:01:45 PM	Bypass valve closed
12/14/2010	4:01:45 PM	Bubbler valve closed
12/14/2010	4:01:45 PM	Helium valve opened
12/14/2010	4:01:45 PM	Helium MFC set to  500.000000
12/14/2010	4:01:45 PM	H2 MFC set to  0.000000
12/14/2010	4:01:45 PM	BCl3 MFC set to  0.000000
12/14/2010	4:01:45 PM	PHl3 MFC set to  0.000000
12/14/2010	4:01:45 PM	SiCl4 MFC set to  0.000000
12/14/2010	4:01:45 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	4:01:46 PM	Tube furnace set to 0
12/14/2010	4:02:25 PM	H2 valve closed
12/14/2010	4:02:25 PM	BCl3 valve closed
12/14/2010	4:02:25 PM	PH3 valve closed
12/14/2010	4:02:25 PM	SiCl4 pre valve closed
12/14/2010	4:02:25 PM	SiCl4 post valve closed
12/14/2010	4:02:25 PM	Main Vac valve closed
12/14/2010	4:02:25 PM	Bypass valve closed
12/14/2010	4:02:25 PM	Helium valve opened
12/14/2010	4:02:25 PM	Bubbler valve opened
12/14/2010	4:02:25 PM	Helium MFC set to  500.000000
12/14/2010	4:02:25 PM	H2 MFC set to  0.000000
12/14/2010	4:02:25 PM	BCl3 MFC set to  0.000000
12/14/2010	4:02:25 PM	PHl3 MFC set to  0.000000
12/14/2010	4:02:25 PM	SiCl4 MFC set to  0.000000
12/14/2010	4:02:25 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	4:02:25 PM	Tube furnace set to 0
12/14/2010	4:22:25 PM	Helium valve closed
12/14/2010	4:22:25 PM	H2 valve closed
12/14/2010	4:22:25 PM	BCl3 valve closed
12/14/2010	4:22:25 PM	PH3 valve closed
12/14/2010	4:22:25 PM	SiCl4 pre valve closed
12/14/2010	4:22:25 PM	SiCl4 post valve closed
12/14/2010	4:22:25 PM	Main Vac valve closed
12/14/2010	4:22:25 PM	Bypass valve closed
12/14/2010	4:22:25 PM	Bubbler valve closed
12/14/2010	4:22:25 PM	Helium MFC set to  0.000000
12/14/2010	4:22:25 PM	H2 MFC set to  0.000000
12/14/2010	4:22:25 PM	BCl3 MFC set to  0.000000
12/14/2010	4:22:25 PM	PHl3 MFC set to  0.000000
12/14/2010	4:22:25 PM	SiCl4 MFC set to  0.000000
12/14/2010	4:22:25 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	4:22:26 PM	Tube furnace set to 0
12/14/2010	4:22:26 PM	Run finished at 4:22 PM
12/14/2010	4:22:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/14/2010	4:22:59 PM	Recipe started at 4:22 PM
12/14/2010	4:22:59 PM	Helium valve closed
12/14/2010	4:22:59 PM	H2 valve closed
12/14/2010	4:22:59 PM	BCl3 valve closed
12/14/2010	4:22:59 PM	PH3 valve closed
12/14/2010	4:22:59 PM	SiCl4 pre valve closed
12/14/2010	4:22:59 PM	SiCl4 post valve closed
12/14/2010	4:22:59 PM	Main Vac valve closed
12/14/2010	4:22:59 PM	Bubbler valve closed
12/14/2010	4:22:59 PM	Bypass valve opened
12/14/2010	4:22:59 PM	Helium MFC set to  0.000000
12/14/2010	4:22:59 PM	H2 MFC set to  0.000000
12/14/2010	4:22:59 PM	BCl3 MFC set to  0.000000
12/14/2010	4:22:59 PM	PHl3 MFC set to  0.000000
12/14/2010	4:22:59 PM	SiCl4 MFC set to  0.000000
12/14/2010	4:22:59 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	4:22:59 PM	Tube furnace set to 0
12/14/2010	4:23:06 PM	Run aborted at 4:23 PM
12/14/2010	4:23:06 PM	Helium valve closed
12/14/2010	4:23:06 PM	H2 valve closed
12/14/2010	4:23:06 PM	BCl3 valve closed
12/14/2010	4:23:06 PM	PH3 valve closed
12/14/2010	4:23:06 PM	SiCl4 pre valve closed
12/14/2010	4:23:06 PM	SiCl4 post valve closed
12/14/2010	4:23:06 PM	Bypass valve closed
12/14/2010	4:23:06 PM	Main Vac valve closed
12/14/2010	4:23:06 PM	Bubbler valve closed
12/14/2010	4:23:06 PM	Helium MFC set to  0.000000
12/14/2010	4:23:06 PM	H2 MFC set to  0.000000
12/14/2010	4:23:06 PM	BCl3 MFC set to  0.000000
12/14/2010	4:23:06 PM	PHl3 MFC set to  0.000000
12/14/2010	4:23:06 PM	SiCl4 MFC set to  0.000000
12/14/2010	4:23:06 PM	Tube furnace set to 0
12/14/2010	4:23:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/14/2010	4:23:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/14/2010	4:23:17 PM	Recipe started at 4:23 PM
12/14/2010	4:23:17 PM	H2 valve closed
12/14/2010	4:23:17 PM	BCl3 valve closed
12/14/2010	4:23:17 PM	PH3 valve closed
12/14/2010	4:23:17 PM	SiCl4 pre valve closed
12/14/2010	4:23:17 PM	SiCl4 post valve closed
12/14/2010	4:23:17 PM	Main Vac valve closed
12/14/2010	4:23:17 PM	Bypass valve closed
12/14/2010	4:23:17 PM	Bubbler valve closed
12/14/2010	4:23:17 PM	Helium valve opened
12/14/2010	4:23:17 PM	Helium MFC set to  500.000000
12/14/2010	4:23:17 PM	H2 MFC set to  0.000000
12/14/2010	4:23:17 PM	BCl3 MFC set to  0.000000
12/14/2010	4:23:17 PM	PHl3 MFC set to  0.000000
12/14/2010	4:23:17 PM	SiCl4 MFC set to  0.000000
12/14/2010	4:23:17 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	4:23:17 PM	Tube furnace set to 0
12/14/2010	4:23:58 PM	Helium valve closed
12/14/2010	4:23:58 PM	H2 valve closed
12/14/2010	4:23:58 PM	BCl3 valve closed
12/14/2010	4:23:58 PM	PH3 valve closed
12/14/2010	4:23:58 PM	SiCl4 pre valve closed
12/14/2010	4:23:58 PM	SiCl4 post valve closed
12/14/2010	4:23:58 PM	Main Vac valve closed
12/14/2010	4:23:58 PM	Bypass valve closed
12/14/2010	4:23:58 PM	Bubbler valve closed
12/14/2010	4:23:58 PM	Helium MFC set to  0.000000
12/14/2010	4:23:58 PM	H2 MFC set to  0.000000
12/14/2010	4:23:58 PM	BCl3 MFC set to  0.000000
12/14/2010	4:23:58 PM	PHl3 MFC set to  0.000000
12/14/2010	4:23:58 PM	SiCl4 MFC set to  0.000000
12/14/2010	4:23:58 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	4:23:58 PM	Tube furnace set to 0
12/14/2010	4:23:58 PM	Run finished at 4:23 PM
12/14/2010	4:23:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/14/2010	4:24:06 PM	Bypass valve opened
12/14/2010	4:24:11 PM	Bypass valve closed
12/14/2010	4:24:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/14/2010	4:24:15 PM	Recipe started at 4:24 PM
12/14/2010	4:24:15 PM	H2 valve closed
12/14/2010	4:24:15 PM	BCl3 valve closed
12/14/2010	4:24:15 PM	PH3 valve closed
12/14/2010	4:24:15 PM	SiCl4 pre valve closed
12/14/2010	4:24:15 PM	SiCl4 post valve closed
12/14/2010	4:24:15 PM	Main Vac valve closed
12/14/2010	4:24:15 PM	Bypass valve closed
12/14/2010	4:24:15 PM	Bubbler valve closed
12/14/2010	4:24:15 PM	Helium valve opened
12/14/2010	4:24:15 PM	Helium MFC set to  500.000000
12/14/2010	4:24:15 PM	H2 MFC set to  0.000000
12/14/2010	4:24:15 PM	BCl3 MFC set to  0.000000
12/14/2010	4:24:15 PM	PHl3 MFC set to  0.000000
12/14/2010	4:24:15 PM	SiCl4 MFC set to  0.000000
12/14/2010	4:24:15 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	4:24:15 PM	Tube furnace set to 0
12/14/2010	4:24:49 PM	Helium valve closed
12/14/2010	4:24:49 PM	H2 valve closed
12/14/2010	4:24:49 PM	BCl3 valve closed
12/14/2010	4:24:49 PM	PH3 valve closed
12/14/2010	4:24:49 PM	SiCl4 pre valve closed
12/14/2010	4:24:50 PM	SiCl4 post valve closed
12/14/2010	4:24:50 PM	Main Vac valve closed
12/14/2010	4:24:50 PM	Bypass valve closed
12/14/2010	4:24:50 PM	Bubbler valve closed
12/14/2010	4:24:50 PM	Helium MFC set to  0.000000
12/14/2010	4:24:50 PM	H2 MFC set to  0.000000
12/14/2010	4:24:50 PM	BCl3 MFC set to  0.000000
12/14/2010	4:24:50 PM	PHl3 MFC set to  0.000000
12/14/2010	4:24:50 PM	SiCl4 MFC set to  0.000000
12/14/2010	4:24:50 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	4:24:50 PM	Tube furnace set to 0
12/14/2010	4:24:50 PM	Run finished at 4:24 PM
12/14/2010	4:24:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/14/2010	4:33:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/14/2010	4:33:59 PM	Recipe started at 4:33 PM
12/14/2010	4:33:59 PM	Helium valve closed
12/14/2010	4:33:59 PM	H2 valve closed
12/14/2010	4:33:59 PM	BCl3 valve closed
12/14/2010	4:33:59 PM	PH3 valve closed
12/14/2010	4:33:59 PM	SiCl4 pre valve closed
12/14/2010	4:33:59 PM	SiCl4 post valve closed
12/14/2010	4:33:59 PM	Main Vac valve closed
12/14/2010	4:33:59 PM	Bubbler valve closed
12/14/2010	4:33:59 PM	Bypass valve opened
12/14/2010	4:33:59 PM	Helium MFC set to  0.000000
12/14/2010	4:33:59 PM	H2 MFC set to  0.000000
12/14/2010	4:33:59 PM	BCl3 MFC set to  0.000000
12/14/2010	4:33:59 PM	PHl3 MFC set to  0.000000
12/14/2010	4:33:59 PM	SiCl4 MFC set to  0.000000
12/14/2010	4:33:59 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	4:33:59 PM	Tube furnace set to 0
12/14/2010	4:34:57 PM	Helium valve closed
12/14/2010	4:34:57 PM	H2 valve closed
12/14/2010	4:34:57 PM	BCl3 valve closed
12/14/2010	4:34:57 PM	PH3 valve closed
12/14/2010	4:34:57 PM	SiCl4 pre valve closed
12/14/2010	4:34:57 PM	SiCl4 post valve closed
12/14/2010	4:34:57 PM	Bubbler valve closed
12/14/2010	4:34:57 PM	Main Vac valve opened
12/14/2010	4:34:57 PM	Bypass valve opened
12/14/2010	4:34:57 PM	Helium MFC set to  0.000000
12/14/2010	4:34:57 PM	H2 MFC set to  0.000000
12/14/2010	4:34:57 PM	BCl3 MFC set to  0.000000
12/14/2010	4:34:57 PM	PHl3 MFC set to  0.000000
12/14/2010	4:34:57 PM	SiCl4 MFC set to  0.000000
12/14/2010	4:34:57 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	4:34:57 PM	Tube furnace set to 0
12/14/2010	4:34:57 PM	Run finished at 4:34 PM
12/14/2010	4:34:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/14/2010	4:37:00 PM	Helium MFC set to  100.000000
12/14/2010	4:37:01 PM	Helium valve opened
12/14/2010	4:37:04 PM	Tube furnace set to 500
12/14/2010	4:49:43 PM	Helium MFC set to  0.000000
12/14/2010	4:49:43 PM	Helium valve closed
12/14/2010	4:50:39 PM	Recipe started at 4:50 PM
12/14/2010	4:50:39 PM	Helium valve closed
12/14/2010	4:50:39 PM	BCl3 valve closed
12/14/2010	4:50:39 PM	PH3 valve closed
12/14/2010	4:50:39 PM	SiCl4 pre valve closed
12/14/2010	4:50:39 PM	SiCl4 post valve closed
12/14/2010	4:50:39 PM	Main Vac valve closed
12/14/2010	4:50:39 PM	Bypass valve closed
12/14/2010	4:50:39 PM	Bubbler valve closed
12/14/2010	4:50:39 PM	H2 valve opened
12/14/2010	4:50:39 PM	Helium MFC set to  0.000000
12/14/2010	4:50:39 PM	H2 MFC set to  500.000000
12/14/2010	4:50:39 PM	BCl3 MFC set to  0.000000
12/14/2010	4:50:39 PM	PHl3 MFC set to  0.000000
12/14/2010	4:50:39 PM	SiCl4 MFC set to  0.000000
12/14/2010	4:50:39 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	4:50:39 PM	Tube furnace set to 200
12/14/2010	4:51:52 PM	Helium valve closed
12/14/2010	4:51:52 PM	BCl3 valve closed
12/14/2010	4:51:52 PM	PH3 valve closed
12/14/2010	4:51:52 PM	SiCl4 pre valve closed
12/14/2010	4:51:52 PM	SiCl4 post valve closed
12/14/2010	4:51:52 PM	Main Vac valve closed
12/14/2010	4:51:52 PM	Bypass valve closed
12/14/2010	4:51:52 PM	H2 valve opened
12/14/2010	4:51:52 PM	Bubbler valve opened
12/14/2010	4:51:52 PM	Helium MFC set to  0.000000
12/14/2010	4:51:52 PM	H2 MFC set to  0.000000
12/14/2010	4:51:52 PM	BCl3 MFC set to  0.000000
12/14/2010	4:51:52 PM	PHl3 MFC set to  0.000000
12/14/2010	4:51:52 PM	SiCl4 MFC set to  0.000000
12/14/2010	4:51:52 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	4:51:52 PM	Tube furnace set to 1001
12/14/2010	5:12:52 PM	Helium valve closed
12/14/2010	5:12:52 PM	BCl3 valve closed
12/14/2010	5:12:52 PM	PH3 valve closed
12/14/2010	5:12:52 PM	Main Vac valve closed
12/14/2010	5:12:52 PM	Bypass valve closed
12/14/2010	5:12:52 PM	H2 valve opened
12/14/2010	5:12:52 PM	SiCl4 pre valve opened
12/14/2010	5:12:52 PM	SiCl4 post valve opened
12/14/2010	5:12:52 PM	Bubbler valve opened
12/14/2010	5:12:52 PM	Helium MFC set to  0.000000
12/14/2010	5:12:52 PM	H2 MFC set to  500.000000
12/14/2010	5:12:52 PM	BCl3 MFC set to  0.000000
12/14/2010	5:12:52 PM	PHl3 MFC set to  0.000000
12/14/2010	5:12:52 PM	SiCl4 MFC set to  50.000000
12/14/2010	5:12:52 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	5:12:52 PM	Tube furnace set to 1000
12/14/2010	5:14:52 PM	H2 valve closed
12/14/2010	5:14:52 PM	BCl3 valve closed
12/14/2010	5:14:52 PM	PH3 valve closed
12/14/2010	5:14:52 PM	SiCl4 pre valve closed
12/14/2010	5:14:52 PM	SiCl4 post valve closed
12/14/2010	5:14:52 PM	Main Vac valve closed
12/14/2010	5:14:52 PM	Bypass valve closed
12/14/2010	5:14:52 PM	Helium valve opened
12/14/2010	5:14:52 PM	Bubbler valve opened
12/14/2010	5:14:52 PM	Helium MFC set to  500.000000
12/14/2010	5:14:52 PM	H2 MFC set to  0.000000
12/14/2010	5:14:52 PM	BCl3 MFC set to  0.000000
12/14/2010	5:14:52 PM	PHl3 MFC set to  0.000000
12/14/2010	5:14:52 PM	SiCl4 MFC set to  0.000000
12/14/2010	5:14:52 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	5:14:53 PM	Tube furnace set to 0
12/14/2010	5:34:53 PM	Helium valve closed
12/14/2010	5:34:53 PM	H2 valve closed
12/14/2010	5:34:53 PM	BCl3 valve closed
12/14/2010	5:34:53 PM	PH3 valve closed
12/14/2010	5:34:53 PM	SiCl4 pre valve closed
12/14/2010	5:34:53 PM	SiCl4 post valve closed
12/14/2010	5:34:53 PM	Main Vac valve closed
12/14/2010	5:34:53 PM	Bypass valve closed
12/14/2010	5:34:53 PM	Bubbler valve closed
12/14/2010	5:34:53 PM	Helium MFC set to  0.000000
12/14/2010	5:34:53 PM	H2 MFC set to  0.000000
12/14/2010	5:34:53 PM	BCl3 MFC set to  0.000000
12/14/2010	5:34:53 PM	PHl3 MFC set to  0.000000
12/14/2010	5:34:53 PM	SiCl4 MFC set to  0.000000
12/14/2010	5:34:53 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	5:34:53 PM	Tube furnace set to 0
12/14/2010	5:34:53 PM	Run finished at 5:34 PM
12/14/2010	5:39:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/14/2010	5:40:03 PM	Recipe started at 5:39 PM
12/14/2010	5:40:03 PM	Helium valve closed
12/14/2010	5:40:03 PM	H2 valve closed
12/14/2010	5:40:03 PM	BCl3 valve closed
12/14/2010	5:40:03 PM	PH3 valve closed
12/14/2010	5:40:03 PM	SiCl4 pre valve closed
12/14/2010	5:40:03 PM	SiCl4 post valve closed
12/14/2010	5:40:03 PM	Main Vac valve closed
12/14/2010	5:40:03 PM	Bubbler valve closed
12/14/2010	5:40:03 PM	Bypass valve opened
12/14/2010	5:40:03 PM	Helium MFC set to  0.000000
12/14/2010	5:40:03 PM	H2 MFC set to  0.000000
12/14/2010	5:40:03 PM	BCl3 MFC set to  0.000000
12/14/2010	5:40:03 PM	PHl3 MFC set to  0.000000
12/14/2010	5:40:03 PM	SiCl4 MFC set to  0.000000
12/14/2010	5:40:03 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	5:40:03 PM	Tube furnace set to 0
12/14/2010	5:40:59 PM	Helium valve closed
12/14/2010	5:40:59 PM	H2 valve closed
12/14/2010	5:40:59 PM	BCl3 valve closed
12/14/2010	5:40:59 PM	PH3 valve closed
12/14/2010	5:40:59 PM	SiCl4 pre valve closed
12/14/2010	5:40:59 PM	SiCl4 post valve closed
12/14/2010	5:40:59 PM	Bubbler valve closed
12/14/2010	5:40:59 PM	Main Vac valve opened
12/14/2010	5:40:59 PM	Bypass valve opened
12/14/2010	5:40:59 PM	Helium MFC set to  0.000000
12/14/2010	5:40:59 PM	H2 MFC set to  0.000000
12/14/2010	5:40:59 PM	BCl3 MFC set to  0.000000
12/14/2010	5:40:59 PM	PHl3 MFC set to  0.000000
12/14/2010	5:40:59 PM	SiCl4 MFC set to  0.000000
12/14/2010	5:40:59 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	5:40:59 PM	Tube furnace set to 0
12/14/2010	5:41:18 PM	H2 valve closed
12/14/2010	5:41:18 PM	BCl3 valve closed
12/14/2010	5:41:18 PM	PH3 valve closed
12/14/2010	5:41:18 PM	SiCl4 pre valve closed
12/14/2010	5:41:18 PM	SiCl4 post valve closed
12/14/2010	5:41:18 PM	Bubbler valve closed
12/14/2010	5:41:18 PM	Helium valve opened
12/14/2010	5:41:18 PM	Main Vac valve opened
12/14/2010	5:41:18 PM	Bypass valve opened
12/14/2010	5:41:18 PM	Helium MFC set to  100.000000
12/14/2010	5:41:18 PM	H2 MFC set to  0.000000
12/14/2010	5:41:18 PM	BCl3 MFC set to  0.000000
12/14/2010	5:41:18 PM	PHl3 MFC set to  0.000000
12/14/2010	5:41:18 PM	SiCl4 MFC set to  0.000000
12/14/2010	5:41:18 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	5:41:18 PM	Tube furnace set to 0
12/14/2010	5:41:36 PM	Helium valve closed
12/14/2010	5:41:36 PM	H2 valve closed
12/14/2010	5:41:36 PM	BCl3 valve closed
12/14/2010	5:41:36 PM	PH3 valve closed
12/14/2010	5:41:36 PM	SiCl4 pre valve closed
12/14/2010	5:41:36 PM	SiCl4 post valve closed
12/14/2010	5:41:36 PM	Bubbler valve closed
12/14/2010	5:41:36 PM	Main Vac valve opened
12/14/2010	5:41:36 PM	Bypass valve opened
12/14/2010	5:41:36 PM	Helium MFC set to  0.000000
12/14/2010	5:41:36 PM	H2 MFC set to  0.000000
12/14/2010	5:41:36 PM	BCl3 MFC set to  0.000000
12/14/2010	5:41:36 PM	PHl3 MFC set to  0.000000
12/14/2010	5:41:36 PM	SiCl4 MFC set to  0.000000
12/14/2010	5:41:36 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	5:41:37 PM	Tube furnace set to 0
12/14/2010	5:42:37 PM	H2 valve closed
12/14/2010	5:42:37 PM	BCl3 valve closed
12/14/2010	5:42:37 PM	PH3 valve closed
12/14/2010	5:42:37 PM	SiCl4 pre valve closed
12/14/2010	5:42:37 PM	SiCl4 post valve closed
12/14/2010	5:42:37 PM	Bubbler valve closed
12/14/2010	5:42:37 PM	Helium valve opened
12/14/2010	5:42:37 PM	Main Vac valve opened
12/14/2010	5:42:37 PM	Bypass valve opened
12/14/2010	5:42:37 PM	Helium MFC set to  100.000000
12/14/2010	5:42:37 PM	H2 MFC set to  0.000000
12/14/2010	5:42:37 PM	BCl3 MFC set to  0.000000
12/14/2010	5:42:37 PM	PHl3 MFC set to  0.000000
12/14/2010	5:42:37 PM	SiCl4 MFC set to  0.000000
12/14/2010	5:42:37 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	5:42:37 PM	Tube furnace set to 0
12/14/2010	5:43:37 PM	Helium valve closed
12/14/2010	5:43:37 PM	H2 valve closed
12/14/2010	5:43:37 PM	BCl3 valve closed
12/14/2010	5:43:37 PM	PH3 valve closed
12/14/2010	5:43:37 PM	SiCl4 pre valve closed
12/14/2010	5:43:37 PM	SiCl4 post valve closed
12/14/2010	5:43:37 PM	Bubbler valve closed
12/14/2010	5:43:37 PM	Main Vac valve opened
12/14/2010	5:43:37 PM	Bypass valve opened
12/14/2010	5:43:37 PM	Helium MFC set to  0.000000
12/14/2010	5:43:37 PM	H2 MFC set to  0.000000
12/14/2010	5:43:37 PM	BCl3 MFC set to  0.000000
12/14/2010	5:43:37 PM	PHl3 MFC set to  0.000000
12/14/2010	5:43:37 PM	SiCl4 MFC set to  0.000000
12/14/2010	5:43:37 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	5:43:37 PM	Tube furnace set to 0
12/14/2010	5:44:37 PM	H2 valve closed
12/14/2010	5:44:37 PM	BCl3 valve closed
12/14/2010	5:44:37 PM	PH3 valve closed
12/14/2010	5:44:37 PM	SiCl4 pre valve closed
12/14/2010	5:44:37 PM	SiCl4 post valve closed
12/14/2010	5:44:37 PM	Bubbler valve closed
12/14/2010	5:44:37 PM	Helium valve opened
12/14/2010	5:44:37 PM	Main Vac valve opened
12/14/2010	5:44:37 PM	Bypass valve opened
12/14/2010	5:44:37 PM	Helium MFC set to  100.000000
12/14/2010	5:44:37 PM	H2 MFC set to  0.000000
12/14/2010	5:44:37 PM	BCl3 MFC set to  0.000000
12/14/2010	5:44:37 PM	PHl3 MFC set to  0.000000
12/14/2010	5:44:37 PM	SiCl4 MFC set to  0.000000
12/14/2010	5:44:37 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	5:44:37 PM	Tube furnace set to 0
12/14/2010	5:45:37 PM	Helium valve closed
12/14/2010	5:45:37 PM	H2 valve closed
12/14/2010	5:45:37 PM	BCl3 valve closed
12/14/2010	5:45:37 PM	PH3 valve closed
12/14/2010	5:45:37 PM	SiCl4 pre valve closed
12/14/2010	5:45:37 PM	SiCl4 post valve closed
12/14/2010	5:45:37 PM	Bubbler valve closed
12/14/2010	5:45:37 PM	Main Vac valve opened
12/14/2010	5:45:37 PM	Bypass valve opened
12/14/2010	5:45:37 PM	Helium MFC set to  0.000000
12/14/2010	5:45:37 PM	H2 MFC set to  0.000000
12/14/2010	5:45:37 PM	BCl3 MFC set to  0.000000
12/14/2010	5:45:37 PM	PHl3 MFC set to  0.000000
12/14/2010	5:45:37 PM	SiCl4 MFC set to  0.000000
12/14/2010	5:45:37 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	5:45:37 PM	Tube furnace set to 0
12/14/2010	5:46:37 PM	H2 valve closed
12/14/2010	5:46:37 PM	BCl3 valve closed
12/14/2010	5:46:37 PM	PH3 valve closed
12/14/2010	5:46:37 PM	SiCl4 pre valve closed
12/14/2010	5:46:37 PM	SiCl4 post valve closed
12/14/2010	5:46:37 PM	Bubbler valve closed
12/14/2010	5:46:37 PM	Helium valve opened
12/14/2010	5:46:37 PM	Main Vac valve opened
12/14/2010	5:46:37 PM	Bypass valve opened
12/14/2010	5:46:37 PM	Helium MFC set to  100.000000
12/14/2010	5:46:37 PM	H2 MFC set to  0.000000
12/14/2010	5:46:37 PM	BCl3 MFC set to  0.000000
12/14/2010	5:46:37 PM	PHl3 MFC set to  0.000000
12/14/2010	5:46:37 PM	SiCl4 MFC set to  0.000000
12/14/2010	5:46:37 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	5:46:37 PM	Tube furnace set to 0
12/14/2010	5:47:38 PM	Helium valve closed
12/14/2010	5:47:38 PM	H2 valve closed
12/14/2010	5:47:38 PM	BCl3 valve closed
12/14/2010	5:47:38 PM	PH3 valve closed
12/14/2010	5:47:38 PM	SiCl4 pre valve closed
12/14/2010	5:47:38 PM	SiCl4 post valve closed
12/14/2010	5:47:38 PM	Bubbler valve closed
12/14/2010	5:47:38 PM	Main Vac valve opened
12/14/2010	5:47:38 PM	Bypass valve opened
12/14/2010	5:47:38 PM	Helium MFC set to  0.000000
12/14/2010	5:47:38 PM	H2 MFC set to  0.000000
12/14/2010	5:47:38 PM	BCl3 MFC set to  0.000000
12/14/2010	5:47:38 PM	PHl3 MFC set to  0.000000
12/14/2010	5:47:38 PM	SiCl4 MFC set to  0.000000
12/14/2010	5:47:38 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	5:47:38 PM	Tube furnace set to 0
12/14/2010	5:48:38 PM	H2 valve closed
12/14/2010	5:48:38 PM	BCl3 valve closed
12/14/2010	5:48:38 PM	PH3 valve closed
12/14/2010	5:48:38 PM	SiCl4 pre valve closed
12/14/2010	5:48:38 PM	SiCl4 post valve closed
12/14/2010	5:48:38 PM	Bubbler valve closed
12/14/2010	5:48:38 PM	Helium valve opened
12/14/2010	5:48:38 PM	Main Vac valve opened
12/14/2010	5:48:38 PM	Bypass valve opened
12/14/2010	5:48:38 PM	Helium MFC set to  100.000000
12/14/2010	5:48:38 PM	H2 MFC set to  0.000000
12/14/2010	5:48:38 PM	BCl3 MFC set to  0.000000
12/14/2010	5:48:38 PM	PHl3 MFC set to  0.000000
12/14/2010	5:48:38 PM	SiCl4 MFC set to  0.000000
12/14/2010	5:48:38 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	5:48:38 PM	Tube furnace set to 0
12/14/2010	5:49:38 PM	Helium valve closed
12/14/2010	5:49:38 PM	H2 valve closed
12/14/2010	5:49:38 PM	BCl3 valve closed
12/14/2010	5:49:38 PM	PH3 valve closed
12/14/2010	5:49:38 PM	SiCl4 pre valve closed
12/14/2010	5:49:38 PM	SiCl4 post valve closed
12/14/2010	5:49:38 PM	Bubbler valve closed
12/14/2010	5:49:38 PM	Main Vac valve opened
12/14/2010	5:49:38 PM	Bypass valve opened
12/14/2010	5:49:38 PM	Helium MFC set to  0.000000
12/14/2010	5:49:38 PM	H2 MFC set to  0.000000
12/14/2010	5:49:38 PM	BCl3 MFC set to  0.000000
12/14/2010	5:49:38 PM	PHl3 MFC set to  0.000000
12/14/2010	5:49:38 PM	SiCl4 MFC set to  0.000000
12/14/2010	5:49:38 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	5:49:38 PM	Tube furnace set to 0
12/14/2010	5:50:38 PM	H2 valve closed
12/14/2010	5:50:38 PM	BCl3 valve closed
12/14/2010	5:50:38 PM	PH3 valve closed
12/14/2010	5:50:38 PM	SiCl4 pre valve closed
12/14/2010	5:50:38 PM	SiCl4 post valve closed
12/14/2010	5:50:38 PM	Bubbler valve closed
12/14/2010	5:50:38 PM	Helium valve opened
12/14/2010	5:50:38 PM	Main Vac valve opened
12/14/2010	5:50:38 PM	Bypass valve opened
12/14/2010	5:50:38 PM	Helium MFC set to  100.000000
12/14/2010	5:50:38 PM	H2 MFC set to  0.000000
12/14/2010	5:50:38 PM	BCl3 MFC set to  0.000000
12/14/2010	5:50:38 PM	PHl3 MFC set to  0.000000
12/14/2010	5:50:38 PM	SiCl4 MFC set to  0.000000
12/14/2010	5:50:38 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	5:50:38 PM	Tube furnace set to 0
12/14/2010	5:50:41 PM	Run aborted at 5:50 PM
12/14/2010	5:50:41 PM	Helium valve closed
12/14/2010	5:50:41 PM	H2 valve closed
12/14/2010	5:50:41 PM	BCl3 valve closed
12/14/2010	5:50:41 PM	PH3 valve closed
12/14/2010	5:50:41 PM	SiCl4 pre valve closed
12/14/2010	5:50:41 PM	SiCl4 post valve closed
12/14/2010	5:50:41 PM	Bypass valve closed
12/14/2010	5:50:41 PM	Main Vac valve closed
12/14/2010	5:50:41 PM	Bubbler valve closed
12/14/2010	5:50:41 PM	Helium MFC set to  0.000000
12/14/2010	5:50:41 PM	H2 MFC set to  0.000000
12/14/2010	5:50:41 PM	BCl3 MFC set to  0.000000
12/14/2010	5:50:41 PM	PHl3 MFC set to  0.000000
12/14/2010	5:50:41 PM	SiCl4 MFC set to  0.000000
12/14/2010	5:50:41 PM	Tube furnace set to 0
12/14/2010	5:50:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/14/2010	5:50:43 PM	Bypass valve opened
12/14/2010	5:50:44 PM	Main Vac valve opened
12/14/2010	9:01:11 PM	Main Vac valve closed
12/14/2010	9:01:13 PM	Bypass valve closed
12/14/2010	9:01:24 PM	Bypass valve opened
12/14/2010	9:01:25 PM	Main Vac valve opened
12/14/2010	9:01:40 PM	Tube furnace set to 200
12/14/2010	9:06:20 PM	Recipe started at 9:06 PM
12/14/2010	9:06:20 PM	Helium valve closed
12/14/2010	9:06:20 PM	BCl3 valve closed
12/14/2010	9:06:20 PM	PH3 valve closed
12/14/2010	9:06:20 PM	SiCl4 pre valve closed
12/14/2010	9:06:20 PM	SiCl4 post valve closed
12/14/2010	9:06:20 PM	Main Vac valve closed
12/14/2010	9:06:20 PM	Bypass valve closed
12/14/2010	9:06:20 PM	Bubbler valve closed
12/14/2010	9:06:20 PM	H2 valve opened
12/14/2010	9:06:20 PM	Helium MFC set to  0.000000
12/14/2010	9:06:20 PM	H2 MFC set to  500.000000
12/14/2010	9:06:20 PM	BCl3 MFC set to  0.000000
12/14/2010	9:06:20 PM	PHl3 MFC set to  0.000000
12/14/2010	9:06:20 PM	SiCl4 MFC set to  0.000000
12/14/2010	9:06:20 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	9:06:20 PM	Tube furnace set to 200
12/14/2010	9:07:38 PM	Helium valve closed
12/14/2010	9:07:38 PM	BCl3 valve closed
12/14/2010	9:07:38 PM	PH3 valve closed
12/14/2010	9:07:38 PM	SiCl4 pre valve closed
12/14/2010	9:07:38 PM	SiCl4 post valve closed
12/14/2010	9:07:38 PM	Main Vac valve closed
12/14/2010	9:07:38 PM	Bypass valve closed
12/14/2010	9:07:38 PM	H2 valve opened
12/14/2010	9:07:38 PM	Bubbler valve opened
12/14/2010	9:07:38 PM	Helium MFC set to  0.000000
12/14/2010	9:07:38 PM	H2 MFC set to  400.000000
12/14/2010	9:07:38 PM	BCl3 MFC set to  0.000000
12/14/2010	9:07:38 PM	PHl3 MFC set to  0.000000
12/14/2010	9:07:38 PM	SiCl4 MFC set to  0.000000
12/14/2010	9:07:38 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	9:07:38 PM	Tube furnace set to 1001
12/14/2010	9:28:38 PM	Helium valve closed
12/14/2010	9:28:38 PM	BCl3 valve closed
12/14/2010	9:28:38 PM	PH3 valve closed
12/14/2010	9:28:38 PM	Main Vac valve closed
12/14/2010	9:28:38 PM	Bypass valve closed
12/14/2010	9:28:38 PM	H2 valve opened
12/14/2010	9:28:38 PM	SiCl4 pre valve opened
12/14/2010	9:28:38 PM	SiCl4 post valve opened
12/14/2010	9:28:38 PM	Bubbler valve opened
12/14/2010	9:28:38 PM	Helium MFC set to  0.000000
12/14/2010	9:28:38 PM	H2 MFC set to  500.000000
12/14/2010	9:28:38 PM	BCl3 MFC set to  0.000000
12/14/2010	9:28:38 PM	PHl3 MFC set to  0.000000
12/14/2010	9:28:38 PM	SiCl4 MFC set to  50.000000
12/14/2010	9:28:38 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	9:28:38 PM	Tube furnace set to 1000
12/14/2010	9:28:48 PM	Helium valve closed
12/14/2010	9:28:48 PM	PH3 valve closed
12/14/2010	9:28:48 PM	Main Vac valve closed
12/14/2010	9:28:48 PM	Bypass valve closed
12/14/2010	9:28:48 PM	H2 valve opened
12/14/2010	9:28:48 PM	BCl3 valve opened
12/14/2010	9:28:48 PM	SiCl4 pre valve opened
12/14/2010	9:28:48 PM	SiCl4 post valve opened
12/14/2010	9:28:48 PM	Bubbler valve opened
12/14/2010	9:28:48 PM	Helium MFC set to  0.000000
12/14/2010	9:28:48 PM	H2 MFC set to  500.000000
12/14/2010	9:28:48 PM	BCl3 MFC set to  10.000000
12/14/2010	9:28:48 PM	PHl3 MFC set to  0.000000
12/14/2010	9:28:48 PM	SiCl4 MFC set to  50.000000
12/14/2010	9:28:48 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	9:28:48 PM	Tube furnace set to 1000
12/14/2010	9:43:48 PM	H2 valve closed
12/14/2010	9:43:48 PM	BCl3 valve closed
12/14/2010	9:43:48 PM	PH3 valve closed
12/14/2010	9:43:48 PM	SiCl4 pre valve closed
12/14/2010	9:43:48 PM	SiCl4 post valve closed
12/14/2010	9:43:48 PM	Main Vac valve closed
12/14/2010	9:43:48 PM	Bypass valve closed
12/14/2010	9:43:48 PM	Helium valve opened
12/14/2010	9:43:48 PM	Bubbler valve opened
12/14/2010	9:43:48 PM	Helium MFC set to  500.000000
12/14/2010	9:43:48 PM	H2 MFC set to  0.000000
12/14/2010	9:43:48 PM	BCl3 MFC set to  0.000000
12/14/2010	9:43:48 PM	PHl3 MFC set to  0.000000
12/14/2010	9:43:48 PM	SiCl4 MFC set to  0.000000
12/14/2010	9:43:48 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	9:43:48 PM	Tube furnace set to 0
12/14/2010	9:43:53 PM	Helium valve closed
12/14/2010	9:43:53 PM	H2 valve closed
12/14/2010	9:43:53 PM	BCl3 valve closed
12/14/2010	9:43:53 PM	PH3 valve closed
12/14/2010	9:43:53 PM	SiCl4 pre valve closed
12/14/2010	9:43:53 PM	SiCl4 post valve closed
12/14/2010	9:43:53 PM	Main Vac valve closed
12/14/2010	9:43:53 PM	Bypass valve closed
12/14/2010	9:43:53 PM	Bubbler valve closed
12/14/2010	9:43:53 PM	Helium MFC set to  0.000000
12/14/2010	9:43:53 PM	H2 MFC set to  0.000000
12/14/2010	9:43:53 PM	BCl3 MFC set to  0.000000
12/14/2010	9:43:53 PM	PHl3 MFC set to  0.000000
12/14/2010	9:43:53 PM	SiCl4 MFC set to  0.000000
12/14/2010	9:43:53 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	9:43:54 PM	Tube furnace set to 0
12/14/2010	9:43:59 PM	Helium valve closed
12/14/2010	9:43:59 PM	H2 valve closed
12/14/2010	9:43:59 PM	BCl3 valve closed
12/14/2010	9:43:59 PM	PH3 valve closed
12/14/2010	9:43:59 PM	SiCl4 pre valve closed
12/14/2010	9:43:59 PM	SiCl4 post valve closed
12/14/2010	9:43:59 PM	Main Vac valve closed
12/14/2010	9:43:59 PM	Bubbler valve closed
12/14/2010	9:43:59 PM	Bypass valve opened
12/14/2010	9:43:59 PM	Helium MFC set to  0.000000
12/14/2010	9:43:59 PM	H2 MFC set to  0.000000
12/14/2010	9:43:59 PM	BCl3 MFC set to  0.000000
12/14/2010	9:43:59 PM	PHl3 MFC set to  0.000000
12/14/2010	9:43:59 PM	SiCl4 MFC set to  0.000000
12/14/2010	9:43:59 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	9:43:59 PM	Tube furnace set to 0
12/14/2010	9:44:04 PM	H2 valve closed
12/14/2010	9:44:04 PM	BCl3 valve closed
12/14/2010	9:44:04 PM	PH3 valve closed
12/14/2010	9:44:04 PM	SiCl4 pre valve closed
12/14/2010	9:44:04 PM	SiCl4 post valve closed
12/14/2010	9:44:04 PM	Main Vac valve closed
12/14/2010	9:44:04 PM	Bypass valve closed
12/14/2010	9:44:04 PM	Bubbler valve closed
12/14/2010	9:44:04 PM	Helium valve opened
12/14/2010	9:44:04 PM	Helium MFC set to  500.000000
12/14/2010	9:44:04 PM	H2 MFC set to  0.000000
12/14/2010	9:44:04 PM	BCl3 MFC set to  0.000000
12/14/2010	9:44:04 PM	PHl3 MFC set to  0.000000
12/14/2010	9:44:04 PM	SiCl4 MFC set to  0.000000
12/14/2010	9:44:04 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	9:44:04 PM	Tube furnace set to 0
12/14/2010	9:44:44 PM	H2 valve closed
12/14/2010	9:44:44 PM	BCl3 valve closed
12/14/2010	9:44:44 PM	PH3 valve closed
12/14/2010	9:44:44 PM	SiCl4 pre valve closed
12/14/2010	9:44:44 PM	SiCl4 post valve closed
12/14/2010	9:44:44 PM	Main Vac valve closed
12/14/2010	9:44:44 PM	Bypass valve closed
12/14/2010	9:44:44 PM	Helium valve opened
12/14/2010	9:44:44 PM	Bubbler valve opened
12/14/2010	9:44:44 PM	Helium MFC set to  500.000000
12/14/2010	9:44:44 PM	H2 MFC set to  0.000000
12/14/2010	9:44:44 PM	BCl3 MFC set to  0.000000
12/14/2010	9:44:44 PM	PHl3 MFC set to  0.000000
12/14/2010	9:44:44 PM	SiCl4 MFC set to  0.000000
12/14/2010	9:44:44 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	9:44:44 PM	Tube furnace set to 0
12/14/2010	10:04:44 PM	Helium valve closed
12/14/2010	10:04:44 PM	H2 valve closed
12/14/2010	10:04:44 PM	BCl3 valve closed
12/14/2010	10:04:44 PM	PH3 valve closed
12/14/2010	10:04:44 PM	SiCl4 pre valve closed
12/14/2010	10:04:44 PM	SiCl4 post valve closed
12/14/2010	10:04:44 PM	Main Vac valve closed
12/14/2010	10:04:44 PM	Bypass valve closed
12/14/2010	10:04:44 PM	Bubbler valve closed
12/14/2010	10:04:44 PM	Helium MFC set to  0.000000
12/14/2010	10:04:44 PM	H2 MFC set to  0.000000
12/14/2010	10:04:44 PM	BCl3 MFC set to  0.000000
12/14/2010	10:04:44 PM	PHl3 MFC set to  0.000000
12/14/2010	10:04:44 PM	SiCl4 MFC set to  0.000000
12/14/2010	10:04:44 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:04:44 PM	Tube furnace set to 0
12/14/2010	10:04:44 PM	Run finished at 10:04 PM
12/14/2010	10:11:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/14/2010	10:11:33 PM	Recipe started at 10:11 PM
12/14/2010	10:11:33 PM	Helium valve closed
12/14/2010	10:11:33 PM	H2 valve closed
12/14/2010	10:11:33 PM	BCl3 valve closed
12/14/2010	10:11:33 PM	PH3 valve closed
12/14/2010	10:11:33 PM	SiCl4 pre valve closed
12/14/2010	10:11:33 PM	SiCl4 post valve closed
12/14/2010	10:11:33 PM	Main Vac valve closed
12/14/2010	10:11:33 PM	Bubbler valve closed
12/14/2010	10:11:33 PM	Bypass valve opened
12/14/2010	10:11:33 PM	Helium MFC set to  0.000000
12/14/2010	10:11:33 PM	H2 MFC set to  0.000000
12/14/2010	10:11:33 PM	BCl3 MFC set to  0.000000
12/14/2010	10:11:33 PM	PHl3 MFC set to  0.000000
12/14/2010	10:11:33 PM	SiCl4 MFC set to  0.000000
12/14/2010	10:11:33 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:11:33 PM	Tube furnace set to 0
12/14/2010	10:12:29 PM	Helium valve closed
12/14/2010	10:12:29 PM	H2 valve closed
12/14/2010	10:12:29 PM	BCl3 valve closed
12/14/2010	10:12:29 PM	PH3 valve closed
12/14/2010	10:12:29 PM	SiCl4 pre valve closed
12/14/2010	10:12:29 PM	SiCl4 post valve closed
12/14/2010	10:12:29 PM	Bubbler valve closed
12/14/2010	10:12:29 PM	Main Vac valve opened
12/14/2010	10:12:29 PM	Bypass valve opened
12/14/2010	10:12:29 PM	Helium MFC set to  0.000000
12/14/2010	10:12:29 PM	H2 MFC set to  0.000000
12/14/2010	10:12:29 PM	BCl3 MFC set to  0.000000
12/14/2010	10:12:29 PM	PHl3 MFC set to  0.000000
12/14/2010	10:12:29 PM	SiCl4 MFC set to  0.000000
12/14/2010	10:12:29 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:12:30 PM	Tube furnace set to 0
12/14/2010	10:13:30 PM	H2 valve closed
12/14/2010	10:13:30 PM	BCl3 valve closed
12/14/2010	10:13:30 PM	PH3 valve closed
12/14/2010	10:13:30 PM	SiCl4 pre valve closed
12/14/2010	10:13:30 PM	SiCl4 post valve closed
12/14/2010	10:13:30 PM	Bubbler valve closed
12/14/2010	10:13:30 PM	Helium valve opened
12/14/2010	10:13:30 PM	Main Vac valve opened
12/14/2010	10:13:30 PM	Bypass valve opened
12/14/2010	10:13:30 PM	Helium MFC set to  100.000000
12/14/2010	10:13:30 PM	H2 MFC set to  0.000000
12/14/2010	10:13:30 PM	BCl3 MFC set to  0.000000
12/14/2010	10:13:30 PM	PHl3 MFC set to  0.000000
12/14/2010	10:13:30 PM	SiCl4 MFC set to  0.000000
12/14/2010	10:13:30 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:13:30 PM	Tube furnace set to 0
12/14/2010	10:14:30 PM	Helium valve closed
12/14/2010	10:14:30 PM	H2 valve closed
12/14/2010	10:14:30 PM	BCl3 valve closed
12/14/2010	10:14:30 PM	PH3 valve closed
12/14/2010	10:14:30 PM	SiCl4 pre valve closed
12/14/2010	10:14:30 PM	SiCl4 post valve closed
12/14/2010	10:14:30 PM	Bubbler valve closed
12/14/2010	10:14:30 PM	Main Vac valve opened
12/14/2010	10:14:30 PM	Bypass valve opened
12/14/2010	10:14:30 PM	Helium MFC set to  0.000000
12/14/2010	10:14:30 PM	H2 MFC set to  0.000000
12/14/2010	10:14:30 PM	BCl3 MFC set to  0.000000
12/14/2010	10:14:30 PM	PHl3 MFC set to  0.000000
12/14/2010	10:14:30 PM	SiCl4 MFC set to  0.000000
12/14/2010	10:14:30 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:14:30 PM	Tube furnace set to 0
12/14/2010	10:15:30 PM	H2 valve closed
12/14/2010	10:15:30 PM	BCl3 valve closed
12/14/2010	10:15:30 PM	PH3 valve closed
12/14/2010	10:15:30 PM	SiCl4 pre valve closed
12/14/2010	10:15:30 PM	SiCl4 post valve closed
12/14/2010	10:15:30 PM	Bubbler valve closed
12/14/2010	10:15:30 PM	Helium valve opened
12/14/2010	10:15:30 PM	Main Vac valve opened
12/14/2010	10:15:30 PM	Bypass valve opened
12/14/2010	10:15:30 PM	Helium MFC set to  100.000000
12/14/2010	10:15:30 PM	H2 MFC set to  0.000000
12/14/2010	10:15:30 PM	BCl3 MFC set to  0.000000
12/14/2010	10:15:30 PM	PHl3 MFC set to  0.000000
12/14/2010	10:15:30 PM	SiCl4 MFC set to  0.000000
12/14/2010	10:15:30 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:15:30 PM	Tube furnace set to 0
12/14/2010	10:16:30 PM	Helium valve closed
12/14/2010	10:16:30 PM	H2 valve closed
12/14/2010	10:16:30 PM	BCl3 valve closed
12/14/2010	10:16:30 PM	PH3 valve closed
12/14/2010	10:16:30 PM	SiCl4 pre valve closed
12/14/2010	10:16:30 PM	SiCl4 post valve closed
12/14/2010	10:16:30 PM	Bubbler valve closed
12/14/2010	10:16:30 PM	Main Vac valve opened
12/14/2010	10:16:30 PM	Bypass valve opened
12/14/2010	10:16:30 PM	Helium MFC set to  0.000000
12/14/2010	10:16:30 PM	H2 MFC set to  0.000000
12/14/2010	10:16:30 PM	BCl3 MFC set to  0.000000
12/14/2010	10:16:30 PM	PHl3 MFC set to  0.000000
12/14/2010	10:16:30 PM	SiCl4 MFC set to  0.000000
12/14/2010	10:16:30 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:16:30 PM	Tube furnace set to 0
12/14/2010	10:17:30 PM	H2 valve closed
12/14/2010	10:17:30 PM	BCl3 valve closed
12/14/2010	10:17:30 PM	PH3 valve closed
12/14/2010	10:17:30 PM	SiCl4 pre valve closed
12/14/2010	10:17:30 PM	SiCl4 post valve closed
12/14/2010	10:17:30 PM	Bubbler valve closed
12/14/2010	10:17:30 PM	Helium valve opened
12/14/2010	10:17:30 PM	Main Vac valve opened
12/14/2010	10:17:30 PM	Bypass valve opened
12/14/2010	10:17:30 PM	Helium MFC set to  100.000000
12/14/2010	10:17:30 PM	H2 MFC set to  0.000000
12/14/2010	10:17:30 PM	BCl3 MFC set to  0.000000
12/14/2010	10:17:30 PM	PHl3 MFC set to  0.000000
12/14/2010	10:17:30 PM	SiCl4 MFC set to  0.000000
12/14/2010	10:17:30 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:17:30 PM	Tube furnace set to 0
12/14/2010	10:18:31 PM	Helium valve closed
12/14/2010	10:18:31 PM	H2 valve closed
12/14/2010	10:18:31 PM	BCl3 valve closed
12/14/2010	10:18:31 PM	PH3 valve closed
12/14/2010	10:18:31 PM	SiCl4 pre valve closed
12/14/2010	10:18:31 PM	SiCl4 post valve closed
12/14/2010	10:18:31 PM	Bubbler valve closed
12/14/2010	10:18:31 PM	Main Vac valve opened
12/14/2010	10:18:31 PM	Bypass valve opened
12/14/2010	10:18:31 PM	Helium MFC set to  0.000000
12/14/2010	10:18:31 PM	H2 MFC set to  0.000000
12/14/2010	10:18:31 PM	BCl3 MFC set to  0.000000
12/14/2010	10:18:31 PM	PHl3 MFC set to  0.000000
12/14/2010	10:18:31 PM	SiCl4 MFC set to  0.000000
12/14/2010	10:18:31 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:18:31 PM	Tube furnace set to 0
12/14/2010	10:19:31 PM	H2 valve closed
12/14/2010	10:19:31 PM	BCl3 valve closed
12/14/2010	10:19:31 PM	PH3 valve closed
12/14/2010	10:19:31 PM	SiCl4 pre valve closed
12/14/2010	10:19:31 PM	SiCl4 post valve closed
12/14/2010	10:19:31 PM	Bubbler valve closed
12/14/2010	10:19:31 PM	Helium valve opened
12/14/2010	10:19:31 PM	Main Vac valve opened
12/14/2010	10:19:31 PM	Bypass valve opened
12/14/2010	10:19:31 PM	Helium MFC set to  100.000000
12/14/2010	10:19:31 PM	H2 MFC set to  0.000000
12/14/2010	10:19:31 PM	BCl3 MFC set to  0.000000
12/14/2010	10:19:31 PM	PHl3 MFC set to  0.000000
12/14/2010	10:19:31 PM	SiCl4 MFC set to  0.000000
12/14/2010	10:19:31 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:19:31 PM	Tube furnace set to 0
12/14/2010	10:20:31 PM	Helium valve closed
12/14/2010	10:20:31 PM	H2 valve closed
12/14/2010	10:20:31 PM	BCl3 valve closed
12/14/2010	10:20:31 PM	PH3 valve closed
12/14/2010	10:20:31 PM	SiCl4 pre valve closed
12/14/2010	10:20:31 PM	SiCl4 post valve closed
12/14/2010	10:20:31 PM	Bubbler valve closed
12/14/2010	10:20:31 PM	Main Vac valve opened
12/14/2010	10:20:31 PM	Bypass valve opened
12/14/2010	10:20:31 PM	Helium MFC set to  0.000000
12/14/2010	10:20:31 PM	H2 MFC set to  0.000000
12/14/2010	10:20:31 PM	BCl3 MFC set to  0.000000
12/14/2010	10:20:31 PM	PHl3 MFC set to  0.000000
12/14/2010	10:20:31 PM	SiCl4 MFC set to  0.000000
12/14/2010	10:20:31 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:20:31 PM	Tube furnace set to 0
12/14/2010	10:21:31 PM	H2 valve closed
12/14/2010	10:21:31 PM	BCl3 valve closed
12/14/2010	10:21:31 PM	PH3 valve closed
12/14/2010	10:21:31 PM	SiCl4 pre valve closed
12/14/2010	10:21:31 PM	SiCl4 post valve closed
12/14/2010	10:21:31 PM	Bubbler valve closed
12/14/2010	10:21:31 PM	Helium valve opened
12/14/2010	10:21:31 PM	Main Vac valve opened
12/14/2010	10:21:31 PM	Bypass valve opened
12/14/2010	10:21:31 PM	Helium MFC set to  100.000000
12/14/2010	10:21:31 PM	H2 MFC set to  0.000000
12/14/2010	10:21:31 PM	BCl3 MFC set to  0.000000
12/14/2010	10:21:31 PM	PHl3 MFC set to  0.000000
12/14/2010	10:21:31 PM	SiCl4 MFC set to  0.000000
12/14/2010	10:21:31 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:21:31 PM	Tube furnace set to 0
12/14/2010	10:22:10 PM	Helium valve closed
12/14/2010	10:22:10 PM	H2 valve closed
12/14/2010	10:22:10 PM	BCl3 valve closed
12/14/2010	10:22:10 PM	PH3 valve closed
12/14/2010	10:22:10 PM	SiCl4 pre valve closed
12/14/2010	10:22:10 PM	SiCl4 post valve closed
12/14/2010	10:22:10 PM	Bubbler valve closed
12/14/2010	10:22:10 PM	Main Vac valve opened
12/14/2010	10:22:10 PM	Bypass valve opened
12/14/2010	10:22:10 PM	Helium MFC set to  0.000000
12/14/2010	10:22:10 PM	H2 MFC set to  0.000000
12/14/2010	10:22:10 PM	BCl3 MFC set to  0.000000
12/14/2010	10:22:10 PM	PHl3 MFC set to  0.000000
12/14/2010	10:22:10 PM	SiCl4 MFC set to  0.000000
12/14/2010	10:22:10 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:22:10 PM	Tube furnace set to 0
12/14/2010	10:23:10 PM	H2 valve closed
12/14/2010	10:23:10 PM	BCl3 valve closed
12/14/2010	10:23:10 PM	PH3 valve closed
12/14/2010	10:23:10 PM	SiCl4 pre valve closed
12/14/2010	10:23:11 PM	SiCl4 post valve closed
12/14/2010	10:23:11 PM	Bubbler valve closed
12/14/2010	10:23:11 PM	Helium valve opened
12/14/2010	10:23:11 PM	Main Vac valve opened
12/14/2010	10:23:11 PM	Bypass valve opened
12/14/2010	10:23:11 PM	Helium MFC set to  100.000000
12/14/2010	10:23:11 PM	H2 MFC set to  0.000000
12/14/2010	10:23:11 PM	BCl3 MFC set to  0.000000
12/14/2010	10:23:11 PM	PHl3 MFC set to  0.000000
12/14/2010	10:23:11 PM	SiCl4 MFC set to  0.000000
12/14/2010	10:23:11 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:23:11 PM	Tube furnace set to 0
12/14/2010	10:24:11 PM	Helium valve closed
12/14/2010	10:24:11 PM	H2 valve closed
12/14/2010	10:24:11 PM	BCl3 valve closed
12/14/2010	10:24:11 PM	PH3 valve closed
12/14/2010	10:24:11 PM	SiCl4 pre valve closed
12/14/2010	10:24:11 PM	SiCl4 post valve closed
12/14/2010	10:24:11 PM	Bubbler valve closed
12/14/2010	10:24:11 PM	Main Vac valve opened
12/14/2010	10:24:11 PM	Bypass valve opened
12/14/2010	10:24:11 PM	Helium MFC set to  0.000000
12/14/2010	10:24:11 PM	H2 MFC set to  0.000000
12/14/2010	10:24:11 PM	BCl3 MFC set to  0.000000
12/14/2010	10:24:11 PM	PHl3 MFC set to  0.000000
12/14/2010	10:24:11 PM	SiCl4 MFC set to  0.000000
12/14/2010	10:24:11 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:24:11 PM	Tube furnace set to 0
12/14/2010	10:24:52 PM	H2 valve closed
12/14/2010	10:24:52 PM	BCl3 valve closed
12/14/2010	10:24:52 PM	PH3 valve closed
12/14/2010	10:24:52 PM	SiCl4 pre valve closed
12/14/2010	10:24:52 PM	SiCl4 post valve closed
12/14/2010	10:24:52 PM	Bubbler valve closed
12/14/2010	10:24:52 PM	Helium valve opened
12/14/2010	10:24:52 PM	Main Vac valve opened
12/14/2010	10:24:52 PM	Bypass valve opened
12/14/2010	10:24:52 PM	Helium MFC set to  100.000000
12/14/2010	10:24:52 PM	H2 MFC set to  0.000000
12/14/2010	10:24:52 PM	BCl3 MFC set to  0.000000
12/14/2010	10:24:52 PM	PHl3 MFC set to  0.000000
12/14/2010	10:24:52 PM	SiCl4 MFC set to  0.000000
12/14/2010	10:24:52 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:24:52 PM	Tube furnace set to 0
12/14/2010	10:25:52 PM	Helium valve closed
12/14/2010	10:25:52 PM	H2 valve closed
12/14/2010	10:25:52 PM	BCl3 valve closed
12/14/2010	10:25:52 PM	PH3 valve closed
12/14/2010	10:25:52 PM	SiCl4 pre valve closed
12/14/2010	10:25:52 PM	SiCl4 post valve closed
12/14/2010	10:25:52 PM	Bubbler valve closed
12/14/2010	10:25:52 PM	Main Vac valve opened
12/14/2010	10:25:52 PM	Bypass valve opened
12/14/2010	10:25:52 PM	Helium MFC set to  0.000000
12/14/2010	10:25:52 PM	H2 MFC set to  0.000000
12/14/2010	10:25:52 PM	BCl3 MFC set to  0.000000
12/14/2010	10:25:52 PM	PHl3 MFC set to  0.000000
12/14/2010	10:25:52 PM	SiCl4 MFC set to  0.000000
12/14/2010	10:25:52 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:25:52 PM	Tube furnace set to 0
12/14/2010	10:26:52 PM	H2 valve closed
12/14/2010	10:26:52 PM	BCl3 valve closed
12/14/2010	10:26:52 PM	PH3 valve closed
12/14/2010	10:26:52 PM	SiCl4 pre valve closed
12/14/2010	10:26:52 PM	SiCl4 post valve closed
12/14/2010	10:26:52 PM	Bubbler valve closed
12/14/2010	10:26:52 PM	Helium valve opened
12/14/2010	10:26:52 PM	Main Vac valve opened
12/14/2010	10:26:52 PM	Bypass valve opened
12/14/2010	10:26:52 PM	Helium MFC set to  100.000000
12/14/2010	10:26:52 PM	H2 MFC set to  0.000000
12/14/2010	10:26:52 PM	BCl3 MFC set to  0.000000
12/14/2010	10:26:52 PM	PHl3 MFC set to  0.000000
12/14/2010	10:26:52 PM	SiCl4 MFC set to  0.000000
12/14/2010	10:26:52 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:26:52 PM	Tube furnace set to 0
12/14/2010	10:27:52 PM	Helium valve closed
12/14/2010	10:27:52 PM	H2 valve closed
12/14/2010	10:27:52 PM	BCl3 valve closed
12/14/2010	10:27:52 PM	PH3 valve closed
12/14/2010	10:27:52 PM	SiCl4 pre valve closed
12/14/2010	10:27:52 PM	SiCl4 post valve closed
12/14/2010	10:27:52 PM	Bubbler valve closed
12/14/2010	10:27:52 PM	Main Vac valve opened
12/14/2010	10:27:52 PM	Bypass valve opened
12/14/2010	10:27:52 PM	Helium MFC set to  0.000000
12/14/2010	10:27:52 PM	H2 MFC set to  0.000000
12/14/2010	10:27:52 PM	BCl3 MFC set to  0.000000
12/14/2010	10:27:52 PM	PHl3 MFC set to  0.000000
12/14/2010	10:27:52 PM	SiCl4 MFC set to  0.000000
12/14/2010	10:27:52 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:27:52 PM	Tube furnace set to 0
12/14/2010	10:28:52 PM	H2 valve closed
12/14/2010	10:28:52 PM	BCl3 valve closed
12/14/2010	10:28:52 PM	PH3 valve closed
12/14/2010	10:28:52 PM	SiCl4 pre valve closed
12/14/2010	10:28:52 PM	SiCl4 post valve closed
12/14/2010	10:28:52 PM	Bubbler valve closed
12/14/2010	10:28:52 PM	Helium valve opened
12/14/2010	10:28:52 PM	Main Vac valve opened
12/14/2010	10:28:52 PM	Bypass valve opened
12/14/2010	10:28:52 PM	Helium MFC set to  100.000000
12/14/2010	10:28:52 PM	H2 MFC set to  0.000000
12/14/2010	10:28:52 PM	BCl3 MFC set to  0.000000
12/14/2010	10:28:52 PM	PHl3 MFC set to  0.000000
12/14/2010	10:28:52 PM	SiCl4 MFC set to  0.000000
12/14/2010	10:28:52 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:28:53 PM	Tube furnace set to 0
12/14/2010	10:29:53 PM	Helium valve closed
12/14/2010	10:29:53 PM	H2 valve closed
12/14/2010	10:29:53 PM	BCl3 valve closed
12/14/2010	10:29:53 PM	PH3 valve closed
12/14/2010	10:29:53 PM	SiCl4 pre valve closed
12/14/2010	10:29:53 PM	SiCl4 post valve closed
12/14/2010	10:29:53 PM	Bubbler valve closed
12/14/2010	10:29:53 PM	Main Vac valve opened
12/14/2010	10:29:53 PM	Bypass valve opened
12/14/2010	10:29:53 PM	Helium MFC set to  0.000000
12/14/2010	10:29:53 PM	H2 MFC set to  0.000000
12/14/2010	10:29:53 PM	BCl3 MFC set to  0.000000
12/14/2010	10:29:53 PM	PHl3 MFC set to  0.000000
12/14/2010	10:29:53 PM	SiCl4 MFC set to  0.000000
12/14/2010	10:29:53 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:29:53 PM	Tube furnace set to 0
12/14/2010	10:30:47 PM	H2 valve closed
12/14/2010	10:30:47 PM	BCl3 valve closed
12/14/2010	10:30:47 PM	PH3 valve closed
12/14/2010	10:30:47 PM	SiCl4 pre valve closed
12/14/2010	10:30:47 PM	SiCl4 post valve closed
12/14/2010	10:30:47 PM	Bubbler valve closed
12/14/2010	10:30:47 PM	Helium valve opened
12/14/2010	10:30:47 PM	Main Vac valve opened
12/14/2010	10:30:47 PM	Bypass valve opened
12/14/2010	10:30:47 PM	Helium MFC set to  100.000000
12/14/2010	10:30:47 PM	H2 MFC set to  0.000000
12/14/2010	10:30:47 PM	BCl3 MFC set to  0.000000
12/14/2010	10:30:47 PM	PHl3 MFC set to  0.000000
12/14/2010	10:30:47 PM	SiCl4 MFC set to  0.000000
12/14/2010	10:30:47 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:30:47 PM	Tube furnace set to 0
12/14/2010	10:30:50 PM	Helium valve closed
12/14/2010	10:30:50 PM	H2 valve closed
12/14/2010	10:30:50 PM	BCl3 valve closed
12/14/2010	10:30:50 PM	PH3 valve closed
12/14/2010	10:30:50 PM	SiCl4 pre valve closed
12/14/2010	10:30:50 PM	SiCl4 post valve closed
12/14/2010	10:30:50 PM	Bubbler valve closed
12/14/2010	10:30:50 PM	Main Vac valve opened
12/14/2010	10:30:50 PM	Bypass valve opened
12/14/2010	10:30:50 PM	Helium MFC set to  0.000000
12/14/2010	10:30:50 PM	H2 MFC set to  0.000000
12/14/2010	10:30:50 PM	BCl3 MFC set to  0.000000
12/14/2010	10:30:50 PM	PHl3 MFC set to  0.000000
12/14/2010	10:30:50 PM	SiCl4 MFC set to  0.000000
12/14/2010	10:30:50 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:30:50 PM	Tube furnace set to 0
12/14/2010	10:30:51 PM	Run finished at 10:30 PM
12/14/2010	10:30:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/14/2010	10:32:39 PM	Helium MFC set to  60.000000
12/14/2010	10:32:39 PM	Helium valve opened
12/14/2010	10:32:52 PM	Helium MFC set to  0.000000
12/14/2010	10:32:53 PM	Helium valve closed
12/14/2010	10:34:12 PM	Recipe started at 10:34 PM
12/14/2010	10:34:12 PM	Helium valve closed
12/14/2010	10:34:12 PM	BCl3 valve closed
12/14/2010	10:34:12 PM	PH3 valve closed
12/14/2010	10:34:12 PM	SiCl4 pre valve closed
12/14/2010	10:34:12 PM	SiCl4 post valve closed
12/14/2010	10:34:12 PM	Main Vac valve closed
12/14/2010	10:34:12 PM	Bypass valve closed
12/14/2010	10:34:12 PM	Bubbler valve closed
12/14/2010	10:34:12 PM	H2 valve opened
12/14/2010	10:34:12 PM	Helium MFC set to  0.000000
12/14/2010	10:34:12 PM	H2 MFC set to  500.000000
12/14/2010	10:34:12 PM	BCl3 MFC set to  0.000000
12/14/2010	10:34:12 PM	PHl3 MFC set to  0.000000
12/14/2010	10:34:12 PM	SiCl4 MFC set to  0.000000
12/14/2010	10:34:12 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:34:12 PM	Tube furnace set to 200
12/14/2010	10:35:29 PM	Helium valve closed
12/14/2010	10:35:29 PM	BCl3 valve closed
12/14/2010	10:35:29 PM	PH3 valve closed
12/14/2010	10:35:29 PM	SiCl4 pre valve closed
12/14/2010	10:35:29 PM	SiCl4 post valve closed
12/14/2010	10:35:29 PM	Main Vac valve closed
12/14/2010	10:35:29 PM	Bypass valve closed
12/14/2010	10:35:29 PM	H2 valve opened
12/14/2010	10:35:29 PM	Bubbler valve opened
12/14/2010	10:35:29 PM	Helium MFC set to  0.000000
12/14/2010	10:35:29 PM	H2 MFC set to  500.000000
12/14/2010	10:35:29 PM	BCl3 MFC set to  0.000000
12/14/2010	10:35:29 PM	PHl3 MFC set to  0.000000
12/14/2010	10:35:29 PM	SiCl4 MFC set to  0.000000
12/14/2010	10:35:29 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:35:29 PM	Tube furnace set to 1001
12/14/2010	10:56:30 PM	Helium valve closed
12/14/2010	10:56:30 PM	PH3 valve closed
12/14/2010	10:56:30 PM	Main Vac valve closed
12/14/2010	10:56:30 PM	Bypass valve closed
12/14/2010	10:56:30 PM	H2 valve opened
12/14/2010	10:56:30 PM	BCl3 valve opened
12/14/2010	10:56:30 PM	SiCl4 pre valve opened
12/14/2010	10:56:30 PM	SiCl4 post valve opened
12/14/2010	10:56:30 PM	Bubbler valve opened
12/14/2010	10:56:30 PM	Helium MFC set to  0.000000
12/14/2010	10:56:30 PM	H2 MFC set to  500.000000
12/14/2010	10:56:30 PM	BCl3 MFC set to  10.000000
12/14/2010	10:56:30 PM	PHl3 MFC set to  0.000000
12/14/2010	10:56:30 PM	SiCl4 MFC set to  50.000000
12/14/2010	10:56:30 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	10:56:30 PM	Tube furnace set to 1000
12/14/2010	11:11:30 PM	H2 valve closed
12/14/2010	11:11:30 PM	BCl3 valve closed
12/14/2010	11:11:30 PM	PH3 valve closed
12/14/2010	11:11:30 PM	SiCl4 pre valve closed
12/14/2010	11:11:30 PM	SiCl4 post valve closed
12/14/2010	11:11:30 PM	Main Vac valve closed
12/14/2010	11:11:30 PM	Bypass valve closed
12/14/2010	11:11:30 PM	Helium valve opened
12/14/2010	11:11:30 PM	Bubbler valve opened
12/14/2010	11:11:30 PM	Helium MFC set to  500.000000
12/14/2010	11:11:30 PM	H2 MFC set to  0.000000
12/14/2010	11:11:30 PM	BCl3 MFC set to  0.000000
12/14/2010	11:11:30 PM	PHl3 MFC set to  0.000000
12/14/2010	11:11:30 PM	SiCl4 MFC set to  0.000000
12/14/2010	11:11:30 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	11:11:30 PM	Tube furnace set to 0
12/14/2010	11:11:35 PM	Helium valve closed
12/14/2010	11:11:35 PM	H2 valve closed
12/14/2010	11:11:35 PM	BCl3 valve closed
12/14/2010	11:11:35 PM	PH3 valve closed
12/14/2010	11:11:35 PM	SiCl4 pre valve closed
12/14/2010	11:11:35 PM	SiCl4 post valve closed
12/14/2010	11:11:35 PM	Main Vac valve closed
12/14/2010	11:11:35 PM	Bypass valve closed
12/14/2010	11:11:35 PM	Bubbler valve closed
12/14/2010	11:11:35 PM	Helium MFC set to  0.000000
12/14/2010	11:11:35 PM	H2 MFC set to  0.000000
12/14/2010	11:11:35 PM	BCl3 MFC set to  0.000000
12/14/2010	11:11:35 PM	PHl3 MFC set to  0.000000
12/14/2010	11:11:35 PM	SiCl4 MFC set to  0.000000
12/14/2010	11:11:35 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	11:11:35 PM	Tube furnace set to 0
12/14/2010	11:11:40 PM	Helium valve closed
12/14/2010	11:11:40 PM	H2 valve closed
12/14/2010	11:11:40 PM	BCl3 valve closed
12/14/2010	11:11:40 PM	PH3 valve closed
12/14/2010	11:11:40 PM	SiCl4 pre valve closed
12/14/2010	11:11:40 PM	SiCl4 post valve closed
12/14/2010	11:11:40 PM	Main Vac valve closed
12/14/2010	11:11:40 PM	Bubbler valve closed
12/14/2010	11:11:40 PM	Bypass valve opened
12/14/2010	11:11:40 PM	Helium MFC set to  0.000000
12/14/2010	11:11:40 PM	H2 MFC set to  0.000000
12/14/2010	11:11:40 PM	BCl3 MFC set to  0.000000
12/14/2010	11:11:40 PM	PHl3 MFC set to  0.000000
12/14/2010	11:11:40 PM	SiCl4 MFC set to  0.000000
12/14/2010	11:11:40 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	11:11:40 PM	Tube furnace set to 0
12/14/2010	11:11:46 PM	H2 valve closed
12/14/2010	11:11:46 PM	BCl3 valve closed
12/14/2010	11:11:46 PM	PH3 valve closed
12/14/2010	11:11:46 PM	SiCl4 pre valve closed
12/14/2010	11:11:46 PM	SiCl4 post valve closed
12/14/2010	11:11:46 PM	Main Vac valve closed
12/14/2010	11:11:46 PM	Bypass valve closed
12/14/2010	11:11:46 PM	Bubbler valve closed
12/14/2010	11:11:46 PM	Helium valve opened
12/14/2010	11:11:46 PM	Helium MFC set to  500.000000
12/14/2010	11:11:46 PM	H2 MFC set to  0.000000
12/14/2010	11:11:46 PM	BCl3 MFC set to  0.000000
12/14/2010	11:11:46 PM	PHl3 MFC set to  0.000000
12/14/2010	11:11:46 PM	SiCl4 MFC set to  0.000000
12/14/2010	11:11:46 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	11:11:46 PM	Tube furnace set to 0
12/14/2010	11:12:25 PM	H2 valve closed
12/14/2010	11:12:25 PM	BCl3 valve closed
12/14/2010	11:12:25 PM	PH3 valve closed
12/14/2010	11:12:25 PM	SiCl4 pre valve closed
12/14/2010	11:12:25 PM	SiCl4 post valve closed
12/14/2010	11:12:25 PM	Main Vac valve closed
12/14/2010	11:12:25 PM	Bypass valve closed
12/14/2010	11:12:25 PM	Helium valve opened
12/14/2010	11:12:25 PM	Bubbler valve opened
12/14/2010	11:12:25 PM	Helium MFC set to  500.000000
12/14/2010	11:12:25 PM	H2 MFC set to  0.000000
12/14/2010	11:12:25 PM	BCl3 MFC set to  0.000000
12/14/2010	11:12:25 PM	PHl3 MFC set to  0.000000
12/14/2010	11:12:25 PM	SiCl4 MFC set to  0.000000
12/14/2010	11:12:25 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	11:12:25 PM	Tube furnace set to 0
12/14/2010	11:32:25 PM	Helium valve closed
12/14/2010	11:32:25 PM	H2 valve closed
12/14/2010	11:32:25 PM	BCl3 valve closed
12/14/2010	11:32:25 PM	PH3 valve closed
12/14/2010	11:32:25 PM	SiCl4 pre valve closed
12/14/2010	11:32:25 PM	SiCl4 post valve closed
12/14/2010	11:32:25 PM	Main Vac valve closed
12/14/2010	11:32:25 PM	Bypass valve closed
12/14/2010	11:32:25 PM	Bubbler valve closed
12/14/2010	11:32:25 PM	Helium MFC set to  0.000000
12/14/2010	11:32:25 PM	H2 MFC set to  0.000000
12/14/2010	11:32:25 PM	BCl3 MFC set to  0.000000
12/14/2010	11:32:25 PM	PHl3 MFC set to  0.000000
12/14/2010	11:32:25 PM	SiCl4 MFC set to  0.000000
12/14/2010	11:32:25 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	11:32:26 PM	Tube furnace set to 0
12/14/2010	11:32:26 PM	Run finished at 11:32 PM
12/14/2010	11:37:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/14/2010	11:37:05 PM	Recipe started at 11:37 PM
12/14/2010	11:37:05 PM	Helium valve closed
12/14/2010	11:37:05 PM	H2 valve closed
12/14/2010	11:37:05 PM	BCl3 valve closed
12/14/2010	11:37:05 PM	PH3 valve closed
12/14/2010	11:37:05 PM	SiCl4 pre valve closed
12/14/2010	11:37:05 PM	SiCl4 post valve closed
12/14/2010	11:37:05 PM	Main Vac valve closed
12/14/2010	11:37:05 PM	Bubbler valve closed
12/14/2010	11:37:05 PM	Bypass valve opened
12/14/2010	11:37:05 PM	Helium MFC set to  0.000000
12/14/2010	11:37:05 PM	H2 MFC set to  0.000000
12/14/2010	11:37:05 PM	BCl3 MFC set to  0.000000
12/14/2010	11:37:05 PM	PHl3 MFC set to  0.000000
12/14/2010	11:37:05 PM	SiCl4 MFC set to  0.000000
12/14/2010	11:37:05 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	11:37:05 PM	Tube furnace set to 0
12/14/2010	11:38:01 PM	Helium valve closed
12/14/2010	11:38:01 PM	H2 valve closed
12/14/2010	11:38:01 PM	BCl3 valve closed
12/14/2010	11:38:01 PM	PH3 valve closed
12/14/2010	11:38:01 PM	SiCl4 pre valve closed
12/14/2010	11:38:01 PM	SiCl4 post valve closed
12/14/2010	11:38:01 PM	Bubbler valve closed
12/14/2010	11:38:01 PM	Main Vac valve opened
12/14/2010	11:38:01 PM	Bypass valve opened
12/14/2010	11:38:01 PM	Helium MFC set to  0.000000
12/14/2010	11:38:01 PM	H2 MFC set to  0.000000
12/14/2010	11:38:01 PM	BCl3 MFC set to  0.000000
12/14/2010	11:38:01 PM	PHl3 MFC set to  0.000000
12/14/2010	11:38:01 PM	SiCl4 MFC set to  0.000000
12/14/2010	11:38:01 PM	Bypass solenoid MFC set to  0.000000
12/14/2010	11:38:01 PM	Tube furnace set to 0
12/14/2010	11:38:01 PM	Run finished at 11:38 PM
12/14/2010	11:38:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
